CHKD/CHKG type (mm) a b c e f g h Bore size (mm) B C N S g h A Bore size (mm) 20 20 12.5 15 M10 x 1.25 6 10 23 66 61 43 18 26.5 6 33 76 25 25 15.5 18 M12 x 1.25 6 12 26 71 63 45 18 30 6 36 81 32 32 22 25 M16 x 1.5 7 14 35 86 71 51 20 38 7 45 96 40 40 27 30 M20 x 1.5 7 19 40 95 75 55 20 45 7 50 105 50 50 32 35 M24 x 1.5 8 24 46 106 81 60 21 55 7 56 116 63 63 42 45 M30 x 1.5 9 30 58 125 90 67 23 66 7 68
24 4.5 33 6 M14 x 1.0 28 12 14 20 24.5 6 15.5 18.5 24 9 8 M5 x 0.8 31.7 6 25 8 17 2.9 29 5.5 42 MB1 Symbol S Z ZZ R Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st CA2 6 10 15 45.5 62.5 40.5 35.5 67.5 57.5 63.5 58.5 53.5 50.5 48.5 7 52.5 50.5 65.5 70.5 45.5 40.5 79 75.5 65.5 69 64 59 55.5 54 8 85.5 60.5 CS1 52 67 76 47 42 83 81 71 73 68
mounting groove (4 locations) 65 Width across flats 10 (4 locations) M5 x 0.8 (Finger closing port) M5 x 0.8 (Finger opening port) H 4 x M6 x 1 (Piston rod thread and rack thread) 28.2 2 x M5 x 0.8 (Vacuum port) 6.5 12 12 11 10 10 1 24 14 S O 20 46 24 30 K 15 (70) 10 24 24 12.5 4 12.5 4 10 30 When open F 17 17 54 4 x M6 x 1 through (Thread for mounting attachment) When open G (mm) J 32 68
Size: 10 to 50 B A Magnet Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch Lm Reed auto switch Solid state auto switch Hysteresis angle DM9 DA9, DA9V Size Rotating angle Operating angle m 10 10 10 10 Operating angle m 10 10 10 10 B 45 62 68 83 B 49 66 72 87 A 27 35 39 49 A 31 39 43 53 Hysteresis angle 90 80 65 50 42 35 30 24
0 5H9 ( ) depth 4 30 M 0.5 37.5 40 Z ZZ (NN 1) x H G 10.5 24 10.5 24 H B A 10.5 10.5 5.1 9.5 26 1 5H9 ( ) depth 4 +0.030 0 6 NN x M6 x 1 thread depth 12 B A 5H9 ( ) depth 4 +0.030 0 Section AA Section BB GA HA (mm) ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68
M 0.5 37.5 40 Z ZZ (NN1) x H G 10.5 24 10.5 24 H B A 10.5 10.5 5.1 9.5 26 1 5H9 depth 4 +0.030 0 6 NN-M6 x 1 thread depth 12 B A 5H9 depth 4 +0.030 0 Section AA Section BB GA HA (mm) Model F 35 35 35 40 30 55 65 70 ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68
assembly (26P) AXT100-FC26-1: 1.5 m AXT100-FC26-2: 3 m AXT100-FC26-3: 5 m DIN rail clamp screw EXH R EXH R B B B B B B B B P X X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 68
M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 198 215 218 241 20 25 32 40 0.25 stroke For long stroke refer to page 9-2-32. 9-2-30 Series CLG1 Fine Lock Cylinder Double Acting, Single Rod With Mounting Bracket Foot style: CLG1LN Foot Style Without rod boot With rod boot ZZ Bore size (mm) BZ M W X Y LS LT LX LH LD LZ LC ZZ 202 219.5 222.5 246 182 197.5 200.5 226 117 127 128 142 3 3 3 3 50 57 60 68
style (F, G) Head side mounting (G) ZF + Stroke Rod side mounting (F) Mounting style (C) Mounting style (D) XD + Stroke Bore size (mm) E1 R W MF ZF FB CD EB L XD UB CB EW MR TR AO AT XA SA AH AB TF UF E2 32 32 16 10 130 10 12 142 26 48 7 65 45 26 32 10 4.5 144 142 32 9.5 7 64 79 50 40 36 20 10 145 12 15 160 28 55 9 75 52 28 36 11 4.5 163 161 36 12 10 72 90 55 50 45 25 12 155 12 15 170 32 68
