Material: Body: Stainless Steel 304; Gasket/O-ring: NBR, Element Length: ℓ250, Port Size R: 2, Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 50 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G2 [G46-10-02X3 (Stainless Steel at Wetted Parts)]

Material: Body: Stainless Steel 304; Gasket/O-ring: NBR, Element Length: ℓ250, Port Size R: 2, Element Type: Paper, Cotton Material, Nominal Filtration Accuracy: 5 μm, Element Seal Material: NBR, Pressure Gauge: G1 [G46-10-02M (Brass at Wetted Parts)]

Material: Body: Stainless Steel 304; Gasket/O-ring: NBR, Element Length: ℓ250, Port Size R: 2, Element Type: Sintered Metal, Bronze Material, Nominal Filtration Accuracy: 120 μm, Element Seal Material: NBR, Pressure Gauge: G1 [G46-10-02M (Brass at Wetted Parts)]

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 2 (0.2MPa), Connection Thread: 02 (R 1/4), Attachment: None, Option: X2 (Nickel Plated)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 2 (0.2MPa), Connection Thread: 02 (R 1/4)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 2 (0.2MPa), Connection Thread: 01M (R 1/8, M5 Female), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 2 (0.2MPa), Connection Thread: 02 (R 1/4), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 2 (0.2MPa), Connection Thread: 02M (R 1/4, M5 Female)

Material: Body: Stainless Steel 304; O-ring: FKM, Element Length: B [ℓ500 (ℓ250 x 2)], Element Type: Micromesh, Stainless Steel 316/Nickel Brazing Material, Nominal Filtration Accuracy: 20 μm, Element Seal Material: Fluororesin, Option: G46-10-02X3, Stainless Steel at Wetted Parts

Material: Body: Stainless Steel 304; O-ring: FKM, Element Length: B [ℓ500 (ℓ250 x 2)], Element Type: Micromesh, Stainless Steel 316/Nickel Brazing Material, Nominal Filtration Accuracy: 40 μm, Element Seal Material: Fluororesin, Option: G46-10-02X3, Stainless Steel at Wetted Parts

Material: Body: Stainless Steel 304; O-ring: NBR, Element Length: B [ℓ500 (ℓ250 x 2)], Element Type: Micromesh, Stainless Steel 316/Nickel Brazing Material, Nominal Filtration Accuracy: 20 μm, Element Seal Material: Fluororesin, Option: G46-10-02X3, Stainless Steel at Wetted Parts

Material: Body: Stainless Steel 304; O-ring: NBR, Element Length: B [ℓ500 (ℓ250 x 2)], Element Type: Micromesh, Stainless Steel 316/Nickel Brazing Material, Nominal Filtration Accuracy: 40 μm, Element Seal Material: Fluororesin, Option: G46-10-02X3, Stainless Steel at Wetted Parts

VFR

(4) Weight (kg) 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Port size Type of actuation C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv (B) (A) 4 2 (B) (A) 4 2 Plug-in Non plug-in 2 position 3 position 4.73 (4.56) VFR611 VFR610 40 0.12 9.1 41 0.15 9.6 2 Single 3 4 100 or less (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 2 100 or less 4.78 (4.61) 40 0.14 9.2 41 0.17 9.7 VFR621 VFR620 3 4 Double Double Exhaust

CG5-S

(mm) Connection threads Model KGY04-M5 -01 -02 KGY06-M5 -01 -02 -03 KGY08-01 -02 -03 KGY10-01 -02 -03 -04 KGY12-02 -03 -04 KGY16-03 -04 M5 x 0.8 4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 KGV04-M5 M5 x 0.8 4 -01 R 1/8 M5 x 0.8 KGV06-M5 M5 x 0.8 6 6 -01 R 1/8 -02 R 1/4 KGV08-01 R 1/8 8 8 -02 R 1/4 -03 R 3/8 KGV10

SYJ3000/5000/7000

] 21 1.6 P R2 R1 18 1.6 (PE port) 1/8 (P, R1, R2 port) 27.2 L plug connector (L): SYJ7220-L-01 M plug connector (M): SYJ7220-M-01 DIN terminal (D): SYJ7220-D-01 M8 connector (WO): SYJ7220-WO-01 Approx. 300 (Lead wire length) 65 31.5 [38.5] Max. 10 57.5 16.1 46.2 31.1 M8 x 1 36 18.5 Approx. 300 (Lead wire length) 42.6 [49.6] 2-3.2 (For mounting) 2-3.2 127.2 [131.6] 2-3.2 2-3.2 (For mounting

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Note 2) ( ): denotes without sub-plate. 10-SY5000 Flow rate characteristics Note 1) Weight (g) Note 2) Valve model Actuation type 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Port size L plug connector, W M8 connector C (dm3/(sbar)) Cv b b C (dm3/(sbar)) Cv Grommet DIN terminal M plug connector 121 (58) 139 (76) 123 (61) 144 (81) 154 (92) 186 (123) 127 (65) 152 (89) Single Double 2 position 2.4

VM

01 VM1000-4N-01 Side ported 3 port 2 port T.T.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

C A A B B D D Dimensions Dimensions (mm) (mm) A B C D E F G H I J Y A B C D E F G H I J Y Model Model ZPX40HBJ25-01-A18 ZPX63HBJ25-01-A18 109 160 120 171 50-01-A18 50-01-A18 144 195 155 206 40 41 28 43 20.5 32 47 69 13 63 65 46 68 31.5 43 58 80 21.5 75-01-A18 75-01-A18 180 231 191 242 ZPX50HBJ25-01-A18 ZPX80HBJ25-01-A18 112.5 163.5 125.5 176.5 50-01-A18 50-01-A18 147.5 198.5 160.5 211.5 24

SX

Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) SS5X3-45l SS5X5-45l C6 C8 0.88 2.2 0.21 0.24 0.22 0.53 0.95 2.5 0.18 0.18 0.22 0.58 C8 C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

OMU0023

Check End Details of code error sum code ) 1 byte 2 bytes 2 bytes 2 bytes 2 bytes 2 bytes The MSB of the Problems 01-FF code Note 4) LRC CR, LF function code is changed to 1.