Electric Actuators

C 30 D Refer to page 300 for mounting.

High Vacuum Angle Valve

switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Hydraulic

Made to Order Modification of Rod End Configuration 1 CH2 Series Mounting type Bore size Rod size series Stroke Cylinder options X A0 Indicate the rod end configuration pattern symbol A1 A2 A3 CO.5 30 30 30 30 D D D d d Width across flats F F F A4 A5 A6 30 30 30 D D D d D d 30 30 Width across flats Width across flats F Width across flats F F Note) Female thread effective depth should

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C 30 D Refer to page 300 for mounting.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-A7H/A80H D-A73C/A80C D-F/F7V/F79F D-F7W/F7WV D-J79/J79W D-J79C D-F7BAL/F7BAVL D-Z7/Z80 D-Y59/Y69 D-F7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-A7H, D-A80H D-F7, D-J79, D-F7W D-J79W, D-F7BAL D-F79F, D-F7NTL D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-Y7BAL D-A7 D-A80 D-A79W D-F7NTL D-A7 D-A80 D-A73C D-A80C Bore size (mm) A 32.5 32.5 36.5 A 33 33 37 A 30 30 34 A 38 38 42 A 29 29 33 38.5 42 U 80 88 98

5

Bore size (mm) Dd9 L l m d Part no.

Made to Order

-XC13 (mm) D-F7BA/F7ABV D-A72/A7H/A80H D-A73C/A80C D-M9/D-M9V D-M9W/D-M9WV D-M9A/D-M9AV D-F7/F79F/F7V D-J79/J79C D-F7W/J79W/F7WV D-F7NT D-A7 D-A80 D-A79W Auto switch model A B A B A B A B A B 20 31.5 22.5 (30.5) 30.5 21.5 (29.5) 35.5 26.5 (34.5) 30 21 (29) 27.5 18.5 (26.5) 25 31 23 (31) 30 22 (30) 35 27 (35) 29.5 21.5 (29.5) 27 19 (27) 32 32.5 23.5 (31.5) 31.5 22.5 (30.5) 36.5 27.5 (35.5)

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Output Specifications 25(L) 1 output NPN open collector 30 V, 80 mA or less ZSE4 ZSE4B 26(L) Analog output (1 to 5 V) 67(L) 1 output PNP open collector 80 mA or less 26(L) Analog output (1 to 5 V) 27(L) 2 outputs NPN open collector 30 V, 80 mA or less ZSE4E 67(L) 2 outputs PNP open collector 80 mA or less 13-7-6 7 Multistage Ejector Series ZL Construction q t e !

Electric Actuator/Slider Type

Weight (g) Auto switch model D-M9N(V) D-M9P(V) D-M9B(V) 0.5 m (Nil) 8 7 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 5 m (Z) 68 63 Dimensions (mm) D-M9 D-M9 V M2.5 x 4 L M2.5 x 4 L Indicator light Slotted set screw Slotted set screw 8 Indicator light 2 3.2 4.6 2.6 4 2.7 2.8 2.7 20 2.8 4 22 3.2 2.6 9.5 Most sensitive position 6 4 6 Most sensitive position 62 2-Color Indication Solid State

V100

end plate assembly> L 52 30 10 U side end plate assembly part no.

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Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 3 to 40 L x 3 + 200 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 1 52 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 N x 20 52 L x 3 + 200 N x 6

1

: A22 Symbol: A26 Symbol: A23 T W1 L L L L CP95 RD 30 DA 30 30 DA H1 H1 DA E NCM H1 Symbol: A5 Symbol: A6 Symbol: A7 Symbol: A8 30 DB DB NCA B C1 H B C T B RD T X LA H C1 DW X L H C1 X L X L K L LB -X W E L 30 30 30 L DC 30 Symbol: A30 Symbol: A29 Symbol: A28 Symbol: A27 20L L H1 Data 30 30 30 30 H1 W H1 DA E DA W Symbol: A9 Symbol: A10 Symbol: A11 Symbol: A12 X C0.5 R sphere T T C1

MY1

Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y59A, D-Y69A D-Y59A D-Y69A D-Y7P D-Y7PV D-Y59B D-Y69B Auto switch model no.

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R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

CA2

C0.5 file chamfer R sphere TP R sphere H W1 T H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 MM 30 H A H A H A MM 30 30 L RD C B A H A L K H W MM DA 30 MM DA 30 MM MM AL H LB K A AL H AL L K H L A H Symbol: A28 Symbol: A29 Symbol: A30 30 DA 30 30 MM L W MM W A L H AL A H A T T MM H 65 Series CA2 Made to Order Specifications

ZP

a ZQ sl or an l f ea te d ZF id wo pe rk ZP ty su nt ZCU oi rf ac l j AMJ al e s B Misc.

Battery-less

16: LEFS32(L/R)EA Lead 16: LEFS32(L/R)EA 20 10 Lead 24: LEFS32(L/R)EH Lead 24: LEFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEFS40(L/R)EB Lead 10: LEFS40(L/R)EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEFS40(L/R)EA 30 Lead 30: LEFS40(L/R)EH Lead 20

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Compact Cylinder Series CDQ2 With Auto Switch Minimum Stroke for Auto Switch Mounting (mm) D-A7H D-A80H D-F7 D-J79 D-M9 D-F9W D-A7 D-A80 D-A73C D-A80C D-A9V D-F7W D-J79W D-F7BAL D-F79F D-F9BAL No. of auto switches mounted D-F7V D-J79C D-F9V D-F7WV D-F9WV D-F7BAVL D-P5DWL D-A9 D-A79W CUJ CU 1 pc. 2 pcs. 5 5 10 15 15 20 10 30 CQS 5 10 15 15 20 20 10 30 CQM (g) Weight (g) Additional Weight CQ2

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

ZP

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.