70astamb1

Single knuckle joint + Double clevis (10) (5) 6-7-11 12 Series MB1 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-Z7/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL A 1 5 Bore size (mm) B 32 1 4 40 1 4 50 2 4 63 2 4 80 7.5 5.5 100 7.5 5.5 A B Operating Range Minimum Stroke for Auto Switch Mounting Applicable bore size (mm) Courtesy of Steven Engineering

0.4

2 (A) 4 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

5 Analog output [V] Main circuit For compound pressure 1 k 100 kPa 100 kPa 100 kPa to 100 kPa Black OUT + 12 to 24 VDC (Analog output) For positive pressure 0.1 MPa 1 MPa 0 0 to 1 MPa Load Blue DC () 1 0.6 A C B Pressure Dimensions PSE54M3 M5 PSE54R04 R06 ZSE ISE ZSP PS B 10 10 A ISA B PSE With across flats 7 M3: M3 x 0.5 M5: M5 x 0.8 IS A ISG (mm) (mm) PSE54-M5 PSE54-M3 PSE54-R06 PSE54

IDU/IDF

Dryer Capacity Model A B C D E F B IN PUT IDF1D-1 to 11C-1 IDU3D-1 to 11C-1 4.2 x 7 (Long hole) Single phase Single turn 110VAC (50Hz) 110 to 120VAC (60Hz) 100VAC (50Hz) 100 to 110VAC (60Hz) 500VA 78 94 100 64 75 1.5 IDF-TR500-1 E D 4-F IDF15C-1 IDU15C-1 4.2 x 9 (Long hole) Input cord 2m 1kVA 104 122 134 75 114 4 IDF-TR1000-1 IDF-TR -2 C A OUT PUT Weight (kg) Primary voltage Secondary voltage

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: Y Y = X = X = Long shaft side (mm) (mm) Long shaft side Long shaft side Y Y X X Size Size Body (B) Body (B) 10 10 1 to 14 1 to 14 1 to 14 1 to 14 Body (B) Body (A) Body (A) X = X = 15 15 1.5 to 18 1.5 to 18 1.5 to 18 1.5 to 18 Body (A) Y = Y = 20 20 1.5 to 20 1.5 to 20 1.5 to 20 1.5 to 20 Short shaft side Short shaft side 30 30 2 to 22 2 to 22 2 to 22 2 to 22 Short

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

LEY-OM007

IEC 60204-1:Safety of machinery --Electrical equipment of machines. (Part1:General requirements) ISO 10218-1992:Manipulating industrial robots -Safety. JIS B 8370: JIS B 8361: JIS B 9960-1:-((1 :) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. -2- LEY / / *3) *3) 1 1 1 1.5 () 1./ 1.1 (1) -3- -1. No. / 1 1 1 1 I/O (1 ) 1 1 (USB ) 1 -2.

MY1

C D Side support B MY-SB 2-J 2-H C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 G 6.5 8 9.5 11 A 61 67 81 100 120 142 172 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B M10 x 1.5 55 14.8 8.5 9 14 80 MY-S40A B M12 x 1.75 70

air-filter-e

B S Bronze Stainless steel 316 Symbol Element size Nominal filtration accuracy (m) Symbol Nominal filtration accuracy (m) 1 A Element size 65 x L250 65 x L500 65 x L750 65 x L1000 100 200 300 400 1 2 5 10 20 40 70 100 120 001 002 005 010 020 040 070 100 120 5 B 3 A 255 Sintered Metal/Fiber Elements Specifications Material Bronze Sintered Metal Filter Elements Stainless steel 316 Operating

Air Preparation Equipment

B S Bronze Stainless steel 316 Symbol Element size Nominal filtration accuracy (m) Symbol Nominal filtration accuracy (m) 1 A Element size 65 x L250 65 x L500 65 x L750 65 x L1000 100 200 300 400 1 2 5 10 20 40 70 100 120 001 002 005 010 020 040 070 100 120 5 B 3 A 255 Sintered Metal/Fiber Elements Specifications Material Bronze Sintered Metal Filter Elements Stainless steel 316 Operating

MHZ

O B A MHC (mm) (mm) H 2.4 2.9 3.4 4.5 5.5 6.6 9 B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ

MHZ

16, MHZL2-16 (0.4) 0.4 MHW MHZ2-20, MHZL2-20 (0.4) No setting 0.4 0.5 1 0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

mm 300 100 200 MGJ 100 100 MGP 80 Load mass m (kg) Load mass m (kg) Load mass m (kg) 80 80 MGQ 10 10 10 63 63 63 MGG 50 50 50 MGC 40 1 1 1 25 20 25 20 40 32 40 32 MGF 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000 70 100 1000 70 100 1000 MGZ Stroke (mm) Stroke (mm) Stroke (mm) MGT 2.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

, 200 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied

70pvpump

to 100 kPa 10 to 101.3 kPa 0.1 to 1 MPa 0 to 100 kPa 0 to 1 MPa 0 to 101 kPa 0.1 to 0.45 MPa 0.1 to 0.4 MPa 20 to 101 kPa 101 to 101 kPa 0.1 to 1 MPa 0.4 to 10 MPa 0.5 to 15 MPa 100 to 100 kPa 0.1 to 1 MPa 0 to 1 MPa Voltage 12 to 24 VDC (Ripple 10% or less) 3% F.S. or less (5 to 40C) 3% F.S. or less (0 to 60C) 3% F.S. or less (0 to 60C) 3% F.S. or less (0 to 60C) 0.01 mm or less (0 to 60C

Environment

How to Order w LEY H S B A1 2 S2 25 100 X5 Made to Order: Dust-tight/ Water-jet-proof q Accuracy q y u i o !0 !1 !2 !

VZ3000

2(B) port M5 x 0.8, C4, C6 Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size 1(P), 5/3(R) port Manifold 2 (B), 4(A) port C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1/8 1/8 1/8 M5 x 0.8 C4 C6 0.46 0.62 0.79 0.39 0.33 0.36 0.12 0.16 0.21 0.75 0.83 0.91 0.32 0.27 0.36 0.19 0.20 0.24 Body ported For internal pilot Type VV5Z3-20 VZ32 Note) Value at manifold

90

Single unit Note 1) Port exhaust B Ejector system t Pressure Sensor/Digital Pressure Switch for Vacuum Specifications Common Silencer exhaust Pressure sensor C Symbol Type Pressure range [kPa] Specifications P 0 to 101 Analog output 1 to 5 V Pressure sensor For manifold T 100 to 100 Analog output 1 to 5 V Individual port exhaust A B C D E F H J K Q R S Unit selection function Note 9) NPN

LEF-OM002xx

V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0

Compact Cylinder

Double clevis: CVQD CT Rod end male thread 4 x N Cap bolt Shaft d9 CD hole H10 L1 Rod end nut CU +0.4 +0.2 CX RR CW L B + Stroke CZ 0.1 0.3 CL + Stroke A + Stroke (mm) Bore size (mm) Stroke range (mm) 32 40 50 63 B CL CD CT CU CW CX CZ L L1 N RR A 70 Note 1) 33 Note 1) 60 10 5 14 20 18 36 7 28.5 M6 x 1 10 5 to 100 68.5 10 6 14 22 18 36 7 28.5 M6 x 1 10 78.5 39.5 5 to 100 90.5 Note 2) 40.5