SX

(g) n: Stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note) For more than 10 stations, supply pressure to P port on both sides and exhaust from EA and EB port on both sides.

CG5-S

(G) T0403 Color symbol -20 T1075 Color symbol -100 Black (B) Black (B) Clear (C) Clear (C) 10 7.5 3 White (W) White (W) Orange (YR) Orange (YR) T1209 Color symbol -100 Black (B) Black (B) Black (B) Black (B) 12 9 White (W) White (W) White (W) White (W) T1613 Color symbol -100 Red (R) T0604 Black (B) Red (R) Red (R) 16 13 4 TU0604 TU0604 Blue (BU) Color symbol -20 White (W) Blue (BU) Blue

Rotary Table/

3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !

Speed Controller with Indicator

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

Hygienic Design Cylinder Series HY

W 50mm W CJ5 CG5 HY C M D-X Individual -X Technical data 869 Series HYC Construction r !3 !6 y u q !5 !8 i e !7 !4 t !9 !0 !2 w !1 o @0 @1 Built-in magnet @2 @5 @3 @4 Component Parts No. Description Material Qty. Note No. Description Material Qty.

Modular/F.R.L. Units Series AC

53 70 Q 46 54 L 41 50 J 239(max.242) 276(max.280) K 59 75 U 40 54 V 53 70 A NPT 3/8 NPT 1/2 W 2.3 2.3 X M38 X 1.5 M42 X 1.5 DD 34.5 41 CC 38.5 42.5 E 30 38 F 83(max.86) 88(max.92) T 8 10.5 Y 31 35.5 Z 7 7 AA 19 21 H 3.5 1.5 S 6.5 8.5 AW30 AW40 6 Series AW20~40 Filter Regulator Standard (Manual Drain) PANEL FITTING IN OUT Z CC Bowl Detail EE (AW20) AA K L V U X W T J S Y Q F Bracket and Mounting

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Y + Stroke X Bearing type Mounting style Bore size Stroke 20-MGG Y X Bore size (mm) Q 86(94) 32 39 25 Copper-free 96(105) 40 46 29 Specifications 109(121) 50 57 31 20, 25, 32, 40, 50, 63, 80, 100 Bore size (mm) 112(124) 63 56 34 Action Double acting 137(151) 80 68 46 Fluid Air 138(152) 100 68 47 Maximum operating pressure 1.0 MPa ( ): Denotes the dimensions for long stroke.

IZx-OMT0049

Angle K 5 Z 10 M 10 P 0.5 DIN rail bracket Q 1 2 3 5 Symbol Type R Angle Nil None S T W Include Z 10 1-2-2.

Series SV

Tie-rod base SS5V W 1 A1W D 05 U 10S Cassette base SS5V W D 05 16S 1 A1W U DIN rail length Enclosure IP67 specification 1 2 SV1000 SV2000 Series Standard length Nil 3 Specify a rail longer than the standard length.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Thread size M4 x 0.7 8 2 46 Effective thread length (mm) Quantity P.C.D.

CJ5-S

3 w With air cushion !2 !1 i r !3 y o q u e !0 w Component Parts No. q w e r t y u Description Material Description Material No. CG5SR CG5SV Rod cover Stainless steel 304 Water resistant scraper Head cover Stainless steel 304 i Rod seal Cylinder tube Stainless steel 304 o NBR FKM Piston seal Piston rod Stainless steel 304 !0 Valve seal Bumper Urethane !

CJ5-S

3 w With air cushion Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !2 !1 i r !3 y o q u e !0 w Component Parts No. q w e r t y u Description Material Description Material No.

DOC1003626

Checksum ASCII:LRC RTU:CRC 7,9 0xC2,0xC1 Trailer CR/LF None Total quantity of byte 11 5 HRS400-A-46 3.12 Negative response 3-17 DOC1003626 Chapter 3 Serial communication 3.13 Register map Address Contents Value R/W Hexadecimal number : F334h, FD44h to 08FCh Decimal number :-3276, -700 to 2300(0.1C) 0h Circulating fluid discharge temperature Hexadecimal number : 8000h, 0h to 06F3h Decimal

ZP

Construction Series ZPT Series ZPR Series ZPY r Buffer r Buffer y Adaptor e Adaptor e Adaptor r Buffer t Adaptor w Lock ring w Lock ring w Lock ring q Pad q Pad q Pad q Pad With buffer With buffer With buffer Component Parts Material Note No.

LX

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

LX

LJ1 LG1 LC1 LX LC6D/LC6C Switches 76 46 38 2-M2.5 x 0.45 thread depth 4 5H9 +0.030 0 10 3 depth5 J 27 J x K 25 8 Motor unit Refer to "Applicable Motor List" below for dimensions. (This drawing shows a Tamagawa Seiki, Co., Ltd. motor.)

ZP

Calculation ZX ZR : Lifting force (N) : Stable vacuum pressure (kPa) : Pad area (cm2) : Factor of safety: Horizontal pad contact : 4 (dynamic) Vertical pad contact : 8 (dynamic) W P S t Pad ZM W = P x S x 0.1 x 1 t W ZH W ZU Horizontal lifting Vertical lifting Basically ( avoid this use. ) ZL Theoretical Lifting Force ZY The theoretical lifting force (not including the safety factor) is

MB1

1 Parts list No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

Cylinder with Lock Series MNB

C Rc(PT)P Rear cylinder port Width across flats Rc(PT)P Front cylinder port Width across flats B1 MM W GR GR E D C GL1 GL W T 16 Effective thread length MB 4-J 16 GF 4-J V Q VA H1 N K F GE BN A H S + Stroke ZZ + Stroke With rod boot e 9 l 13 h f ZZ + Stroke (mm) Effective thread length (mm) Width across flats Stroke range (mm) Bore size (mm) D F B A B1 H1 BP GL B2 BN GC GL1 C GA GB GD Ee11