Modular F.R.L. Pressure Control Equipment

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

Compact Cylinder

YB-03 YB-05 32, 40 50, 63 6.5 6.5 10 12 18 22 50 60 9 11 80 120 9 Series CVQ Auto Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height 32, 40, 50, 63 D-M9 type/D-M9W type/D-A9 type D-M9V type/D-M9WV type/D-A9V type A W A B Approx.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

1 2 P PG PH C8, C10, C12, N9 N11 (-D) U D B (R) Stations 02, 03, When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

Table of Contents

C D E F Dimensions Part no.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

side U side U side D side U side D side 107.8 106 Station Nos.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 25 50, 63 YU-05 YA-05 YB-05 40 Material: Precision die-casting material equivalent to stainless steel 304 80 YU-08 YA-08 YB-08 90 Bore size (mm) O M J E D B Part no. 100 YU-10 YA-10 YB-10 160 K (Width across flats ) YB-03 32, 40 11.5 depth 7.5 34 9 25 7 12 H (With locking) YB-05 50, 63 14.5 depth 8.5 42 11 32 9 12 YB

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

10.5 11 16.5 19 18 A 17 12 10 12.5 B 12.5 18 20.5 19.5 12 16 20 25 32 40 50 63 Auto Switch Mounting Height D-A7H D-A80H D-F7 D-J79 D-F7W D-F79W D-F7BAL D-F79F D-F7NTL D-A73C D-A80C D-F7V D-F7WV D-F7BAVL D-A7 D-A80 D-M9V D-F9WV D-A9V Bore size (mm) D-J79C D-A79W D-P5DWL D-F9BAL U 27 30.5 36.5 40 U 29 32.5 38.5 42 U 26.5 30 36 39.5 U 44 50 56.5 U 26.5 29.5 31.5 34.5 38.5 42 48 54.5 U 20.5

Compact Cylinder with Air Cushion Series RQ

x 140L Mounting bolt size M5 x 65L x 70L x 75L x 85L x 95L x 120L x 145L M6 x 85L x 95L x 105L x 130L x 155L M8 x 90L x 100L x 110L x 135L x 160L M10 x 105L x 115L x 140L x 165L M10 x 120L x 130L x 155L x 180L R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63-30 -

Compact Cylinder with Lock Series CLQ

D-M9W D-M9AL Hs B A 32 to 100 D-A9V D-M9V D-M9WV D-M9AVL B D-A9 D-M9 D-M9W D-M9AL Hs A Auto Switch Proper Mounting Position Auto Switch Mounting Height (mm) (mm) Auto switch model D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL Auto switch model D-A9V D-M9V D-M9WV D-M9AVL D-A9 D-A9V Bore size (mm) Hs Hs 20 25 32 40 50 63 80 100 22.5 25 Bore size (mm) A B A B 24.5 27 20 25 32 40 50 63 80 100 27

RQ

Mounting bolt C D Mounting bolt Mounting bolt Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

5 Port Solenoid Valve Series VQZ1000/2000/3000

The dashed lines indicate the DIN rail mounting [-D].

CLQ

Mounting Height Proper Auto Switch Mounting Position D-M9 D-M9V D-F9W D-F9WV D-A9V D-F9BAL D-M9V D-F9WV D-A9 D-A9V Bore size (mm) D-F9BAL Bore size (mm) Hs Hs Hs 20 A B A B A B 22 22.5 25 20 25 6.5 36 3.5 37 7.5 33 27 24 24.5 25 32 41 8.5 42 9.5 38 5.5 26.5 27 29 32 40 8 44 9 43 40 5 30 30.5 32.5 40 50 10.5 11.5 49 7.5 50 46 36.5 38.5 36 50 63 14.5 48 13.5 49 45 10.5 40 42 39.5 63 80 53.5

VQ7-6/7-8

Rubber seal 15 or less 31.0 (1.7) VQ7-6-FHG-DMetal seal 40 or less 25.5 (1.4) Closed center 0.48 VQ7-6-FHG-D-R Rubber seal 45 or less 27.0 (1.5) VQ7-6 VQ7-6-FJG-DMetal seal 40 or less 27.0 (1.5) Exhaust center 0.48 VQ7-6-FJG-D-R Rubber seal 45 or less 31.0 (1.7) VQ7-6-FPG-DMetal seal 50 or less 20.0 (1.1) Double check 0.84 VQ7-6-FPG-D-R Rubber seal 50 or less 20.0 (1.1) VQ7-6-FIG-DMetal

SV

side D D D D D D SS5V1-16S3AD-06B-C61 set (manifold part no.)

Compact Cylinder with Lock Series CLQ

(Example) For bore size 40 Part number A type mounting bracket . YA-03 Joint . YU-03 J E T1 B 2-D through 2-O counter bore (mm) Bore size (mm) B D E J M O Part no.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

M L 8 12 KPQL12-00 KPGL12-00 31.4 7.5 25 50 40 20 20.9 Note 1) D indicates the maximum diameter.

Compact Cylinder with Air Cushion Series RQ

30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 9 8 9.5 13.5 10 3 Compact Cylinder with Air Cushion Double Acting: Single Rod Series RQ Auto Switch Mounting Bracket Part Nos.

LEC-OM02704CN

M-A 2 L ( ) AWG 20 B1 AWG 20 B2 . 13 9 13 13.2 (1) [W] LEC-MR-RB-032 LEC-MR-RB-12 [40] [40] LECSC-S5 30 LECSC-S7 10 30 100 LECSC-S8 10 30 100 (2) (2) PA02 PA02 0 0 00 100W 200W / 400W 02 LEC-MR-RB-032 03 LEC-MR-RB-12 13 10 13 (3) 13.4 100 5m (a) LECSCP-DP-CG3G4 G3-G4 P-D P-D 1 P P C C G3 D (2) 1) G4 5m (1) 1.

Valve Single Unit

D D side Valve stations Note Stations Symbol Depending on the connector, the number of stations is limited. For details, refer to pages 1-6-82 to 85, 112, 119, 124, and 127. 02 2 stations How to Order Valves 20 20 stations 5 LOZ SX 3 2 40 This also includes the number of blanking plate assemblies.

Fluoropolymer Piping Equipment

Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4