CATALOG

10 15 15 M 8 x 1.25 6 M 14 x 1.5 27 1/4 84 8 50 ~ 600 20 ~ 600 32 35 70 52 20 40 10 17 17 M 8 x 1.25 7 M 18 x 1.5 30 3/8 90 0 63 ~ 600 20 ~ 600 32 35 85 64 20 40 10 17 17 M 10 x 1.25 7 M 18 x 1.5 31 3/8 98 0 80 ~ 750 20 ~ 750 37 40 102 78 25 52 14 21 21 M 12 x 1.75 11 M 22 x 1.5 37 1/2 116 0 100 ~ 750 20 ~ 750 37 40 116 92 30 52 14 21 21 M 12 x 1.75 11 M 26 x 1.5 40 1/2 126 0 Bore Size (

Smooth Cylinder/Low Speed Cylinder

+ 15 (n-2) (n = 4, 6) Note 5) D-A79W 15 10 D-F7 D-J79 15 + 15 (n-2) (n = 4, 6) Note 5) 5 5 D-F7V D-J79C D-F7W/J79W D-F79F D-F7NT 10 + 10 (n-2) (n = 4, 6) Note 5) 5 5 15 + 20 (n-2) (n = 4, 6) Note 5) 15 10 10 + 15 (n-2) (n = 4, 6) Note 5) D-F7WV 15 10 Note 4) When n is an odd number, an even number that is one larger than this odd number is used for the calculation.

Battery-less

Mer m 200 200 200 200 0 0 0 0 0 2 4 6 8 10 12 14 0 10 20 30 40 50 0 10 20 30 40 50 60 0 5 10 15 20 25 30 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mep 1500 1500 1500 1500 L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 1000 1000 1000 1000 L3 Z 500 500 500 500 0 0 0 0 0 5 10 15 20 25 30 0 2 4 6 8 10 12 14 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load

5 Port Solenoid Valve Series SV1000/2000/3000/4000

L dimension L dimension 1.5 m AXT100-DS25-015 AXT100-MC26-015 1.5 m 3 m AXT100-DS25-030 AXT100-MC26-030 3 m 5 m AXT100-DS25-050 AXT100-MC26-050 5 m When a commercially available connector is required, use a 25 pin female connector conforming to MIL-C24308. L L (60) 44 8 16 14 25 1 13 47.04 50 Approx. 10 Multi-core vinyl cable 0.3 mm2 x 25C Terminal no. Socket side Plug terminal no.

Base Mounted Metal Seal/Rubber Seal Series VQ

With cable (3 m) With cable (5 m) Without cable With cable (1.5 m) With cable (3 m) With cable (5 m) Kit Kit Kit Kit (2) Max. 16 stations (2) Max. 16 stations P P F F T kit (Terminal block) C kit (Connector) S kit (Serial transmission unit) The valve is equipped with an indicator light and surge voltage suppressor, and the voltage is 24 VDC.

Table of Contents

m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 268 150 150 100 100 50 50 10 10 1 1 10 10 15.1 15.1 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 40 40 3.8 3.8 2.6 2.6 1.3 1.3 0.3 0.3 0.1 0.1 80 80 2.0 1.9 1.3 1.3 0.7 0.7 0.2 0.2 0.1 0.1 100 150 50 10 1 10 10.1 15.1 5.1 1.1 0.2

Free Mount Cylinder Series CU

-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit: Class 1 to 100.000 SI unit:

Fieldbus system EtherNet/IP compatible SI Unit

The power supply short circuit detection for the input device Enable Generates an error. Unit 1 Disable Does not generate an error. -10..10 V -5..5 V -10..10 V Selects the analogue input range.

NCG/CG1

Style Without rod boot Z Bore (mm) B LC LD LH LS LT LX LZ M W X Y 20 25 32 40 50 63 80 100 20 53 53 53 60 67 67 74 74 7 34 4 4 4 4 5 5 6 6 6 6 7 7 10 12 11 14 3 10 10 10 10 17.5 17.5 20 20 15 3 3 3 3 4.5 4.5 4.5 6 32 44 47 52 53 63.5 75.5 75.5 95 95 118 123.5 125.5 144 169.5 169.5 202.5 206 22 7 38.5 3.5 15 36 49 25 8 45 3.5 16 44 58 2-TD8 (Pin O.D.)

