MXU

Note 3) ( ) in column W is the dimensions of D-A93.

MXU

Note 3) ( ) in column W is the dimensions of D-A93.

Series 11-MXJ Air Slide Table

Auto Switch Proper Mounting Position (Detection at Stroke End) Solid state auto switch D-M9 Reed auto switch D-A93 C B A Lead wire, in-line entry Values in the table below are used as a reference when mounting the auto switches for stroke end detection. For actually setting the auto switches, adjust them after confirming their operation.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Lead wire length (m) Auto switch model Electrical entry direction Load voltage Wiring (Output) Special function Electrical entry Indicator light Type 0.5 (Nil) 3 (L) Applicable load AC DC 12 V In-line A93 Reed auto switch 2-wire Grommet Yes Relay, PLC 100 V 24 V M9N 3-wire (NPN) 12 V Solid state auto switch Grommet Yes Relay, PLC 24 V M9B 2-wire 12 V Lead wire length symbols 0.5 mNil

Air Cylinder Standard: Double Acting, Single Rod ø 40 , ø 50 , ø 63 , ø 80 , ø 100 Series CA2

No 100 V or less Relay, PLC Yes No 100 V, 200 V 12 V 200 V or less 24 V 2-wire Terminal conduit PLC Yes 100 V, 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

Cylinder with Lock Double Acting, Single Rod ø40, ø50, ø63, ø80, ø100 Series CNA2

A90 A54 A64 A33C A34C A44C A59W 5 V 3-wire (NPN equivalent) Yes 100 V Grommet Relay, PLC No 100 V or less 100 V, 200 V Yes No 12 V 200 V or less 2-wire 24 V PLC Terminal conduit Yes Relay, PLC 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indication) Solid state auto switches marked with are produced upon receipt of order.

Rotary Cylinder Series MRQ

Symbol -X10 4 Long Stroke (101 to 200 mm) Refer to the table of number of the auto switches mounted below.

Brake mechanism added

A90 A54 A64 A33C A34C A44C A59W B54 B64 A33 A34 A44 B59W 100 V Grommet IC circuit 100 V or less Yes No Relay, PLC 100 V, 200 V 2-wire PLC 12 V No 200 V or less 24V Terminal conduit Relay, PLC 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indicator) 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water

CLQ

200 Warning 1.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

, 250, 320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 2000 2000 2000 2000 2000 2000 32 40 50 63 80 100 125 Minimum Stroke for Auto Switch Mounting 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400

Air Slide Table Series MXJ

100 300 400 500 600 700 0.4 MXJ8 0.3 0.5 0.35 Rubber stopper 0.4 0.30 0.2 Load mass W kg Metal stopper 0.25 0.3 0.20 0.15 0.2 100 50 200 300 0.1 100 50 200 300 400 500 Average speed Va mm/s 0.10 500 700 Average speed Va mm/s Collision speed V mm/s 0.05 400 600 0.00 200 100 300 400 500 600 0 Collision speed V mm/s (Average speed x 1.4) 700 Table (2) Max.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

V V Reed auto switch No 100 V or less A90 V V IC circuit Yes 100 V, 200 V A54 B54 V V V Grommet Relay, PLC No 200 V or less A64 B64 V V Terminal conduit Yes 2-wire 24 V 12 V A33C A33 PLC 100 V, 200 V A34C A34 DIN terminal A44C A44 Relay, PLC Diagnostic indication (2-color indication) Grommet A59W B59W V V ** Water resistant type auto switches can be mounted on the above models

ISO Standard (15552) Air Cylinder: Standard Type Double Acting, Single/Double Rod ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 CP96 Series

, 250, 320, 400, 500 2000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Intermediate strokes are available

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 12 70 87 16 100 123 20 250 290 25 280 320 32 500 525 40 595 640 50 1100 1350 63 1520 1805 Clamp bolt, Hexagon socket head cap screw, Hexagon nut, Spring washer MK-A020 MK-A032 Additional Weight MK-A050 Unit: g 63 17 46 25 350 531 50 7 46 13 350 345 32 7 21 5 200 166 40 6 21 7 200 198 25 7 10 3 100 153 12 13 16 32 20 6 10 2 100

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

Air Cylinder Series CS2 ø125, ø140, ø160

A90 A54 A64 A59W A33 A34 A44 IC circuit 100 V 12 V 5 V, 12 V Grommet No Relay, PLC 100 V or less Yes 100 V, 200 V No 200 V or less 2-wire 24 V PLC Terminal conduit 12 V Relay, PLC Yes 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indication) Solid state auto switches marked with are produced upon receipt of order.

MVGQ

light only) With energy saving circuit MVGQ 12/16 10, 20, 30, 40, 50, 75, 100 100 V 0.78 (With indicator light: 0.81) M L 20, 30, 40, 50, 75, 100 125, 150, 175, 200 110 V [115 V] 0.86 (With indicator light: 0.89) [0.94 (With indicator light: 0.97)] MVGQ 20 Apparent power (2) CV AC (VA) Intermediate stroke (mm) 200 V 1.18 (With indicator light: 1.22) MVGQ As for the intermediate strokes (by

Slit Valve XGT Series

For 200 mm wafer For 300 mm wafer 529

Compact Cylinder with Lock Series CLQ

L M5 x 60 L 165 180 200 60 CNS CLQB40-10D CLQB100-10D M5 x 75 L M8 x 90 L M10 x 115 L x 65 L 75 90 115 65 -15D -15D x 80 L x 95 L x 120 L x 70 L 80 95 120 70 CLS -20D -20D x 85 L x 100 L x 125 L x 75 L 85 100 125 75 -25D -25D x 90 L x 105 L x 130 L x 80 L 90 105 130 80 8.5 CLQ -30D -30D x 95 L x 110 L x 135 L x 85 L 95 110 135 85 -35D -35D 8.5 15.5 16.5 x 100 L x 115 L x 140 L x 90 L 100