RSH/RS1H

load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral

Air Cylinder Series MB

Note 1) In case of types with no air cushion, a rubber bumper is used. 4 Series MB Without Mounting Bracket Cushion valve Basic/(B) WV Port G 2-RcP MM G With rod boot E E D e MB Effective thread 2 x 4-J C B A K F N MA 13 9 f l N h S + Stroke H ZZ + Stroke Without air cushion Bore size (mm) Bore size (mm) S ZZ S ZZ Model without air cushion is designed to include rubber bumpers.

AC Servo Motor Driver (Pulse input type/Positioning type)

DI-1 Program Description SPN (1000) STA (200) STB (300) MOV (1000) TIM (100) MOV (2000) STOP Speed (Motor speed) Acceleration time constant Deceleration time constant Absolute move command Dwell command time Absolute move command Program end 1000[r/min] 200[ms] 300[ms] 1000[10STMm] 100[ms] 2000[10STMm] a) b) c) d) e) f) b) Acceleration time constant (200ms) c) Deceleration time constant (

25

Size Symbol SMC SMC 2 2 1 2 2 2 2 A B C 6 x 4 4 x 3 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" SMC P Panel mount union U Union : Basic size : With reducer : Basic size : With reducer Note) Check the IN/OUT side fitting size and fitting type for selecting the fitting. SMC E 2A SN LQ3 LQ3 fittings Caution 1.

Vacuum Filter AFJ Series

[kPa] 8 8 AFJ40-04-80-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 80 m Large flow type Nominal filtration rating: 80 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min(ANR)] 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 783 AFJ20 to AFJ40 Series Construction AFJ20 AFJ30, AFJ40 OUT IN OUT IN q q r r w w (y) e (y) t e t Component Parts No.

Table of Contents

C D E F Dimensions Part no.

Vacuum

How To Order o) -r Same as standard except as noted below: c ; -30 o a o : -ls 6 = r . / c E E E E V 't .= (g< () 15 30 45 60 75 90 Supply Pressure (PSl) e Air Piloted Valve Type . Non-electric unit with pilot port control of internal poppet valves. . Supply valve port only; or supply valve and release valve ports. . All other specitications are same as standard unit.

Vacuum

How To Order o) -r Same as standard except as noted below: c ; -30 o a o : -ls 6 = r . / c E E E E V 't .= (g< () 15 30 45 60 75 90 Supply Pressure (PSl) e Air Piloted Valve Type . Non-electric unit with pilot port control of internal poppet valves. . Supply valve port only; or supply valve and release valve ports. . All other specitications are same as standard unit.

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

d o M s t e l t u o l i o f o r e b m u N k r a m e R 4 A V 4 s d n e h t o B 6 A V 6 s d n e h t o B Dimensions/Auto feed tank 0 1 A V 0 1 s d n e h t o B 6 1 A V 6 1 s d n e h t o B 4 B V 4 e d i s e n O 6 B V 6 e d i s e n O 8 B V 8 e d i s e n O s n o i t a c i f i c e p S h c t i w S t a o l F n o i t p i r c s e D 2 ~ 1 0 1 4 S I y t i c a p a C W 5 1 : C D , A V 5 1 : C A e g a t l

RB/RBL/RBQ

R 2 mgh F1S m Nm C m/s kg S T t m MK(2) E1 + E2 mgS F1S mgS mgS F1S + mgS RS Q G 2 2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E Corresponding weight of impact object 2 2 E 2 2 E 2 2 E 2 2 Me kg RS H A E 2 E 2 Angle speed Friction coefficient rad/s 2.

Precision Regulator

4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !9 @0 @6 IC SUP side passage OUT side passage SUP side passage OUT side passage ITVH o o !0 ITVX !0 PVQ y q q IN !1 VY1 w IN !1 Bleed Bleed VBA VBAT y !

LEC-OM02904

(MDR)(3M()) (a) [mm] E D A C LOG 39.0 23.8 B 12.7 A B C D E 10120-3000PE 10320-52F0-008 22.0 33.3 14.0 10.0 12.0 AWG2430 9 4 9 (b) M2.6 [mm] E D A C F LOG 39.0 23.8 5.2 B 12.7 A B C D E F 10120-3000PE 10320-52A0-008 22.0 33.3 14.0 10.0 12.0 27.4 AWG2430 (3) SCR (3M()) 36210-0100PL 36310-3200-008 [mm] 39.5 34.8 22.4 11.0 9 5 10 10 . 2 10.1 . 2 10.2 . 3 10.3 . 5 10.3.1 . 5 10.3.2

HRX-OM-X084

TEMP READY function setting example [1] Circulating fluid temperature at start of operation: about 20 C [2] Circulating fluid setting temperature: 15 C [3] "TEMP READY Bandwidth (Upper Limit)": Set to "2.0 C". [4] "TEMP READY Bandwidth (Lower Limit)": Set to "-2.0 C". [5] "TEMP READY stabilization time": set to "60 sec". [6] "TEMP READY monitoring start time": set to "30 sec". [7] "Time

HRX-OM-Q026

Heat exchanger Ventilation Circulating fluid Expansion E circuit valve A Expansion Inverter pump valve B E Temp. sensor (Ref. discharge Ball tap Fluid level gauge TS Press. sensor Over flow port (Ref. low press.)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

REC

Q G C 22 30 35 37 0.5 Graph (2) Applicable Max.

VQC

D-side w How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

0.01

Description Note Material Bracket set 1 SFD-BR100 With 2 countersunk head screws (M3) IDK e AMG AFF SFD200-C Component Parts No. Description Note Material AM Element 1 PC, Polyolefin, PU o !

XL-OMV0002

KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5