Vacuum Unit

How to Order w q e r t y ZK2 A C K 5 K W 12 08 u i q Body/Exhaust type e Combination of supply valve and release valve w Nominal nozzle size Symbol Nominal nozzle size 07 0.7 10 1.0 12 1.2 15 1.5 Symbol Body Exhaust type Symbol Supply valve Release valve N.C. N.C.

Slider Type Ball Screw Drive/11-LEFS Series

LEFS16/Ball Screw Drive Horizontal Vertical 16 6 14 Lead B Lead B 12 Work load: W [kg] Work load: W [kg] 4 10 Lead A 8 Lead A 6 2 4 2 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 700 800 Speed: V [mm/s] Speed: V [mm/s] LEFS25/Ball Screw Drive Horizontal Vertical 20 30 Lead B 25 15 Work load: W [kg] Work load: W [kg] Lead B 20 10 15 Lead A Lead A 10 5 Lead H Lead H 5 0 0 0 100 200

CA2

A B A B A B A B A B A B Hs Hs Hs Hs Ht Hs Ht Hs Hw Hs Hw 3.5 1.5 6.5 4.5 0 0 0.5 0 2 0 4 2 11.5 9.5 40 37 38.5 69 81 69 71.5 31.5 81.5 38 31.5 73 3.5 1.5 6.5 4.5 0 0 0.5 0 2 0 4 2 11.5 9.5 50 42 42 77 86.5 77 76.5 35.5 86.5 42 35.5 78.5 6 5 9 2.5 1.5 3 2 8 4.5 3.5 6.5 5.5 14 13 63 49 46.5 91 93.5 91 83.5 43 93.5 47 43 85.5 9.5 7.5 4.5 12.5 6 4 6.5 4.5 8 6 10 8 17.5 15.5 80 107 57.5 53.5 107

Free Mount Cylinder

Single Acting, Spring Return D-M9, D-F9W D-M9V, D-F9WV D-A9, D-A9V Bore size (mm) Stroke A B W A B W A B W 6 4.5 6.5 4 4 2.5(5) 0 17.5 17.5 All stroke 13.5 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 5, 10 15 5, 10 15 5, 10 15 5, 10 15 5, 10 15 12.5 17.5 16 21 20 25 22.5 27.5 23.5 28.5 10 0.5 2.5 7.5 7.5 1.5(1) 3.5 16 0.5 2 8 8 2(0.5) 4 2 20 0 10 10

SYJ300/500/700

S and Z types 24VDC: 7% to +10% 12VDC: 4% to +10% T type 24VDC: 8% to +10% 12VDC: 6% to +10% 659 10-SYJ300 3 port / Pilot operated solenoid valve Flow characteristics / Weight C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv 12(PA) 23(AR) Valve model Flow characteristics Weight (g) Note) Type of actuation Port size Effective area (mm 2) L/M plug connector M8 connector Grommet 10-SYJ312 10-SYJ322 10

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

100 6-5-52 53 Series CG1Q Air Cylinder: Low Friction Type Double Acting, Single Rod With Mounting Bracket Without rod boot ZZ Axial Foot Style Axial foot style: CG1LQ Without rod boot Z Bore (mm) B LC LD LH LS LT LX LZ M W X Y 20 25 32 40 50 63 80 100 34 4 4 4 4 5 5 6 6 6 6 7 7 10 12 11 14 20 53 53 53 60 67 67 74 74 3 10 10 10 10 17.5 17.5 20 20 15 7 3 3 3 3 4.5 4.5 4.5 6 32 44 47 52 53

PFxx-OMX0002

R/W AoUt (Setting of analogue output) U8 0 Y 0: 1 to 5 V 10 to 10 V Setting of analogue output (Voltage output type only) 1 R/W FrEE (Setting of free range mode) U8 0 Y 0: oFF (Unused) 1: on (Used) Setting of free range mode 2110 0x083E Setting range 0x0190 to 0x1068 (400 to 4200) 2 R/W F_H (Set value of free range) S16 4000 Y Set value of free range Rated value 10% to 105% SAVE (Accumulated

Modular F.R.L. Units

Optional/Semi-standard specifications N.C.: Gray N.O.: Black B B B B B Dimensions Barb fitting Applicable tubing: T0604 Width across flats 17 1/4 Width across flats 14 1/8 M5 x 0.8 Thread type/Rc, G: 10 One-touch fitting Thread type/NPT: 3/8" One-touch fitting Model Standard specifications Bracket mount P1 P2 A B C E F G J M N Q1 Q2 R S U V AC20-A AC25-A AC30-A AC40-A AC40-06-A 30 30 38.4

Series SV

Characteristics Port size Flow characteristics Model 14, 2(PA, B) 4, 25, 3(A, BEA, EB) 4, 2 (A, B) 1, 5, 3 (P, EA, EB) C[dm3/(sbar)] Cv Cv b b C[dm3/(sbar)] C6 SS5V1-10 C8 0.96 0.24 0.28 0.26 0.35 1.1 C8 SS5V2-10 C10 2.1 0.46 0.48 0.20 0.18 2.4 C10 SS5V3-10 C12 4.2 0.91 0.93 0.22 0.21 4.3 C12 SS5V4-10 C12 6.2 1.3 1.6 0.19 0.18 7.0 Note) Value is for manifold base with 5 stations and individually