High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

pulses) 10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] -10[V] -10[V] CW direction CW direction CCW direction CCW direction A Feedback position (Note 1,2) ( 10V/1 Mpulses) B Feedback position (Note 1,2) ( 10V/10 Mpulses) 10[V] 10[V] 1M[pulse] 10M[pulse] 0 0 1M[pulse] 10M[pulse] -10[V] -10[V] CW direction CW direction CCW direction C Feedback position (Note 1,2) ( 10V/100 Mpulses)

MGP

75mm stroke V = 200mm/s 20 20 25 10 10 25 Load weight m (kg) Load weight m (kg) 20 20 5 5 16 16 1 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL32 to 63 7 25mm stroke V = 200mm/s 8 Over 25mm stroke V = 200mm/s 100 100 63 63 50 50 50 50 Load weight m (kg) Load weight m (kg) 40 40 32 32 10 10 5 10 50 100 200 5 10 50 100 200 Eccentric distance l (mm)

Proposals for Energy Saving

m x 10).]

Parallel Style Air Gripper Series MHZ

Axial Ported (with M5 Port) [M] (mm) Auto switch mounting groove (4 locations) (Except 10) Model A D2 B E F G H D1 M5 x 0.8 Piping port S C S C S C S C MHZ2-10 M 0.016 0.043 12f8 15 11 7 52.8 18 28.3 5.5 Plug 10 : M-3P 16 to 25: M-5P End boss assembly MHZ2-16 M 0.016 0.043 16f8 20 10 15 58.7 16.2 27.7 6.5 H G Note 1) MHZ2-20 M 0.020 0.053 20f8 22 12 19 70.5 18.2 31.2 7.5 D2 MHZ MHZ2-25 M

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Series CY1L Size: 6, 10, 15, 20, 25, 32, 40 To ensure a permanent path Stable operation is possible, even with an eccentric load, by using ball bushings. When smoother operation is required, even with an eccentric load. Series CY1H Size: 10, 15, 20, 25, 32 The use of a linear guide facilitates a large load, large moment and high precision.

CRB2/CRBU2/CRB1

(An additionally machined port will have an aluminum surface since it will be left unfinished.) 2-d Body (B) (mm) (mm) Size d Size Q M N 10 3.4 10 M3 8.5 9.5 15 3.4 15 M3 11 10 Body (A) 20 4.5 20 M5 14 13 Q N A port B port (Standard) (Altered) A port 30 30 B port 5.5 M5 15.5 14 40 40 M5 21 20 5.5 M 63 Series CRBU2 Symbol: C3 Symbol: C4 Change the position of the screws for tightening the

Auto Switch Guide

(The switch will stay ON all the time.) 1) For an auto switch without a connect protection circuit, use a contact protection box when the wire length is 5 m or longer. 2) Even if an auto switch has a built-in contact protection circuit, when the wiring is more than 30 m long, it is not able to adequately absorb the rush current and its life may be reduced.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-P5DWL BQP1-050 40 to 100 7-6-7 8 Series CQ2 Clean Series Copper-free (For CRT manufacturing process) 20 CQ2B Bore size Stroke D(C)(M) 10 CQ2B Bore size Stroke D(M) 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 12, 16, 20, 25, 32, 40, 50, 63 Copper-free Clean Series 10-Relief type 11-Vacuum type The type which is applicable for using inside the clean room graded Class 100 by making an actuators

Fieldbus system EtherCAT compatible SI Unit

Insulation resistance 500 VDC, 10 M min. between external terminals and F.E.

1.1

l/min, total lifting height 8/9 m) 8/10 0.2/0.26 (at 24/32 l/min, total lifting height 14/15 m) 24/32 20 0.14/0.19 (at 10/10 l/min, total lifting height 11/16 m) 10/10 10 Rc 1/2 Stainless steel, Brass, PE, PVC, PPE, Copper brazing (Heat exchanger) Stainless steel, PE, PVC, Brass, Copper brazing (Heat exchanger) Wetted parts material 5 to 32 0.2 to 0.5 27/28 Rc 1/2 5 to 32 0.2 to 0.5 12/15