VXD21/22/23

Then the pressure in the pressure action chamber B falls to open the main valve C. When the coil o is not energized, the pilot valve A is closed and the pressure in the pressure action chamber B rises and the main valve C closes.

ZSE30/ISE30

) 258-9200-www.stevenengineering.com (mm) Elbow Straight A One-touch fitting size 4, 5/32" 6 1/4" C 18 20 20.5 B 10.4 12.8 13.2 B A 20 22.4 22.8 C B 14.4 11.2 B Straight Elbow With One-touch fitting With bracket 42.5 10 15 4.2 3 22 30 20 25 20 SMC 45 30 1.8 35 35 16-2-10 11 Series ZSE30/ISE30 High Precision, 2-color Display Digital Pressure Switch Dimensions Panel mount ZSE ISE PSE Z I SE3

energy saving effect

Applicable model Rated current [A] Sensitivity of leak current [mA] Short circuit display method HRSH100--20-B 30 Earth leakage breaker HRSH150--20-B HRSH200--20-B 40 HRSH250--20-B 50 HRSH300--20-B 30 Mechanical button * 400 V type is equipped as standard.

5 Port Solenoid Valve Series SV

Labels are attached to indicate A and B side functions, using the same color as the manual override. A side manual override: Orange A side passage symbol: Orange A B A B B side passage symbol: Green B side manual override: Green Pull the lever forward with a screw driver, etc.

Electric Actuator Triple Axis P&P Unit

Motor mounting process M5 x 14 Tightening torque 4.4Nm0.2Nm M4 x 14 Tightening torque 2.1Nm0.1Nm Plate A M4 x 14 M4 x 12 B 22 22 B section detail A section detail 18 Electric Actuator/Maintenance Guide 3 Be sure to read before handling. Belt mounting procedure Belt mounting process Belt mounting process 1. Confirm that the belt to be used has the following part number.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Basic Type ZX ZR (a) Full system (b) 3 port valve selection ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ (c) Switching on the vacuum side (d) Centralized exhaust type ZF Exhaust pipe with enough capability ZP ZCU AMJ Misc.

AMD

Port size AMD550 AMD650 AMD850 01 B 06 10 14 B 3 4 1B 1 8 N.C. auto-drain N.O. auto-drain Drain guide Accessory 02 03 B 1 4 B 3 8 04 B 1 2 1 B 1 2 20 2B 1 4 B IN-OUT reversal direction T Element service indicator Option AMD800 to AMD1000 Self-standing type AMD801/901 Piping support type 20 01 AMD 8 20 00 AMD 8 Port size Body size Port size Body size 8 8 20 2B flange 30 3B flange 20 2B flange

AMF

AL-31S JIS B 2401G35 5 pcs. u O-ring NBR JIS B 2401G35 1 pc. JIS B 2401G35 1 pc. JIS B 2401G35 3 pcs.

VZA2000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR Model VH Flow characteristics Pilot port size Pilot port piping location b Cv b C [dm3/(sbar)] 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] Cv Function Port size Valve model VHS VZA2121-M5 VZA2221-M5 VZA2321-M5 VZA2421-M5 VZA2141-1-01 VZA2141

VNB

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Body material Stainless steel: S NBR : A FKM : B EPR : C Fluid BC6: Standard NBR : A FKM : B EPR : C Aluminum: L NBR : A FKM : B EPR : C Seal material Applicable fluids VX3 Air (Standard, Dry) Refer to Table (1) to check that the desired fluid is applicable

Thermo-chiller/Rack Mount Type

Circulating fluid return port When heating the circulating fluid, the high-pressure, high-temperature refrigerant gas is bypassed into the evaporator by expansion valve B to heat the circulating fluid. The combination of the precise control of expansion valve A for cooling and expansion valve B for heating allows for high temperature stability.

ZQ

) 258-9200-www.stevenengineering.com b b view 4 6 2 a 5 a 5 5 Component Parts No.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

Auto switch a b d c Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Proper Mounting Position (mm) A B Bore size (mm) 63 80 100 10 13 17.5 14 18.5 23.5 Proper Mounting Position (mm) a b 14 18 17 c 20 24 23 d D-A9 type D-M9 type D-F9 W type 2 6 5 8 12 11 In order that

VNC

push type 9 Other 20 (14) 3 Option 25 (16) 4 Valve size 2 to 9 1 1 1 4 32 (22) 5 1 B 1 4 Flange 32F 40A 1 1 2 40 (28) 6 1 B 1 2 Flange 40F Electrical entry/With light/surge voltage suppressor 50A Nil Air operated 2 50 (33) 7 GS Grommet with surge voltage suppressor G Grommet 2B Flange 50F E Grommet terminal 2 B 1 2 Flange 65 (45) 8 65F Valve size 1 EZ Grommet terminal with light/surge

Vacuum Equipment

Pad selection 1-A Theoretical lifting force 1-B Calculation method: Pad diameter 2.

Series AK1000

Dimensions inch (mm) AK3542 & 4542 M5 x 0.8 Actuation port 1.57 (40) 2.24 (57) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: N, BRN Connections: 4T, 6T Connections: 4, 6, BR 4 6 4 6 4 6 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70

HRS100/150

View B-B 50 HRZ HRZD Accessory: Y-strainer mounting view HRW * Mount it by yourself on the circulating fluid return port.

F

Outside Local Area: (800) 258-9200 !

ZSE F/ISE

High Suction Vacuum Work 1 Work 2 Work n Max.A ON point OFF point Min.B Not adsorption Work 1 Work 2 Work n Atmosphere A B 4 A B 4 = A ON point Max.A: Maximum pressure value when workpiece is vacuumed. Min.B: Maximum pressure value when workpiece is not vacuumed.

ISE70/75/75H

Note Bracket B and the bracket assembly make up one set.