MY1

(RedGreenRed) D-Y7BWV D-Y7BW D-Y7NWV D-Y7NW D-Y7PW Perpendicular D-Y7PWV Auto switch part no.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

7.4

Base Mounted Manifold D side U side 6 7 3 2 1 Stations 0 1 8 9 753 S0700 Series Dimensions SS0755-SAm M5 Cm Nm 48.5 300 (Lead wire length) 43 SI UNIT EX510-S001 68.5 (Double solenoid dual 3-port) 48.2 (Single solenoid) COM PWR 76.5 (Closed center) 39.7 Grommet (n-1) x 8.5 L1 L2 51.4 300 (Lead wire length) (4.5) 4.5 43 19.8 12.7 8.5 8.5 13.7 7.7 M3 x 0.5 External pilot port (External pilot

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Note 4) When specifying more than one option, indicate them alphabetically. 2.10-11 VQZ100/200/300 Body Ported How to Order Manifold VQZ200/300 VV3QZ 2 2 08 C D Series DIN rail mount 2 3 VQZ200 VQZ300 None DIN rail mounting (DIN rail standard length) DIN rail mounting (Without DIN rail) D DO Order DIN rail separately Refer to p.2.10-17 for DIN rail part number.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Dimensions [mm] Model L A B n D E G LEKFS32mm-100m 295 106 230 4 130 LEKFS32mm-200m 395 206 330 6 2 300 280 LEKFS32mm-300m 495 306 430 6 2 300 280 LEKFS32mm-400m 595 406 530 8 3 450 430 LEKFS32mm-500m 695 506 630 10 4 600 580 18 LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: Motor Parallel LEKFS40R 24 Motor option: With lock 153 Cable length 250 20 Motor cable 15 65

Manifold Specifications

mm H: 600 mm VFS (Lead wire length) VS4 VQ7 EVS VFN (mm) Stations L1 L2 15 306 294 14 287 275 13 268 256 12 249 237 11 230 218 10 211 199 9 192 180 8 173 161 7 154 142 6 135 123 5 116 104 4 97 85 3 78 66 2 59 47 L plug connector (L) DIN terminal (D) M plug connector (M) Built-in One-touch fittings MAX. 10 300 (Lead wire length) C6: MAX. 6 C8: MAX. 6.5 300 (Lead wire length) 2n-One-touch

Air Cylinder

D-G

VZ3000

H VK VZ (Mounting hole pitch) (Mounting hole) Manual override (Non-locking) VF VFR VP4 (Mounting hole pitch) G: 300 mm H: 600 mm (Lead wire length) VZS VFS VS4 VQ7 EVS (PE port) VFN (Piping port) L plug connector (L) VZ3240-L-01 M plug connector (M) VZ3240-M-01 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3240-D-01 Built-in speed controllers

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

to 300 50 25 32 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 10-4-14 15 Smooth Cylinder Series CA2Y 40, 50, 63, 80, 100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2.

C85

B 24 A Hs 18.6 B 16 A 29 D-H7 D-H7W D-H7BAL D-H7NF Hs 8.5 1 7 23.5 A B D-A79W 14 Hs A 38.2 B 16 D-H7C Hs D-F7 D-F7W D-J79 D-J79W D-F7BAL D-F79F 23 A B 1 8.5 Hs 11 13.3 13.3 10 A B 26 Auto Switch Mounting Position (mm) D-J79C 17 D-C7 D-C80 D-C73C D-C80C D-A73 D-A80 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V D-F7WV D-J79C D-F7BAL D-F79F/A72 D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-A79W Hs Bore

C85

8 10 12 7.5 9 4 4 5 15 Data Hs D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V D-F7WV D-J79C/A72 D-F7BAL D-F79F 5 16 20 25 8 10 12 8 9.5 2 2 3 (mm) C85 Auto Switch Mounting Height D-A7 D-A80 D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL D-F79F D-F7V D-F7WV D-F7BAVL D-C7/C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-A73C D-A80C D-H7C D-A79W D-J79C D-H7 D-H7C D-H7W D-H7BAL D-H7NF Bore 3 16 Hs Hs

Valve Single Unit

Push-turn locking slotted type Electrical entry Nil Positive common Grommet L plug connector M plug connector N Negative common Light/Surge voltage suppressor G: Lead wire length 300 mm H: Lead wire length 600 mm M: With lead wire (Length 300 mm) MN: Without lead wire MO: Without connector L: With lead wire (Length 300 mm) LN: Without lead wire LO: Without connector Nil Without light/surge

17

Confirm the Coordinates and Moments in Model Selection on page 1229 for details of floating Y and Z axes. 1196 MY1B Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at Stroke End) MY1B (Basic type) 25 to 40 Auto Switch Proper Mounting Position (mm) D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV Auto switch model D-A9 D-A9V A A Bore size A 25 32 40 79 83 112.5 116.5 133.5

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Technical Data 1219 MY1H Series Auto Switch Mounting Auto Switch Proper Mounting Position Auto Switch Proper Mounting Position (mm) D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AV Auto switch model D-A9 D-A9V A A Bore size A A 25 32 40 81 85 112.5 116.5 133.5 137.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Compact Cylinder Series NCQ8

Mounting bolt C D Mounting Bolt Size for NCQ8B056 to 250(Without Auto Switch) (Inch) Model C D Bolt size Model C D Bolt size NCQ8B056-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B075-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B106-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B150-012 025 037 050 062 075 087 100 125 150

MXW

D-A9V 10 6 6 8.5 10 D-M9 D-F9W D-M9V D-F9WV 5.5 (4) 3 (2) 3 (3) 4 (3) 6 (4) Interference Note) Figures in parentheses are the case for D-M9, D-M9V switch types.

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

0.4

or D.