3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Note 4) When specifying more than one option, indicate them alphabetically. 2.10-11 VQZ100/200/300 Body Ported How to Order Manifold VQZ200/300 VV3QZ 2 2 08 C D Series DIN rail mount 2 3 VQZ200 VQZ300 None DIN rail mounting (DIN rail standard length) DIN rail mounting (Without DIN rail) D DO Order DIN rail separately Refer to p.2.10-17 for DIN rail part number.

Floating Joint

Model Order no. d: Thread nominal size d: Thread nominal size H H B C B C JA6-3-050 JA10-4-070 JA15-5-080 JA15-6-100 JA20-8-100 JA20-8-125 JA32-10-100 JA30-10-125 JA25-10-150 JA40-12-125 JA40-12-150 JA40-12-175 JA40-14-150 JA50-16-150 JAH40-16-150 JA63-16-200 JA63-18-150 JAH50-20-150 JA80-20-250 JA80-22-150 JAH63-24-150 JAH63-24-200 JA100-24-300 JA100-26-150 JA100-27-150 JA125-27-200 JA140

ZP

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

CNS

: m (kg) 700 800 900 700 800 900 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-8-7 8 Cylinder with Lock Double Acting, Single Rod Series CNS 125, 140, 160 How to Order 125 125 100 100 Y7BW CDNS D CNS D L Without auto switch L With auto switch Number of auto switches Built-in magnet Port

IZx-OMP0064

50 to 2000 3 300 to 400 300 to 1500 350 to 2000 500 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 5 300 to 400 300 to 1500 300 to 2000 400 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 8 300 to 350 300 to 1400 250 to 2000 300 to 2000 10 200 to 300 200 to 1400 200 to 2000 200 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 15 200 to 300 200 to 1400 150 to 2000 100 to 2000 50

SFOD-OMT0009CN

USB 7. 106 No.SFOD-OMT0009CN-B 7. 7. 4. ( EMG ) 4. 107 No.SFOD-OMT0009CN-B 1. 1.1 LEY/LEYG LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 A B C A B C A B C A B C [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 [mm] 300 300 300 400 400 400 500 500 500 500 500 500 [mm/s] 500 250 125 500 250 125 500 250 125 300 150 75 [mm/s] 15 8 4 18 9 5 24 12 6 24 12 6 () [mm/s] 22 12 6 26 13 7 34 17 9 34

Table of Contents

D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto-drain (N.C.)

AC Servo Motor Driver

[C][0].

Cylinder with Lock Series CLS

MLGP 300 300 ML1C 200 200 [Example] 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5 MPa P 0.5 MPa P 250 4000 3000 3000 200 2000 180 250 2000 160 140 200 1000 125 180 700 800 900 Load mass: m (kg) Load mass: m (kg) 1000 700 800 900 160 600 140 600 500 500 125 400 400 300 300 D200 200 -X Individual -X 100 100 100 500 400

VDW

VDW 2 0 1 C1 1 VC OUT (2) VDW Series Lead wire length 1 2 3 10 20, 200 30, 300 300 mm 600 mm Nil L1 (1) IN 2 Port Valve VQ Note) Note) Type L1 is optional.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

83503 Flat cable connector Socket: 20 pin MIL type with strain relief Complies with MIL-C-83503 Flat cable connector Socket: 10 pin MIL type with strain relief Complies with MIL-C-83503 D-sub connector Complies with MIL-C-24308 JIS-X-5101 Applicable connector Internal wiring +COM, COM Weight W (g) Note 3) n1: Stations n2: Number of supply/exhaust blocks m : Weight of DIN rail W = 3.2n1 +

3 Port Solenoid Valve Series SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F Maximum speed (mm/s) Load center of gravity position l (mm) Maximum speed (mm/s) up to 300 up to 500 up to 700 up to 300 up to 500 up to 100 up to 200 up to 300 Graph (1) Graph (2) Graph (3) Graph (4) Graph (5) Graph (6) Graph (7) Graph (8) l: This

Vacuum System Peripherals:

Metal Seal, Rubber Seal 3 port solenoid valve Series VQZ200/300 Piping specifications Solenoid valve Port size Effective area (mm2) (Cv) Flow characteristics C (dm3/(sbar)) VQZ215 VQZ235 VQZ225 VQZ245 VQZ315 VQZ335 VQZ325 VQZ345 1.7 2.3 1.7 2.5 3.0 4.5 2.9 4.4 VQZ 200 1 8 1 4 , Base mounted (With sub-plate) VQZ 300 , 1 4 3 8 Base mounted 3 port solenoid valve Series VK Compact size: Width

CL

Part no. l Applicable snap ring t m 16.2 20.2 36.2 1.5 1.55 1.55 0.9 1.15 1.15 Type C 8 for axis Type C 10 for axis Type C 10 for axis IY-G02 IY-G03 IY-G04 CD-G02 CD-G25 CD-G03 CD-G04 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 38.6 42.6 54 65 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 9-2-34

Hydraulic Filters

N.C. and N.O. common 2 x Rc (d) Removal dimension G INLET INLET B C E (F) B N COM. N.O. N.C.

Plate Cylinder

Type C retaining rings for axis are attached.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

T3 = V/a2 = 300/3000 = 0.1 [s] L 0.5 V (T1 + T3) V Time while the actuator is operating at a constant speed T3: Deceleration time [s] T2 = Time from the beginning of the constant speed operation to stop T4: Settling time [s] Time until positioning is completed T5: Resting time [s] Time the product is not running T6: Total time [s] Total time from T1 to T5 300 0.5 300 (0.1 + 0.1) 300

VM

Only when output 1 and 2 are in the ON state, and C turns ON, will output 3 turn ON. If either A or B is turned OFF , output 3 will not be turned ON, even if C is turned ON.

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7