58

D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W With 2 pcs. (Different surfaces, Same surface), With 1 pc. 105 15 110 115 15 + 40(n 2) 2 (n = 4, 8, 12, 16) 105 + 40(n 4) 2 110 + 40(n 4) 2 115 + 40(n 4) 2 With n pcs. (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) With 2 pcs.

Compact Cylinder Series CQS

Grease pack part no.: GR-S-010 (10 g) 578 Series CQSK Compact Cylinder: Non-rotating Rod Type Double Acting, Single Rod Mounting Bolt for CQSK C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting method: Mounting bolt for through-hole

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

connector D side D side mounting 01F U side U side mounting Non plug-in type Common electrical entry Port size 10 A, B P , EA, EB Symbol 02 03 Non plug-in type Individual electrical entry 40 1 4 3 8 Connector mounting direction One-touch fitting for 8 1 2 C8 D side Non plug-in type One-touch fitting for 10 Symbol Applicable base With connector C10 01T, 10, 40 D Nil D side mounting None

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

Free Mount Cylinder

(D)UKC32 Rc 1 8 Rc 1 8 14 18 26 32 40 50 3 4 8 10 9 10 8 10 16 20 20 22 33 43.5 33.5 34 12 5 to 50 19 21.5 15.5 5 to 50 Model H J L P Q QA R S SA T Y Z MM ZC(D)UKC16 ZC(D)UKC20 ZC(D)UKC25 ZC(D)UKC32 ( ): In the case of a mounted auto switch.

AC Servo Motor Driver (Pulse input type/Positioning type ）

H T E d W T D L Max.

Metal Seal/Rubber Seal Series VQ Body Ported

Negative common specifications L dimension How to order negative COM manifold 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L dimension L kit: 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. VV5Q13 L 08 N N 1 D L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

pilot port) (Lead wire length) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 75.4 [82.4] 34.5 17.5 15.5 96.5 44.5 29.5 29.5 3/8, 1/2 [1(P), 5(EA), 3(EB) port] L plug connector (L): 10-SY9 40(R)-LM plug connector (M): DIN terminal (D, Y): 10-SY9 40(R)-WO3 4 5 M8 connector (WO): 3 4 5 3 4 5 3 4 5 D Y 10-SY9 40(R)10-SY9 40(R)

XL

Valve closed 40 50 63 80 Auto switch type Nil Without auto switch (without built-in magnet) F9N Solid state auto switches F9P D-F9N D-F9P Flange type F9B D-F9B Symbol Type Applicable flange size Nil D KF(NW) K(DN) 16, 25, 40, 50, 63, 80 63, 80 Note 1) The standard lead wire length is 0.5m. For 3m, "L" is added at the end of the part number.

V

2 stations to 20 20 stations T H R E A D T Y P E PT 00T NPTF Stations (n) 2 3 4 5 6 7 8 9 10 L1 53 69 85 101 117 133 149 165 181 L2 40 56 72 88 104 120 136 152 168 L3 16 32 48 64 80 96 112 128 144 L4 8 24 40 56 72 88 104 120 136 H O W T O O R D E R M A N I F O L D T Y P E 40 S I D E P O R T E D D I M E N S I O N S M A N I F O L D T Y P E 40 S I D E P O R T E D (N)VV3Z3 40 1 N U M B E R O

Table of Contents

ZSM PF2 IF Sensor Flow range Data 4 l/min 20 l/min 40 l/min 1.8 l/min 0.4 l/min 10 l/min 0.4 l/min 4 l/min PF2D504 4.5 l/min 0.25 l/min 1.8 l/min 20 l/min PF2D520 1.3 l/min 21 l/min 4 l/min 40 l/min PF2D540 2.5 l/min 45 l/min Rated flow rate range of sensor Set flow rate range of sensor 16-11-47 1 For details about certified products conforming to international standards, visit us at www.smcworld.com

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(Value in the initial state) Solenoid specifications Grommet(G), (H) , L plug connector (L), M plug connector (M), DIN terminal (D), M8 connector (W) Electrical entry Base mounted G, H, L, M, W D JIS Symbol 24, 12, 6, 5, 3 24, 12 DC AC 50/60Hz Rated coil voltage V 100, 110, 200, 220 10% of rated voltage 0.35 {With indicator light: 0.4 (DIN terminal with indicator light: 0.45)} 0.1 (With

7ND9071en

Temperature range: -40 to +85 C / -40 to +185 F. Japanese Ex-d Certification: II 2 G Ex d IICT6 Gb II 2 D Ex tb IICT80C Db Temperature range: T6: < +60 C. Not applicable to 3. sign "1" or "4".

