High Power Cylinder Series RHC

HS 8.5 8.5 SMC SMC 16 16 A 36.7 Auto switch A 38.2 B Auto switch Proper auto switch mounting position Auto switch mounting height (mm) (mm) D-B5 D-B6 D-H7 D-H7C D-G5NTL D-H7 W D-H7 F D-H7BAL D-C7 D-C8 D-C73C D-C80C D-B5/B6 D-B59W D-G5NTL Bore size (mm) D-C73C D-C80C D-B59W D-C7,D-C8 D-H7 D-H7C D-H7 W D-H7 F D-H7BAL Bore size (mm) A B A B A B A B A B A HS HS HS B 27 27.5 24.5 20 20 15 17.5

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

(5 Port / Body ported type) Applicable solenoid valve: SYJ3 20-M3 SYJ3 23-M3 SS5YJ3--20-05 AB Port M3 0.5 Applicable blank plate ass'y: SYJ3000-21-1A Valve stations 02 2 stations : : P Port M5 0.8 R Port M5 0.8 20 20 stations Type 31(4 Port / Base mounted type) Type 31 Type S31( ) Single solenoid coil is located on same side as the A, B port.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

(mm) 4 6 8 10 12 (1) AS221FE-01 AS231FE-01 20, 25, 32 R 1/8 AS221FE-02 AS231FE-02 20, 25, 32, 40 R 1/4 AS321FE-03 AS331FE-03 40, 50, 63 R 3/8 AS421FE-04 AS431FE-04 63, 80, 100 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

KJ

d (inch) Applicable tubing O.D.

AS-FPQ/AS-FPG

AS-FG AS-FP AS-FP AS-FM AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ 715

AS-FPQ/AS-FPG

AS-FG AS-FP AS-FP AS-FM AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ 715

Soft Start-up Valve

Simple Specials System Please contact your local sales representative for more details. 2 *1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) AV 00 20 02 B B 1 D q w e r t y u i o A *1 CE compliant Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V

HRX-OM-R016

-(BJMT) . 9-5 9.3.2 HRS030-W-20-(BJMT) . 9-5 9.4 Cooling capacity . 9-6 9.4.1 HRS030--20-(BJMT) . 9-6 9.5 Heating capacity . 9-6 9.5.1 HRS030-A-20-(BJMT) . 9-6 9.5.2 HRS030-W-20-(BJMT) . 9-6 9.6 Pump capacity. 9-7 9.6.1 HRS030--20-(BJM) . 9-7 9.6.2 HRS030--20-T . 9-7 HRS Series HRX-OM-R016 Contents 9.6.3 HRS030--20-MT . 9-8 9.7 Required facility water flow (for water-cooled type) . 9-8 9.8

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

-X252 Cable length 0.2m LC6C LC6C Cable length: 1 to 5m 2 1 4 3 6 5 8 7 10 9 12 11 14 13 16 15 18 17 20 19 1 Communication connector 2 c Cable length: 0.2m 20 View c 315 Switches Solid State Switches Applicable Actuators Series LXF, LXP, LXS D-F9 Series LJ1 (non-standard motor) D-Y7GL Cannot be mounted on Series LXF with ball screw specification.

HRX-OM-R005

capacityW 1500 e e 1500 40 32 25 20 5 40 32 25 20 5 1000 1000 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz Fig. 9-6 Heating capacity(HRS060-W-20-(BJM)) HRS Series 9.4 Cooling capacity 9-7 HRX-OM-R005 Chapter 9 Documents 9.6 Pump capacity 9.6.1 HRS060--20-(BJM) 0.7 70 0.6 60 Circulating fluid pressure[MPa]

Vacuum

Reed switch: D-90, D-97 (With lamp) Solid state auto switch: D-FgN (3-wire type, NPN, W/LED) D-FgP (3-wire type, PNP, MLED) D-FgB (2-wire type, w/LED) bing system for vacuum entry (Pad dia.: 02-o50) ) thread mounting> Cap porting The piston rod on the vacuum side is not projected externally. The vacuum entry tube does not move under operaticn of the piston.

Vacuum

Reed switch: D-90, D-97 (With lamp) Solid state auto switch: D-FgN (3-wire type, NPN, W/LED D-FgP (3-wire type, PNP, MLED) D-FgB (2-wire type, w/LED) bing system for vacuum entry (Pad dia.: 02-o50) ) thread mounting> Cap porting The piston rod on the vacuum side is not projected externally. The vacuum entry tube does not move under operaticn of the piston.

7ND9071en

Ex ta II 2 G Ex ib, II 2 D Ex tb II 3 G Ex nA, II 3 D Ex tc II 3 G Ex ic, II 3 D Ex tc cCSAus: Non incendive ATEX / IECEx: II 2 G Ex d , II 2D Ex tb IIIC cCSAus: Explosion proof TYPE ND9203HE2 REV 2.4 CLASS I, DIV 1, GPS B, C, D; CLASS II, DIV 1, GPS E, F, G; CLASS III; T4...T6, ENCLOSURE TYPE 4X; Ex d IIC T4 T6, AEx d IIC T4...T6; Ex tb IIIC T100 C IP66, AEx tb IIIC T100 C IP66 CSA 08.1980091

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock

VFN2000N

*D-02* 9.4 32 2 x 6 M.T.G.

High Power Cylinder:

D-C80 D-C73C, D-C80C Reed BMA2-020 BMA2-032 BMA2-040 BMA2-025 D-H7A1, D-H7A2, D-H7B, D-H7C D-H7NW, D-H7PW, D-H7BW D-H7LF, D-H7NF, D-H7BAL Solid state Reed Solid state D-B53, D-B54, D-B64, D-B59W D-G5NTL BA-32 BA-04 BA-01 BA-02 Reed Solid state D-A33, D-A34, D-A4 D-G39, D-K39 BD1-02M BD1-02 BD1-04M Precautions Be sure to read before handling.

LC6D/LC6C

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series LC6D Stepper Motor Driver Series LX Dedicated How to Order LC 6 D 220 A D CE marking Applicable motor Standard CE marking Nil Q 6 Stepper motor Driver power supply Function D 24VDC D Driver function only Input/Output type A Photo coupler input/

ZCUK

(498) 691 (769) ZC(D)UKQ 20 25 32 60

CC

-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com AS2000-01/02 AS600-10 Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load No load Load ratio Load ratio Bore size (mm) Bore size (mm) AS4000-02/03/04 AS3000-02/03 Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Circuit diagram No load No load Load