HRL

temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid flow rate: Rated flow, r Power supply: 200 VAC 4 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid temperature: CH1 20C/CH2 25C, r Load: Same as the cooling capacity, t Circulating fluid flow rate: Rated flow, y Power supply: 200 VAC, u Piping length: Shortest 5 With the pressure control

Compact and Lightweight

Vacuum (V) and exhaust (E) port should not be sealed simultaneously.

Series AP3100

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

PF-OMN0009_C

B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H J K L N P PF3W504 3/8 70 50 30 45.6 40.6 15.2 24 14 35 26 18 13.6 2.7 14 PF3W520 3/8 1/2 78 54 30 45.6 40.6 15.2 27 18 39 30 18 13.6 2.7 12 PF3W540 1/2

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Determination of load's kinetic energy (E) bore size E > Es E Es Determination of bore size Review of larger bore size E = m E 2 a ( ) 2 = (Refer to page 8-16-8.) 1000 P Ps P > Ps Determination of pressure for intermediate stop (p) (Refer to page 8-16-8.)

CJ2

Component Parts No. q w e r t y u i No. o !0 !1 !2 !3 !4 !

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Determination of load's kinetic energy (E) bore size E > Es E Es Determination of bore size Review of larger bore size E = m E 2 a ( ) 2 = (Refer to page 8-16-8.) 1000 P Ps P > Ps Determination of pressure for intermediate stop (p) (Refer to page 8-16-8.)

This is a legacy product, and replaced byCY1SG15-210BZ-M9NL, CYL, RODLESS, SLIDER, SW CAP, ACTUATOR, CY1S GUIDED CYLINDER, GM, 15MM CY1S SLIDE BEARING, 3.41844 lb

RS2H-OM0045P

DC AC 0.5 1 3 5 () (M) (L) (Z) M9NV M9N IC 3 NPN 5V 3 PNP M9PV M9P 12V 2 12V M9BV M9B M9NWV M9NV IC 3 PNP M9PWV M9PW 3 NPN 5V 12V 2 2 12V M9BWV M9BW 24V M9NAV M9NA IC 3 PNP M9PAV M9PA PLC 3 NPN 5V 12V 2 2 12V M9BAV M9BA 2 2 P3DW 3 NPN A96V A96 IC 12V 100V A93V A93 2 24V 5V 100V A90V A90 IC PLC 12V 0.5m D-M9N M 1m D-M9NM L 3m D-M9NL Z 5m D-M9NZ 1 17 - 7-2. -1516

Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: NW, Flange Size Nominal: 16, Seal Type: Bellows Seal, Valve Type: Angle type, Indicator: With indicator, Pilot Port Direction: Flange surface, back, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9NL

Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: [Other] CF, Flange Size Nominal: 40, Seal Type: Bellows Seal, Valve Type: Angle type, Indicator: No indicator, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9NL

Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: NW, Flange Size Nominal: 40, Seal Type: Bellows Seal, Valve Type: Angle type, Indicator: With indicator, Pilot Port Direction: Flange surface, back, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9NL

Motor: 2-Phase Stepping Motor, Thread Lead: 5mm, Stroke: 150mm, Origin Switch: Yes (Cable Length 0.3m), Brake: No, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 1 pc.

Motor: 2-Phase Stepping Motor, Thread Lead: 5mm, Stroke: 150mm, Origin Switch: No, Brake: No, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 2 pcs.

Motor: 2-Phase Stepping Motor, Thread Lead: 2mm, Stroke: 175mm, Origin Switch: Yes (Cable Length 0.3m), Brake: w/Motor Brake, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 1 pc.

Motor: 2-Phase Stepping Motor, Thread Lead: 2mm, Stroke: 200mm, Origin Switch: Yes (Cable Length 0.3m), Brake: w/Motor Brake, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 1 pc.

Motor: 2-Phase Stepping Motor, Ball Screw Lead: 12mm, Stroke: 200mm, Home Position Switch: Yes (Cable Length 0.3m), Brake: w/Motor Brake, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 3 pcs.

Motor: 2-Phase Stepping Motor, Ball Screw Lead: 6mm, Stroke: 200mm, Home Position Switch: Yes (Cable Length 0.3m), Brake: None, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 2 pcs.

Motor: 2-Phase Stepping Motor, Ball Screw Lead: 6mm, Stroke: 50mm, Home Position Switch: Yes (Cable Length 0.3m), Brake: None, Auto Switch: M9NL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: 1 pc.