Electric Actuators

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 20 40 60 Transfer load m (kg) 600 L2 400 Mer m 200 L2 Mer 0 20 40 60 m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 18 Standard Motor/Horizontal

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Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30L IDG50L 0 m 40 1 m 39 3 m 38 5 m Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. 14-19-25 22 Series IDG Single Unit/Standard Dew Point 60C Specifications How to Order 03 B IDG 60 S Option Flow rate by size None (Standard) With

SY

plug (16.5) 56 L type plug connector (L): SY5 40(R)-L-02 M type plug connector (M): SY5 40(R)-M-02 DIN terminal (D): 3 4 5 3 4 5 3 4 5 SY5 40(R)-D-02 Applicable cable O.D. 3.5 to 7 81.7 74.2 157.8 Max. 10 62.9 Pg.7 18 18 159.6 28 58.1 9.5 22 Grommet .

CATALOG

10 15 15 M 8 x 1.25 6 M 14 x 1.5 27 1/4 84 8 50 ~ 600 20 ~ 600 32 35 70 52 20 40 10 17 17 M 8 x 1.25 7 M 18 x 1.5 30 3/8 90 0 63 ~ 600 20 ~ 600 32 35 85 64 20 40 10 17 17 M 10 x 1.25 7 M 18 x 1.5 31 3/8 98 0 80 ~ 750 20 ~ 750 37 40 102 78 25 52 14 21 21 M 12 x 1.75 11 M 22 x 1.5 37 1/2 116 0 100 ~ 750 20 ~ 750 37 40 116 92 30 52 14 21 21 M 12 x 1.75 11 M 26 x 1.5 40 1/2 126 0 Bore Size (

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Temperature conditions Water (Standard) Air (Standard) Oil (Standard) Vacuum (3) (V, M) Maximum Minimum 40 1 60 5(1) 40 5 40 40 5 5(2) Pilot port Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V, M in parentheses are option symbols.

Smooth Cylinder/Low Speed Cylinder

flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8

Battery-less

Fig. a 50 40 30 20 m Work load m [kg] m LEYG25M E LEYG16M E 10 5 4 3 2 Fig. b 1 50 40 20 30 10 5 Transfer speed [m/min] 74 LEYG Series Battery-less Absolute (Step Motor 24 VDC) SpeedWork Load Graph (Guide) For Battery-less Absolute (Step Motor 24 VDC) Horizontal Vertical LEYG16M L mE LEYG16M L mE for acceleration/deceleration: 2000 mm/s2 10 40 Lead 2.5: LEYG16M L EC 35 Horizontal work load

5 Port Solenoid Valve Series SY3000/5000/7000/9000

[101.7] (Lead wire length) With interface regulator 140.7 15 53.5 [60.5] 50 24.5 68.5 [75.5] 16.5 68 65 11 11 7.5 32.5 P, EA, EB port 1/8 20.5 24.5 41 (36.8) With plug (12.5) 41 L plug connector (L): SY3 40(R)-L-01 3 4 5 M plug connector (M): SY3 40(R)-M-01 3 4 5 M8 connector (WO): SY3 40(R)-WO-01 3 4 5 Approx. 300 (Lead wire length) 38.1 53.5 [60.5] 58 M8 x 1 40.5 (Lead wire length) Approx

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Fig. a 50 40 30 20 m Work load m [kg] m LEYG25M 10 5 4 3 2 Fig. b 1 50 40 20 30 10 5 Transfer speed [m/min] 747 LEYG Series AC Servo Motor * These graphs show the work load when the external guide is used together. When using the LEYG alone, refer to pages 746 and 747.

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Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

MGP

V = 400m/s MGPL16 to 25 MGPL16 to 25 10 10 25 25 25 25 5 5 Load weight m (kg) Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 20 20 20 16 16 16 16 1 20 50 76 75 100 200 1 20 50 76 75 100 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 30 30 20 20 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 32, 40 32, 40 32, 40 50, 63 10 10 32, 40 5 20 50 76 75 100

High Vacuum Angle Valve

M: Size 16, 25, 40 only.

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: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 20 40 60 Transfer load m (kg) 600 L2 400 Mer m 200 L2 0 20 40 60 Mer m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 18 19 Courtesy of Steven

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-P5DWL BQP1-050 40 to 100 7-6-7 8 Series CQ2 Clean Series Copper-free (For CRT manufacturing process) 20 CQ2B Bore size Stroke D(C)(M) 10 CQ2B Bore size Stroke D(M) 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 12, 16, 20, 25, 32, 40, 50, 63 Copper-free Clean Series 10-Relief type 11-Vacuum type The type which is applicable for using inside the clean room graded Class 100 by making an actuators

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A VMG M-5ALN-4 M-5ALN-6 M-5ALU-3 M-5ALU-4 M-5ALU-6 1.4 2.4 1.1 1.4 2.4 1.8 2.5 1.6 1.8 2.5 5 7 4.5 5 7 9 11 8.5 9.3 11.3 13 15 12.5 13.3 15.3 4.0 4.4 4.0 4.1 4.5 M5 x 0.8 M-5ALN-6 M-5ALU-6 M5 x 0.8 Barb Elbow for Nylon Tubing: M-5ALHN-4/-6 Barb Elbow for Soft Tubing: M-5ALHU-3/-4/-6 Effective area (mm2) Weight (g) Width across flats 7 M-5ALHN-4 M-5ALHU-3/-4 Model A B C D M-5ALHN-4 M-5ALHN

V100

plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

Auto Switch Guide

(The switch will stay ON all the time.) 1) For an auto switch without a connect protection circuit, use a contact protection box when the wire length is 5 m or longer. 2) Even if an auto switch has a built-in contact protection circuit, when the wiring is more than 30 m long, it is not able to adequately absorb the rush current and its life may be reduced.

ZP

Max. 0.35 inch shortened (9 m m) 0.43 inch shortened (1 1 m m) Pad unit With adapter Actual size Actual size 19.5 mm 12 mm 3 mm 8.5 mm ZP3 New New ZP3 New ZP(Conventional model) ZP(Conventional model) New Space-saving 2 piping reduces working space!

CRB2/CRBU2/CRB1

(An additionally machined port will have an aluminum surface since it will be left unfinished.) 2-d Body (B) (mm) (mm) Size d Size Q M N 10 3.4 10 M3 8.5 9.5 15 3.4 15 M3 11 10 Body (A) 20 4.5 20 M5 14 13 Q N A port B port (Standard) (Altered) A port 30 30 B port 5.5 M5 15.5 14 40 40 M5 21 20 5.5 M 63 Series CRBU2 Symbol: C3 Symbol: C4 Change the position of the screws for tightening the

Hydraulic

x 100l x 115l 115 50 (M) 100 50 (M) M5 x 55l x 140l 140 75 (M) 55 CHKDB25 5 (M) x 60l x 165l 165 100 (M) 60 10 (M) x 65l M12 x 75l 75 CHKDB63 5 (M) 65 15 (M) x 70l x 80l 80 10 (M) 70 20 (M) x 75l x 85l 85 15 (M) 75 25 (M) 10.4 x 80l x 90l 90 20 (M) 80 30 (M) x 85l x 95l 95 25 (M) 85 35 (M) x 90l x 100l 100 30 (M) 90 40 (M) 16 x 95l x 105l 105 35 (M) 95 45 (M) x 100l x 110l 110 40 (M) 100