Cooling Capacity: 050 [Cooling Capacity: 4500/5000 W (50/60 Hz)], Pipe Thread: NPT with PT-NPT Conversion Fitting Set, Option: L + V

Cooling Capacity: 050 [Cooling Capacity: 4500/5000 W (50/60 Hz)], Pipe Thread: NPT with PT-NPT Conversion Fitting Set, Option: B + V

Cooling Capacity: 050 [Cooling Capacity: 4500/5000 W (50/60 Hz)], Pipe Thread: N (NPT with PT-NPT Conversion Fitting Set), Option: BL (B + L)

A large digital display provides a clear view of the current and set values. 

A large digital display provides a clear view of the current and set values. 

A large digital display provides a clear view of the current and set values. 

Cooling Capacity: 050 [Cooling Capacity: 4500/5000 W (50/60 Hz)], Pipe Thread: N (NPT with PT-NPT Conversion Fitting Set), Option: V (Stainless Steel Panel Specification)

Cooling Capacity: 050 [Cooling Capacity: 4500/5000 W (50/60 Hz)], Pipe Thread: N (NPT with PT-NPT Conversion Fitting Set), Option: BLV (B + L + V)

53

Circulating fluid temperature [C] 21 Circulating fluid return port When a load is stable 0.1C 20 Solenoid valve for control 19 Circulating fluid outlet 9.5 kW load Heat load fluctuation (0 kW 9.5 kW) DI filter 0 kW load 0 10 20 30 40 50 Time [Minute] Circulating fluid can be heated without a heater.

Proposals for Energy Saving

It cannot be mounted at a later time or used as a separate unit.

CNG

25 32 40 Stroke range with rod boot Standard Long stroke Bore size (mm) A AL B1 BC BN BP BZ C D GA GB GC GK GL GR GQ H1 I J 26 18 15.5 13 38 93 1/8 50.5 14 8 85 10 (12) 18 5.5 6 4 8 5 M4 x 0.7 Up to 200 201 to 350 20 to 200 201 to 350 31 22 19.5 17 45 103 1/8 57 16.5 10 96 10 (12) 25 6.5 9 7 10 6 M5 x 0.8 Up to 300 301 to 400 20 to 300 301 to 400 38 22 19.5 17 45 104 1/8 57 20 12 97 10 (

High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Modular F.R.L. Unit

Spacer with Bracket (Z) G Center of F.R.L. body C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X G Seal Y200T Y400T J F A H K Spacer width D Applicable model F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM NA P S TA TB ZZ 5 6 6 8 11 11 13 16 M4 x 0.7 depth 7 5 M8 x 1.25 24 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 114 119 121 139 162 162 196 196 12 12 12 13 14 14 20 20 35 40 40 50 58 58 71 71 77 77 79 87 102 102 122 122 26 31 38 47 58 72 89 110 11 11 11 12 13 13 12 12 12 13 14 14 20 20 11 11 11 12 13 13

MB

25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 50 12.5 CS1 64 16.5 80 23.5 C76 80 23.5 119 28.5 Note) For a double clevis, a pin (cotter pin) and a flat washer are equipped as standard.

Cylinder

J. IS'" IN 1 5" lOst ~ 15s1 ' A ... B C E F 15 12 ' 27 31 7 16.5 22.5 29 19 14 4.2 M5 x O.8 i M22 x 1.5 I 20 23.5 29.5 36 5 , 37.5 43.5 50 ' 6 'a~e size ' .rom) .

LVQ

(mm) LVQ0-S Dimensions (N.C. valve) A B C D E F G H J K L M N P Q R Model LVQ20-S LVQ30-S LVQ40-S LVQ50-S LVQ60-S 25.5 46 31.5 58 33.6 56.5 12 77 21.8 37 5 7 15 31.3 21 25.3 23.5 47 29.5 59 45.4 77 16.5 95 32 50 6 7 20 37.2 25 31.2 23.5 47 29.5 59 45.4 82.5 22 109 37.5 55.5 6 7 20 37.2 25 31.2 35 70 41 82 75 127 25 141 50.2 78.2 10 7 20 50.8 38.5 45 35 70 41 82 75 137 32 150 60 88 10 7 20

C95Series

IIIB OA DB IOL lou DC OX iDE .1 00 DS OH Z ODHIl ": ~ 46 , 31 1 21 18 5 3a , 2' 1 51 l a.5 6.6 If 7 32 1184 lO ' ;~ 52 35 ,24 I 22 15.5 41 21 i 54 16.5 6.6 11 9 ' 36 l a, J:!'

Lightweight and Compact

Contents Applicable model HRS-EP020 NPT thread conversion fitting set HRS090-A-20/40-J HRS-EP021 G thread conversion fitting set Part no.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Stroke: S MXP10-10 Width across flats 1.5 Width across flats 5 A Piping port H 13 2-M5 x 0.8 (Plug: M-5P) 7 16.7 6.5 M3 x 0.5 3.7 21 20 8.5 19 0.5 A 4-M4 x 0.7 4-M3 x 0.5 depth 4 15 20 0.05 Prepared hole dia. 3.3 W 27 0.5 0.05 Piping port D B 2-M5 x 0.8 28 10 J 6 Mounting reference planes B D 10 9.5 Section AA MXP10-20 Without magnet and switch rail 8 2-M3 x 0.5 depth 3.5 For rail mounting