SMC

3H9 depth 2.5 +0.025 0 HA GA 3H9 depth 2.5 +0.025 0 B A NN-M4 x 0.7 thread depth 8 4 6.5 1 7 7 12 3.2 B A 11 5.5 5.5 11 H (NN1) x H G Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

5 6 6 Applicable tubing size (inch) Fitting type Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1 2 1 2 1 2 3 1 2 1 2 1 2 A A B C A B A B A B A B Symbol E T P U F Type Union elbow Union tee Panel mount union Union Union flange Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

KJ

(inch) 10-32 UNF Connection thread UNF NPT <10-32 UNF> <10-32 UNF> H (Width across flats) Min. port size D1 Note) D2 L1 M A Weight (g) Model L2 L3 KQ2V01-32 KQ2V01-34S KQ2V03-32 KQ2V03-34S KQ2V05-34S KQ2V07-32 KQ2V07-34S KQ2V07-35S KQ2V09-34S KQ2V09-35S KQ2V09-36S KQ2V11-35S KQ2V11-36S KQ2V13-36S KQ2V13-37S 8.4 9.6 15 22.5 15 22.5 22.5 20.5 22.5 26.5 24.5 25.5 30 29.5 30 30 31 5 14 6 14

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Not required. a=1000 100 m Mey a 0 10 50 40 30 20 Transfer load m (kg) Refer to page 94 for deflection data. 68 Standard Motor/Horizontal Mount Specification Series LTF8 Dimensions/LTF8PH (2 x n1) x 6.6, Drill through 13, counter bore depth 6 thread depth 9 80 4 x M6 x 1 46 Sensor cable Sensor cable fixing clip Stroke + 96 (Table movement range) (25.5) 60 106.5 56 21.5 A 61.5 45 A 21.5 31.5

Table of Contents

6 w !7 !1 !0 !6 w !7 !1 !0 !5 w !7 !0 o !2 !4 u t t q t u y !3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !

Programless controller Step motor (servo 24 VDC)

JXC-OMU0029-A 6.

Mechanically Jointed Rodless Cylinders

5 5 6 6 Note) Floating brackets are shipped as a set of left and right brackets.

One-touch Fittings

9 1/2 15 to 30 14 to 15 2) The gasket can be reused up to 6 to 10 times.

Cylinder with Lock Series CLS

(n = 2, 4, 6, 8) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) 2 pcs. (Different surfaces, Same surface), 1 pc. 15 90 95 D-M9AVL 95 + 30 (n2) 2 (n = 2, 4, 6, 8) 15 + 30 (n2) 2 90 + 30 (n2) 2 n pcs. (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) D-A5/A6 D-A59W D-F5/J5 D-F5W D-J59W D-F5BAL D-F59F 2 pcs.

Refrigerated Air Dryers

11) [opposite side] IDF4E-20, IDF6E-20 IDF8E-20, IDF11E-20 5 A IDU3E-20, IDU4E-20 IDU6E-20, IDU8E-20, IDU11E-20 [mm] Dimensions Model A B C D E F IDF22E-20 59 40 IDF15E1-20, IDF22E-20, IDF37E-20 IDU15E1-20 IDF22E-30, IDF37E-30 IDF55E-30 IDU22E-30, IDU37E-30, IDU55E-30 25 46 IDF37E-20 IDF22E-30 39 30 mA 125 10 A 60 60 IDF37E-30 IDF55E-30 148 81 50 36 IDF75E-30 133 73 IDU22E-30 151 74 200 V

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Parts (b) Lever Description Note C4: A, B port One-touch fitting for 4 C6: A, B port One-touch fitting for 6 No.

KR

Cover (Option) Port A size No. of Port A Porting Port A Port B Model Port B size 10 tube 12 tube Rc Rc 6 tube 8 tube 6 tube 8 tube KRM11 One-touch fitting One-touch fitting 6, 10 1 4 3 8 KRM12 One-touch fitting Rc female thread 6, 10 Applicable Tubing Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

CNA

+ 30 (n 2) n = 2, 4, 6, 8, 100 + 100 (n 2) n = 2, 3, 4, 100 + 100 (n 2), n = 2, 4, 6, 8, Different sides RLQ n Same side MLU 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 ML1C Same side 35 + 30 (n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30 (n 2) n = 2, 4, 6, 8, 90 + 50 (n 2) n = 2, 4, 6, 8, 55 + 50 (n 2) n = 2, 3, 4, 75

CNA

6 !0 u @5 i !5 !1 o q %0 y $3 r #3 #1 $1 #6 B A @3 !4 %2 !3 $0 @8 #7 $2 w #0 $7 $9 $5 %1 %3 $6 @1 @4 !8 @0 !7 !

Vacuum Unit

6 p. 31 3 30 m ZK2 SC3 4 A Body gasket1 (10 pcs. per set) Construction !1 p. 31 Applicable nozzle size ZK2 BG5 A 4 For nozzle size 07, 10 6 For nozzle size 12, 15 1 Applicable type Release lever (10 pcs. per set) Construction !

Rotary Table/

Note 10 P523020-5 30 A set of above numbers r, !2, !3, !7, !

HRX-OM-X071

brackets HRR Series 6-4 HRX-OM-X071 Chapter 6 Option 6.5 Option Z 6.5.1 Option Z It is a specification with the following parts removed.

HRX-OM-T002

Air vent valve A Facility water outlet Facility water inlet A view Fig. 8-6 Discharge of the facility water 5.

SQ1000/2000

A 1 () Station 1 SOL. A Station 2 14 () SOL. A Station 3 2 () 1 SOL. A Station 4 14 15 () 2 15 SOL. A 3 3 () Station 5 16 SOL. B 4 16 () 17 5 SOL. A 4 () 18 6 Station 6 SOL. B 19 17 () 7 20 SOL. A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

HRX-OM-X084

1.7.1 Disposal of refrigerant and compressor oil . 1-6 1.7.2 Disposal of product . 1-6 1.8 Material Safety Data Sheet (MSDS) . 1-7 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.1.1 HRR010-A-10. 2-1 2.1.2 HRR010-W-10. 2-2 2.1.3 HRR010-A-20. 2-3 2.1.4 HRR010-W-20. 2-4 2.2 Name and Function of Parts . 2-5 2.2.1 HRR010-A-10/20. 2-5 2.2.2 HRR010-W-10/20. 2-6 2.3