Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ2000 Max. 24 stations Max. 20 stations C3, C4, C6, M5 C4, C6, C8 C8 C10 The total number of stations is tabulated starting from station one on the D-side.

EXxx-OMW0014CN

1 Valve 2, 3 diagnostics 01 2 Valve 4, 5 diagnostics 01 3 Valve 6, 7 diagnostics 01 4 Valve 8, 9 diagnostics 01 5 Valve 10, 11 diagnostics 01 6 Valve 12, 13 diagnostics 01 7 Valve 14, 15 diagnostics 01 Valve diagnostics 2 . 5-5 Valve diagnostics 2 Bit 0 Valve 16, 17 diagnostics 01 1 Valve 18, 19 diagnostics 01 2 Valve 20, 21 diagnostics 01 3 Valve 22, 23 diagnostics 01 4 Valve 24, 25

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F:M5.X O.8 I F:M6 x 1 D E t3 I D." ~ ' G 1J 2O 8 3 19 19 25 ' 45 14 3 3.5 24 15 1.7 I ZPT20~ 20 23 8 12 4 40 ZPT02U 2 2.6 1.2 ZPT04U ' 4 . .. a:.e 1.6 ZPT06U 6 7 08 '9 ' 12 ZPT2Sg . 25 28 I 14 3 .8 4 25 , 45 , ''24 '' . '5 : .

LEC-OM069xx

i s p l a y a n d SigmaWin+TM 2.

HRX-OM-X027

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-X027 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-M090

--20, HRS024--20 . 9-11 9.6 Pump capacity . 9-12 9.6.1 HRS012--10-(BJM), HRS018--10-(BJM) . 9-12 9.6.2 HRS012--20-(BGJM), HRS018--20-(BGJM), HRS024--20-(BGJM) . 9-12 9.6.3 HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT . 9-13 9.6.4 HRS012--20-T, HRS018--20-T, HRS024--20-T . 9-13 9.6.5 HRS012--20-MT, HRS018--20-MT, HRS024--20-MT . 9-14 9.7 Required facility water flow (for water-cooled

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D 43 Order Made Specifications OUT SUP OUT Specifications/Content Symbol Clean room specifications 10 Copper-free specifications 20 Approx.

2/3 Port Valve for Various

Model Power source Frequency (Hz) 50 25 12 60 20 8 AC VXP21 DC 50 45 20 60 40 15 AC VXP22 DC 50 60 25 60 50 20 AC VXP23 DC Operating Fluid and Ambient Temperature High temperature water (3) Operating fluid temperature (C ) Ambient temperature (C ) Steam (3) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E) High temperature oil (3) (D) (S) 99 100 183

ARM10/11

14 15 51 52 53 63 64 65 0.6 0.2 0.4 20 MPa 24 SMC 32.5 20 0.5 0.1 0.3 24 56 17 17 5.

ARM10/11

14 15 51 52 53 63 64 65 0.6 0.2 0.4 20 MPa 24 SMC 32.5 20 0.5 0.1 0.3 24 56 17 17 5.

Fieldbus System

U U side (2 to 10 stations) D D side (2 to 10 stations) B Both sides (2 to 20 stations) 16 16 stations 02 2 stations Specified layout Note 2) (Available up to 32 solenoids) 20 20 stations A, B port size (Metric) A, B port size (Inch) Symbol A, B port P, E port Applicable series C3 3.2 One-touch fitting 8 One-touch fitting SV1000 C4 4 One-touch fitting C6 6 One-touch fitting C4 4 One-touch

HRX-OM-W038

0.0 5 0 10 20 30 5 0 10 20 30 Circulating fluid flow[L/min] Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS040--20-(BJM)) 9.6.2 HRS040--20-T,-MT 0.5 50 Available area 0.4 40 Circulating fluid pressure[MPa] Pump head[m] Outlet50Hz Outlet:60Hz 0.3 30 0.2 20 0.1 10 Return port Available area 0 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-8 Pump capacity(HRS040--20-T/-MT)

HRX-OM-W004

HRR Series 3.1 Precautions wiring communication 3-1 HRX-OM-W004 Chapter 3 Serial communication 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

Shock Absorbers and Rate Controls

(Itlodl) A ( D F H JA IB IH HPI t0ftFt, -2, -3 215 ld25 x 1.5 ! 27 138 ?0 !6.7 4.6 HPt | ottt(t. -2, -3 ?',t5 M25 x 2.0 I r38 20 36.7 31.8 4.6 All dimensions ln millmeters.

VDW Series

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.

Serial Network

U, D)-SSL1 Y VQ2000/4000/5000 EX123 (U, D)-SSL2 Y IP53 or NEMA12 comes as optional.

Soft Start-up Valve

Spacer with bracket (YT-D) Spacer (Y-D) Connecting Spacer for Modular Type F.R.L. Unit Series AV2000-A AV3000-A AV4000-A AV5000-A Spacer Y200-D Y300-D Y400-D Y600-D Spacer with bracket Y200T-D Y300T-D Y400T-D Y600T-D Applicable model AC20-D AC30-D AC40-D * AC50-D AC60-D * Except port size 06. Note) AV-A series can be connected to AC-A, B series.

VCL

Class 2 Class 3 Class 4 VX2 Enter together in order, counting from station 1 on the D side. VXD OUT port size Material Port size 1/8 (6A) Symbol 01 02 1 Stations 2 3 4 5 n Uside D side VXZ Body material Brass (C37) Stainless steel Seal material Symbol D N 1/4 (8A) FKM VXE All IN ports are 3/8.

HRX-OM-R026

Pump capacity 9.4.4 HRSH090-A-20/40-HRSH090-W-20/400.6 60 Circulating fluid pressure [MPa] 0.5 50 Pump head [m] 0.4 40 Outlet Usable flow rate range 0.3 30 Usable flow rate range 0.2 20 Return port 0.1 10 0 0 0 10 20 30 40 50 60 70 Circulating fluid flow [L/min] Fig. 9-8 Pump capacity (HRSH090-A-20/40-HRSH090-W-20/40-) 0 Pump capacity HRSH Series 9-12 HRX-OM-R026 Chapter 9 Documents 9.5