Magnetically Coupled Rodless Cylinder/Basic Type Series CY3B

Grease pack part no. for 6, 10: GR-F-005 (5 g) for external sliding sections GR-S-010 (10 g) for tubing interior Grease pack part no. for 15 to 63: GR-S-010 (10 g) CY3B63-PS Note 1) Seal kits are sets consisting of numbers !5 through !9. Order using the kit number corresponding to each bore size.

Magnetically Coupled Rodless Cylinder/Slider Type: Slide Bearing Series CY1S

Grease pack part no. for 6, 10: GR-F-005 (5 g) for external sliding parts, GR-S-010 (10 g) for tube interior Grease pack part no. for 15 to 40: GR-S-010 (10 g) 113

Mechanically Jointed Rodless Cylinder/Basic Type Series MY1B

Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) Note) Two kinds of dust seal bands are available. Verify the type to use, since the part number varies depending on the treatment of the hexagon socket head set screw @3. A: Black zinc chromated MY-16B-stroke, B: Nickel plated MY-16BW-stroke 93

Magnetically Coupled Rodless Cylinder/Slider Type: Ball Bushing Bearing Series CY1L

Grease pack part no. for 6, 10: GR-F-005 (5 g) for external sliding parts, GR-S-010 (10 g) for tube interior Grease pack part no. for 15 to 40: GR-S-010 (10 g) 114

IC

Analog output 4-20 mA 0-10 VDC P4 Set pressure P3 P2 P1 0 1023 Digital input data Time Static Electricity Elimination Equipment Reduced-wiring Fieldbus System Digital signal Analog signal Analog signal Actuator Electro-pneumatic regulator PLC Controller Controller Actuator Electro-pneumatic regulator PWR ERR 1bit 2 bit . . . . 10 bit 010 VDC 420 mA DC 010 VDC 420 mA DC Series ITV Series ITV

06-mu-e

8 as a set MU32T-PS MU32S-PS Bumper Urethane MU40T-PS MU40S-PS Bumper B Urethane MU50T-PS MU50S-PS MU63T-PS MU63S-PS Seal kit includes !5, !6, !7, !8 (excluding !5 for spring return type). Order them with a part number for each bore size. Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-S-010 (10 g) 87

Silencer Metal Case Type Series 25

Silencer Metal Case Type Series 25 How to Order Exhaust in only one direction Prevents scattering of mist and noise. 25 10 002 Port size Thread type Body size 002 003 004 006 010 1/4 3/8 1/2 3/4 1 R NPT Nil N 04 05 06 07 08 10 11 Specifications Max. operating pressure (1) Fluid Compressed air 1.0 MPa 19 dB (A) JIS Symbol Noise reduction Ambient and fluid temperature 5 to 60C (2) Note 1) It

10-cy1l-e

Grease pack part no. for 6, 10: GR-F-005 (5 g) for external sliding parts, GR-S-010 (10 g) for tube interior Grease pack part no. for 15 to 40: GR-S-010 (10 g) 114

10-cy1s-e

Grease pack part no. for 6, 10: GR-F-005 (5 g) for external sliding parts, GR-S-010 (10 g) for tube interior Grease pack part no. for 15 to 40: GR-S-010 (10 g) 113

10-cy3b-e

Grease pack part no. for 6, 10: GR-F-005 (5 g) for external sliding sections GR-S-010 (10 g) for tubing interior Grease pack part no. for 15 to 63: GR-S-010 (10 g) CY3B63-PS Note 1) Seal kits are sets consisting of numbers !5 through !9. Order using the kit number corresponding to each bore size.

10-my1b-e

Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) Note) Two kinds of dust seal bands are available. Verify the type to use, since the part number varies depending on the treatment of the hexagon socket head set screw @3. A: Black zinc chromated MY-16B-stroke, B: Nickel plated MY-16BW-stroke 93

Table of Contents

A B 2-P C L L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Lead wire electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P=51 (Pitch) 2 6 [2] 1 71.5 2n x 1/2, 3/4 Stations (A, B port) 24 [23] 20 70 [71.5] 2n x 1/2 28 58 114 91 105.5 176.5 209 9 D side 179 Bottom ported: VV5FR5-10Station 2Port size

Made to Order

Double clevis type Lock location Port (A) (A) (A) (A) (A) (A) (A) (B) (D) (B) (D) (B) (B) (D) (D) (B) (B) (B) (D) (D) (D) CLS (C) (C) (C) (C) (C) (C) (C) Cushion valve 1.

Fieldbus System

port side: Yellow Communication connector (DIN rail) Light/surge voltage suppressor Power connector Marker groove 0 1 (5.5) B A B A B A B A B A (35) 3 2 14 A 14 A 14 A 14 A A 14 90 128.8 115 96.7 (77.1) 5.5 0 1 5 4 PWR 2 3 FE terminal PCI BUS OUT BUS IN (8) 75.8 7 8 B 12 B 12 B 12 B 12 12 B 22.8 31 5.4 3.9 8.8 End plate (6) 36.7 (9.3) (A, B port: 12) (17.9) 4 x M5 Mounting hole Digital Input

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

B B B B TM SZ 5.4 16.5 VP4 L1 30.5 L2 S0700 38 VQ 1 2 3 4 5 6 7 8 n Stations D side U side VQ4 VQ5 VQC 123.5 SMC SMC SMC SMC SMC VQZ 88.5 B B B B B B B B SQ 47 37.5 A A A A A A A A VFS 2 11.5 9 37.5 28 42 4(A), 2(B) port 2n x Rc 1/8, 1/4 VFR EX123: 2 x G 1/2 EX124: 4 x G 1/2 Use a dripproof plug assembly (AXT100-B04A) for the unused conduit port (G 1/2).

Table of Contents

resin Wear ring B !

VFR

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

Table of Contents

Slide Bearing Felt Holder Ball bushing Spacer Aluminum alloy Replacement Parts: Seal Kit Bore size (mm) Contents Kit no. 20 25 32 40 50 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Set of nos. above @1, @2, @3, @4, #2, #3, $1, $2 Seal kit includes @1 to @4, #2, #3, $1, $2.

VFS

Tightening torque for terminal: 0.6 Nm Series VFS4000/5000 Model Terminal block marking A + A side A side A A side A side B + B VFS 100 VFS 200 VFS4 00 VFS5 00 4 5 4 5 B side B side 3 4 3 4 A side A side B side B side Applicable terminal: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M There is no polarity.