Cylinder with Lock

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches 32 40 50 63 80 100 2 (Same surface) 50 1, 2 (Different surfaces) 10 n 10 + 40 (n 2) D-M9l D-M9lW 2 (Same surface) 40 1, 2 (Different surfaces) 10 n 10 + 30 (n 2) D-M9lV D-M9lWV D-M9lA 2 (Same surface) 55 50 1, 2 (Different surfaces) 15 10 n 15 + 40 (n 2) 10 + 40 (n 2) D-M9lAV 2 (Same surface) 40 1,

High Vacuum Angle Valve, XL Series

Valve closed 40 50 63 80 Auto switch type Nil Without auto switch (without built-in magnet) F9N Solid state auto switches F9P D-F9N D-F9P Flange type F9B D-F9B Symbol Type Applicable flange size Nil D KF(NW) K(DN) 16, 25, 40, 50, 63, 80 63, 80 Note 1) The standard lead wire length is 0.5m. For 3m, "L" is added at the end of the part number.

ZP

A B C D L M Y A M D L B Y C Model Model ZPT40B-B-A14 ZPT20B-B5-A10 40 43 34 47.5 24.4 48 16 23.5 32.5 12.4 20 25 22 10.5 19 ZPT50B-B-A14 ZPT25B-B5-A10 50 53 38 51.5 32.4 57 24 33 15.6 25 28 27 ZPT32B-B5-A10 29 38 18.9 32 37 14 34 Dimensions by Stroke Dimensions by Stroke 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 20 25 32 Model G E F E F F E 40 50 ZPTB10-B-A14 ZPTB10-B5-A10 60

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L RR,IU1 E, A, L, t MM NX Part no A2 NDHIO boreSlzc Dl!:;;I~ '!I!

Refrigerated Air Dryers Series IDF/IDU

HAA HAW AT IDF IDU C IDFA F IDFB M ID N IDG L P AMG K 4 x 13 AFF AM B C D E F G K L M N P Q Dimensions (mm) A Port size Model IDFA22E IDFA37E AMD R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AMH AME IDFA55E, IDFA75E AMF A R B SF SFD Q E LLB D AD GD G F C M N L P K 4 x 13 R Dimensions (mm) A B C D E F G K L M N P Q Model IDFA55E IDFA75E Port size 800 (868) R 2 470 855 (

Air Slide Table Series MXS

x 8 M5 x 0.8 P M MXS-AS6 (L)-X11 15 26.5 C A 5 16.5 MXS-AS8 (L) MXS8 (L) 7 21.5 8 3 14.6 7 10 M3 x 10 11 M3 x 12 15 26.5 MXS-AS8 (L)-X11 M6 x 1 MXS-AS8 (L)-X12 25 5 36.5 B 20 MXS-AS12 (L) E MXS12 (L) 9.5 12 4 18.5 10 13 M4 x 12 16 M4 x 15 31 M8 x 1 15 30 MXS-AS12 (L)-X11 MXS-AS12 (L)-X12 25 40 D F MXS-AS16 (L) 5 24.5 MXS16 (L) 11 14 5 12 16.5 M5 x 18 19 M5 x 18 37 21 MXS-AS16 (L)-X11 15

LJ1H

2 3 4 5 2m 3m 4m 5m F R L T B Axial entry Right entry Bottom entry Specifications Intermediate strokes 100 5.5 200 6.3 300 7.1 400 7.8 500 8.6 5 to 40 (with no condensation) 5 150 600 mm kg C kg N mm/s mm Standard stroke For manufacture of strokes other than the standard strokes on the left, add "-X2" at the end of the part number.