V 24 V, 48 V 100 V No Yes Yes R80C Connector Relay, Reed switch 2-wire 24 V R73 Grommet PLC 100 V R73C Connector T79 Grommet 2-wire 12 V Relay, T79C Connector Solid state switch 24 V PLC S79 IC circuit 3-wire (NPN) Grommet 5 V, 12 V S7P 3-wire (PNP) Lead wire length symbols: 0.5 m Nil (Example) R73C 3 m L (Example) R73CL 5 m Z (Example) R73CZ None N (Example) R73CN 11-4-2 68
A S G D L TG effective depth TL TF effective depth TL TD TB TC (mm) D (g6) DD (h9) AU A B BA BB BC BD BE BU F H J JA JB JJ K Size Rotation angle 20 30 40 90, 180 50 25 2.5 63 (11) 14 34 14.5 30.4 10 30 M8 x 1.25 11 6.5 3 90, 180 M5 x 0.8 depth 6 68 30 3 69 (11) 14 39 16.5 49 16 34.7 12 32 M10 x 1.5 14 8.5 4 90, 180 M6 x 1 depth 7 76 32 3 78 (13) 16 47 18.5 55 16 40.4 15 36 M10 x 1.5 14
24 40 M4 x 0.7 11 10.5 30 27 24 19 M8 x 1.0 6 40 20 3.5 16 60 17.5 85 103 77 1.0 0.5 12.5 30 60 M4 x 0.7 M8 x 1.0 8 68 26 4.3 20.5 80 PA dimensions are for split from center.
P.T. 4 Max. 6 R port (3 port only) (68) 30 38 24 10.5 16 Symbol 2 port (A) 2 12 10 1 (P) 3 port (A) 2 44 25.4 17 10 12 1 (P) 3 (R) 2 x 4.6 mounting hole 2 x M5 x 0.8 depth 4 8.5 14 * 0.5 MPa supply F .O.F .* 29 N P .T. 2 mm O.T. 1.5 mm T.T. 3.5 mm Cross roller plunger VM122-M5-07A VM132-M5-07A VM122-M5-07SA VM132-M5-07SA Panel mounting hole 2 x M14 x 1 Hexagon nut Thickness 5, Width across
assembly (26P) AXT100-FC26-1: 1.5 m AXT100-FC26-2: 3 m AXT100-FC26-3: 5 m DIN rail clamp screw EXH R EXH R B B B B B B B B P X X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 68
hole 2 x 3.4 Mounting hole z280 Q F D 11 Q F D G1/2 Vacuum For Oil Construction Dimensions Construction Dimensions 23 R C C R 1.2 1.2 E E 2 x P Port size 2 x P Port size B1 B1 B B Terminal part Faston connector 250 Series 11 9 6.5 15 (mm) VX2 Electrical entry Size Mounting bracket dimensions One-touch fitting B B1 C D E F Conduit Faston type P Q Q R R U U1 W X X1 Y 1 2 3 C6, C8 53.5 66 68
Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17 26 41 52 G 40 39 63 68
Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-
SMC B 19 19 23.5 23.5 D C 4 6 6 8 A 60 60 68 68 04 06 06 08 17 17 21 21 ZFC100A X17 Width across flats C ZFC2001115 Series ZFC Specific Product Precautions Be sure to read before handling. Refer to front matters 38 and 39 for Safety Instructions and pages 844 to 846 for Vacuum Equipment Precautions. Selection Handling of One-touch Fittings 1.
The switch may be damaged if a screw other than the one supplied, is used. 197 (5 ) 2.40 (68) 2.22 (63) 2.40 (68) Unit: in Dimensions ( ): mm Auto Switch Internal Circuit D-M9 Mounting screw M2.5 x 4l Slotted set screw Indicator light D-M9N, M9NV DC (+) Brown 0.10 (2.6) Switch main circuit OUT Black 0.11 (2.7) 0.16 (4) 0.11 (2.8) 0.87 (22) 0.13 (3.2) DC () Blue D-M9P, M9PV 0.24 (6) Most sensitive
MSQ MRQ Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) DDC (+) Brown D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model 208 8 7 0.5 Main circuit of switch Main circuit of switch Main circuit of switch Lead wire length (m) OUT Black 41 41 38 3 68 68 63 5 Dimensions DC () Blue D-M9V D-M9 D-M9P, D-M9PV M2.5 x 4l slotted set screw 500 (3000) (5000) Indicator light M2.5 x 4l Slotted set screw