Table of Contents

D-M9N(V)/D-M9P(V)/D-M9B(V) Direct Mounting Style . Water Resistant 2-color Indication Type. D-F5BAL Tie-rod Mounting Style. D-F9BAL Direct Mounting Style. Solid State Switch with Timer . D-F7NTL Rail Mounting Style . D-F5NTL Tie-rod Mounting Style. Made to Order Specifications: Solid State Switch .

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

Series MLGP

Same surface 75 Note 1) Confirm that it is possible to secure the minimum bending radius of 10mm of the auto switch lead wire before use. Note 2) Confirm that it is possible to securely set the auto switch(es) within the range of indicator green light ON range before use. For in-line entry type, please also consider Note 1) shown above.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Standard Strokes Bore size [mm] Standard stroke [mm] Note 1) Long stroke [mm] Note 2) 40 25, 50, 75, 100, 125, 150, 175, 200, 250 300, 350, 400, 450, 500 800 Refer to pages 18 to 23 for cylinders with auto switches. 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250 300, 350, 400, 450, 500, 600 1200 Minimum stroke for auto switch mounting Auto switch proper mounting position (detection at

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100 125, 150, 175, 200 M L MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Piston area (mm2) Operating direction 1.0 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 MGC Made to Order Specifications (For details

Non-rotating Double Power Cylinder ø20, ø25, ø32, ø40, ø50, ø63, ø80 Series MGZ

-X1247 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500 600, 700, 800 20, 25 32, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Intermediate strokes and strokes shorter than 75 mm are also available.

Air Cylinder Standard: Double Acting, Single Rod ø 40 , ø 50 , ø 63 , ø 80 , ø 100 Series CA2

-XA< Tie-rod, cushion valve, tie-rod nut, etc. made of stainless steel -XC7 (mm) Standard stroke Bore size Long stroke (L and F only) -XC8 -XC14 -XC15 -XC30 Adjustable stroke cylinder/Adjustable extension type 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Change of trunnion bracket mounting position Change of tie-rod length Rod trunnion 40 800 25, 50, 75, 100, 125, 150

Cylinder with Lock Double Acting, Single Rod ø40, ø50, ø63, ø80, ø100 Series CNA2

Bore size (mm) Standard stroke (mm) Note 1) Long stroke (mm) Note 2) Minimum stroke for auto switch mounting Auto switch proper mounting position (detection at stroke end) and mounting height Operating range Auto switch mounting bracket/Part no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600

Guide Table Series MGF ø 40, ø 63, ø 100

Guide Table Bore size/ Standard stroke (mm) Number of auto switches 40 63 100 30, 50, 75, 100 30, 50, 75, 100 30, 50, 75, 100 2 pcs. 1 pc. "n" pcs. Nil S n Auto switch Nil Without auto switch (Built-in magnet) Select applicable auto switches from the table below. Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches.

Compact Cylinder with Air Cushion Series RQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order RQ B 32 50 50 32 RDQ B M9BW With auto switch With auto switch Made to Order (Built-in magnet) For details, refer to page 775. Mounting bracket Number of auto

, 100 30, 40, 50, 75, 100 40, 50, 75, 100 Made to Order (For details, refer to pages 1420 and 1470.)

1

Standard Strokes Bore size [mm] Standard stroke [mm] *1 20 25, 50, 75, 100, 125, 150, 200, 250, 300 25 32 40 *1 Intermediate strokes not listed above are produced upon receipt of order. The minimum stroke is 25 mm. Mounting Brackets/Part No.

Compact Cylinder

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) Indicator light Wiring (Output) Type Special function Electrical entry M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V, 12 V Solid state auto switch 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V

48

B 0.2 A 0.2 Bore size A [mm] B [mm] Hexagon socket head cap screw 12 (10 x 2) 52 11 M3 x 0.5 16 (12 x 2) 57 11 M4 x 0.7 20 (16 x 2) 75 14 M4 x 0.7 25 (20 x 2) 84 17 M5 x 0.8 32 (25 x 2) 98 21 M6 x 1.0 40 (32 x 2) 107 27 M8 x 1.25 50 (40 x 2) 135 37 M8 x 1.25 63 (45 x 2) 146 40 M10 x 1.5 80 (56 x 2) 184 50 M12 x 1.75 100 (71 x 2) 219 62 M14 x 2 8.

Compact Guide Cylinder

B 0.2 A 0.2 Bore size [mm] A [mm] B [mm] Hexagon socket head cap screw 12 (10 x 2) 52 11 M3 x 0.5 16 (12 x 2) 57 11 M4 x 0.7 20 (16 x 2) 75 14 M4 x 0.7 25 (20 x 2) 84 17 M5 x 0.8 32 (25 x 2) 98 21 M6 x 1.0 40 (32 x 2) 107 27 M8 x 1.25 50 (40 x 2) 135 37 M8 x 1.25 63 (45 x 2) 146 40 M10 x 1.5 80 (56 x 2) 184 50 M12 x 1.75 100 (71 x 2) 219 62 M14 x 2 7.

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

Series MHL2 112210, 16, 20, 25, 32, 40 Parallel Type Wide Opening Air Gripper How to Order 11 Vacuum suction type Clean series 11MHL 2 16 D 1 M9N 22MHL 2 16 D 1 M9N Wide opening Number of auto switches 2 pcs. 1 pc. n pcs.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.

Air cylinder (Series compatible with secondary batteries)

.) < Applicable Auto switches > Solid state auto switch D-M9N(V)-900M9P(V)-900M9B(V)-900 D-M9NW(V)-900M9PW(V)-900M9BW(V)-900 Reed auto switch D-A90-900 Fig 4. How to Mount and Move the Auto Switch Fig 4.

Free Mount Cylinder for Vacuum Series ZCUK

Auto switch model Lead wire length (m) Load voltage Wiring (Output) Pre-wired connector Applicable load DC AC Indicator light Yes Yes Electrical entry Type Special function Perpendicular In-line 0.5 (Nil) 5 (Z) 1 (M) 3 (L) M9NV M9PV M9BV M9NWV M9PWV M9BWV M9N M9P M9B M9NW M9PW M9BW 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire IC circuit 5 V, 12 V Reed switch Solid state