Table of Contents

(mm) Proper tightening torque (Nm) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 6, 10 16 20, 25 32 M3 M4 M5 M6 1.08 10% 2.45 10% 5.10 10% 8.04 10% 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187)

0.4

D-side end plate assembly part no. !6 !

Electric Actuator

force lb (N) Max. gripping force lb (N) Stroke/both Stroke/both Stroke/both Stroke/both Size sides (mm) sides (mm) sides (mm) force lb (N) Basic Compact Basic Compact Basic Compact 10 16 20 25 32 40 10 16 20 25 10 20 32 40 10 20 32 40 1.35 (6) 1.80 (8) 4 6 1.35 (6) 1.80 (8) 4 6 1.57 (7) 16 (32) 24 (48) 32 (64) 40 (80) 1.24 (5.5) 0.79 (3.5) 4 6 8 3.15 (14) 3.15 (14) 6.29 (28) 4.95 (22) 20.2

MXS Series Air Slide Table

0 HA GA 5H9 4 deep +0.030 0 A B NN-M6 X 1 thread 12 deep 6 1 26 5.1 9.5 10.5 10.5 A B 24 10.5 24 10.5 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 35 35 35 40 30 55 65 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10 15 40 55 68 J 40 40 40

LJ1H

LG1 LC1 LX LC6D/LC6C Switches 80 5H10 depth 8 8-M5 x 0.8 thread depth 8 45 20 Cable entry side Body mounting reference plane 5H10 depth 6 Z section detail 100 201 60 50 Z section 43 Stroke + 125 (table movement range) 192 3.3 30 90 A section 83 5.8 1.7 4.8 80 Stroke + 360 A section detail (Switch groove) 11.5 40 (T-slot pitch) 36 45 3-5H10 depth 5 9.4 18 4.5 10 Stroke + 145 80 40 30 T-slot

CNG

CNS D-H7C D-B5, D-B6, D-B59W CLS HS HS Auto switch Auto switch 12 8.5 CLQ 24.5 16 MLGP A B A B 33 38.2 RLQ MLU Proper Auto Switch Mounting Position Auto Switch Mounting Height ML1C Auto switch model D-C7/C80 D-H7 D-H7W D-H7NF D-H7BAL D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7/C80 D-C73C D-C80C D-B5/B64 DD-B5/B64 D-B59W D-G5NTL D-H7C D-C73C D-C80C D-G5NTL D-B59W -X Bore size (mm) A B A B A B A B

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

40 30 182 172 162 157 152 142 132 127 122 117 112 107 102 97 92 212 202 192 187 182 172 162 157 152 147 142 137 132 127 122 70 50 40 8-29-9 10 Series CXS Proper Auto Switch Mounting Position (Detection at stroke end) Electrical entry direction: Inward Electrical entry direction: Outward D B A C Operating Range D B D-Z7/Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BAL Bore size (mm) A C 11.5

CRBU

A parallel key is used instead of single flat for size 40. Single flat Single flat D D D D D D D D C Single flat Single flat (mm) 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except for basic type. Note 2) Dimensions and tolerance of the shaft and single flat (a parallel keyway for size 40) are the same as the standard.

RSQ

D-A7H/A80H D-A73C/A80C 14 13 14 13 13 D-A79W 9.5 D-A9/A9V 6 9.5 9.5 D-F7/J79 D-F7V/J79C 6 6 6 D-F7W/J7WV 6 5.5 D-F7BAL/F7BAVL D-F79F D-M9/M9V 3.5 3.5 3.5 D-F9W/F9WV 3 5.5 5.5 5.5 D-F9BAL Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Since this is a guideline

V

2 stations to 20 20 stations T H R E A D T Y P E PT 00T NPTF Stations (n) 2 3 4 5 6 7 8 9 10 L1 53 69 85 101 117 133 149 165 181 L2 40 56 72 88 104 120 136 152 168 L3 16 32 48 64 80 96 112 128 144 L4 8 24 40 56 72 88 104 120 136 H O W T O O R D E R M A N I F O L D T Y P E 40 S I D E P O R T E D D I M E N S I O N S M A N I F O L D T Y P E 40 S I D E P O R T E D (N)VV3Z3 40 1 N U M B E R O