CQS

D-A9l D-A9lV D-F9N/D-F9B D-F9P/D-F9lW D-F9lV/D-F9lWV Symbol A B W A B W A B W A B HS Double acting: single rod, Single acting: single rod/spring return, spring extend 4.5 (3.5) 5.5 (6.5) 1.5 (2.5) 1.5[4] (2.5[5]) 2[4.5] 1.5[1] 3.5[-1] 1.5 (2.5) 12 19 5.5 4.5 5.5 17 0 0 Bore size (mm) 16 20 25 21 24.5 26.5 4 7.5 9.5 6 10 11 6 2.5 0.5 4 7.5 9.5 6 10 11 19 22.5 24.5 0 3.5 5.5 2 6 7 0 3.5 5.5

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

D-K39 D-A3m D-A44 D-M9m(V) D-M9mW(V) D-M9mA(V) D-A9m(V) D-F5NTL D-A5m D-A6m D-A59W D-P4DW Bore size A B A B A B A B A B A B A B A B A B 32 14 10.5 10 6.5 10.5 7 15.5 12 4 0 8 4.5 7.5 4 4 0 7 3.5 40 14 14 10 10 10.5 10.5 15.5 15.5 4 4 8 8 7.5 7.5 4 4 7 7 50 15.5 14.5 11.5 10.5 12 11 17 16 5.5 4.5 9.5 8.5 9 8 5.5 4.5 8.5 7.5 63 16.5 15.5 12.5 11.5 13 12 18 17 6.5 5.5 10.5 9.5 10 9 6.5 5.5

MB

D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A A B A B A A A A B B B B B 32 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 CJ1 40 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 50 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 CJP 63 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 80 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 CJ2 100 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 125 17.5 12.5 10 6 6

Digital Flow Switch (Integrated display type) ( compatible)

hysteresis) Setting range 0x0 to 0x0258 (0 to 600) Setting of OUT2 hysteresis (Temp. window comparator) 1049 0x0419 0 R/W U16 100 Y 0: Add (Addition) 1: dEC1 AC (Setting of the accumulated flow output direction) Setting of the accumulated flow output direction 1070 0x042E 0 R/W U8 0 Y (Subtraction OUT1) 2: dEC2 (Subtraction OUT2) 0: 10^-2 1: 10^-1 2: 10^0 3: 10^1 4: 10^2 5: 10^3 6: 10^4

Vacuum System Peripherals:

Manifold base ZZM Stations Exhaust port location R L B 01 1 Exhaust port size Right side Left side Both sides ... ... 04 06 Rc Rc 1 2 3 4 10 10 S With dedicated silencer w How to Order Ejector Fill in the blanks below with symbols of necessary specifications. w-1 Common specifications Common Specifications (Symbol , , , , ) Individual specifications Without light/surge voltage suppressor

Tie-rod Type Hydraulic Cylinder

CHN W W FY B D E d CHM CHS MA M a NB C CH2 F A K NA B S + Stroke FT H FX CHA CHA ZZ + Stroke FZ Related Products DWith rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a B C E D d F FD FT FX FY FZ G GA GB J K M MA MM NA NB P R 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 23 10 60 44 18 25 9 10 77 44 95

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

D C B A 61 Standard Motor Horizontal Mount Motor Output Ground Ball Screw 100 W 10 mm/10 mm lead Series LTF6 How to Order 300 LTF6 R R 2 A1 PH S2 Photo micro switch Nil Without switch/mounting rail 1 2 3 4 5 6 NPN 1pc. NPN 2pcs. NPN 3pcs. IO connector Stroke (mm) Refer to the standard stroke. Motor type S2 S6 Nil None AC servo motor (Incremental encoder) 100 W PNP 1pc.

Compressed Air Cleaning Filter Series

JIS B2401G35 3 pcs. 56 Series AMF Dimensions AMF150C to 350C P Q T S R F E D N Bracket L U (Accessory) O K G M V W J B OUT IN C I A Maintenance space (mm) A Model Port size Bracket related dimensions B C D E F G I 98.5 N 56 J 20 K 5 U 6 V 6 L 12 M 6 W 10 O 35 P 70 Q 26 R 54 S 4.5 T 1.6 AMF150C AMF250C AMF350C 10 54 63 7.5 63 10 1/8, 1/4 83 14 73 76 5 76 10 121 66 24 8 6 6 12 6 10 40 80 28

10

A B A B A B A B A B A B A B A B A B 32 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 5.5 3.5 3.5 1 40 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 6 3.5 3.5 1 50 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 63 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 80 14 12.5 10 8.5 10.5 9 15.5 14 4 2.5 8 6.5 4 2.5 7.5 6 9.5 8 7 5.5 100 14 12.5 10 8.5 10.5 9 15.5

New

suppressor 5/32 4 N 100 VAC 10 one-touch fitting M 9/32 7 P 110 VAC A B C D E F 13/64 5 Q 200 VAC 1/4 5/16 8 R 230 VAC 25/64 10 S Conduit 24 VDC Aluminum 13/64 5 With surge voltage suppressor 3/8 5/16 8 VX2 T 100 VAC 25/64 10 Single U 110 VAC 3 Size 3 G H Unit 1/2 25/64 10 V 200 VAC N.C. 13/64 5 W 230 VAC J 10 one-touch fitting 5/16 8 K L 25/64 10 Faston terminal Resin 13/64 5 M N Y 12 one-touch

Auto Switch Guide

(Red Green Red) D-B59W D-A79W D-A59W D-H7NW/H7PW/H7BW D-G59W/G5PW/K59W D-F79W/F7PW/J79W D-F7NWV/F7BWV D-F59W/F5PW/J59W D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV D-Y7NW/Y7PW/Y7BW Band Grommet 10-20-23 Solid state switch Reed switch Rail Grommet 10-20-24 Tie-rod Grommet 10-20-25 2-color indication 10-20-42 Band Grommet RE A B 10-20-43 10-20-44 Rail Grommet REC 10-20-45 Tie-rod Grommet 10-20-46