MGG

D-H7BAL D-H7 D-H7W D-H7F D-H7BAL D-B59W D-H7 D-H7C Applicable bore size A Hs Hs Hs Hs A A A A A A B B B B B B B 20 30.5 27.5 27.5 27 24.5 41.5 25.5 45 27 43.5 28.5 42 27 40 24 44.5 45.5 29.5 25 30.5 30 30 29.5 27 41.5 25.5 45 27 43.5 28.5 42 27 40 24 44.5 29.5 45.5 32 31.5 33.5 33.5 33 30.5 41.5 26.5 46 28 44.5 29.5 43 28 40 25 45.5 30.5 46.5 40 36.5 38 38 37.5 35 50.5 31.5 55.5 33 53.5

Cylinder with Lock Series CNG

2 color indication,latch type with diagnostic output) D-H7LF 20 25 32 40 Cylinder with lock Series CNG Double acting Single rod Maximum to 800 Grommet (2 color indication, with diagnostic output) D-H7NF Grommet (2 color indication, water resistant) D-H7BA Connector D-H7C Grommet (with timer) 1in = 25.4mm D-G5NT II Cylinder with Lock Double Acting: Single Rod Series CNG 20, 25, 32, 40

SYJ3000/5000/7000

6 17 17 43.9 15 8.5 1/8 (P, R port) 32 24 45.5 L plug connector (L): SYJ5 40-L-01 3 4 5 M plug connector (M): SYJ5 40-M-01 3 4 5 DIN terminal (D): SYJ5 40-D-01 3 4 5 M8 connector (WO): SYJ5 40-WO-01 3 4 5 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 Max. 10 75.4 50.1 [57.1] 64.1 34.7 49 M8 x 1 54.6 37.1 61.2 [68.2] Approx. 300 (Lead wire length) 6 Pg7 6 6 6 65.8 103.4

Precautions 1

Mounting Position (mm) D-C7 D-C80 D-C73C D-C80C A D-H7 D-H7C D-H7W D-H7NF Auto switch model D-A9 D-M9 D-M9W D-B59W D-B5 D-B64 D-G5NTL Bore size (mm) A A B B A B A B A B B A B 20 25 32 40 10.5 9.5 6 4 3 6 5 2.5 1.5 1 0 6.5 5.5 7 10.5 9.5 6 4 3 6 5 2.5 1.5 1 0 6.5 5.5 7 11.5 10.5 7 5 4 7 6 3.5 2.5 2 1 7.5 6.5 8 17.5 15.5 12 10 9 12 11 8.5 7.5 7 6 13.5 11.5 13 Note) Adjust the auto switch after

Brake mechanism added

D-M9WV D-M9A D-M9AV D-B5 D-B64 D-A9 D-A9V D-F5NT D-A59W CEP1 CE1 Bore size (mm) CE2 CE2 A B A B A B A B A B A B A B A B A B 40 50 63 80 100 6 4 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 ML2B 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 2.5 3 9 4.5 6.5 14 12.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 6.5 4.5 8 10 17.5 16 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 7.5 8 14

SMC Pneumatic Clean Series

to 25 6 to 25 10/16 15/32 Bore size 610 6 D-C7/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

XL

Indicator: 6 High Vacuum Angle Valve Series XLA, XLAV Dimensions (mm) 1in = 25.4mm (b) XLA/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) Heater (optional) H B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 E Note 1) B 103 113 158 170 196 235 A 40 50 65 70 88 90 Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 12 11 11

LEC-OM071xx

Forward Run Prohibited Pn50A.3 7 8 L /P-OT 9 A B C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D E F L EXT1 * *

2 Phase Stepper Motor/Without Motor Brake Series LXS

(A contact) D-F9N D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 2 wire 3 wire/NPN 3 wire/PNP 2 wire N.O. (A contact) None Yes (cable length 0.3m) Nil S N.C. (B contact) 1 2 N.C. (B contact) N.C. (B contact) None Auto/Proximity switch type N.C. (B contact) Nil 6 6 pcs. N.O.