Vacuum Unit

, Description (Pressure Switch for Vacuum) p. 22 Pressure Switch for Vacuum with Energy Saving Function Specifications, Internal Circuit and Wiring Example p. 23 Port Layout Standard Products p. 24 Option -D p. 26 Option -L p. 29 Construction p. 31 Replacement Parts for Single Unit / How to Order p. 32 Exploded View of Manifold p. 33 Dimensions p. 35 Electrical Wiring Specifications

Hydraulic

Bore size (mm) NN P S X Y ZZ 20 M22 x 1.5 1/8 81 20 9 151 25 M24 x 1.5 1/8 81 20 9 156 32 M30 x 1.5 1/8 87 23 9 172 40 M33 x 2 1/4 108 25 11 198 49 Round Type Low Pressure Hydraulic Cylinder: 3.5MPa Series CHM Front flange type: CHMF Width across flats B2 Width across flats B1 N GA GB Rc P N Rc P 4-FD H1 H2 2-NN I IA D FY B MM Effective thread K F NB Width across flats NA NC FT A FX H S +

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P p p 2-wire 12 V M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NA p p P p p IC circuit 3-wire (PNP) M9PA p p P p p 2-wire 12 V M9BA p p P p p Water resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 P P IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 P P P P Relay, PLC No 5 V, 12 V 100

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P(2) P(1) P(1) Note 1) P P P P P P P P P P P P P P P P P P P P P P P P P Note 5) P Basic Foot Rod flange Head flange Integral clevis Single clevis Double clevis Note 3) Note 1) Note 1) P(1) Note 2) P(1) Note 2) P(1) P(1) P(1) Rod trunnion Head trunnion Boss-cut/Basic Boss-cut/Rod flange Boss-cut/Rod trunnion Note 1) Mounting nuts are not attached to the integral clevis, single clevis and

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

Bore size (mm) Series Variations 16 20 25 32 40 50 63 80 100 125 2 Finger 4 Finger 3 Finger Series MHS2 Gripping of diverse workpieces P.544 Series MHS3 Axial gripping of cylindrical workpieces P. 552 Long stroke Series MHSL3 Accommodates a wide range of workpiece diameters P. 586 Series MHS4 Positioning of square workpieces P. 596 540 MHSL3 Long Stroke P. 586 Opening/Closing stroke more

VDW

3 0.4 0.1 Port size 4 0.2 0.05 Series 200 p p Port size Symbol 300 p p Note 1) Indicates the maximum operating pressure differential of pressure ports 2 and 3.

ZP

P Applicable tubing O.D.

5 Port Solenoid Valve SY Series

Combination of different fittings is possible. + + + + P EB EA Type 20P SY3 20 SY5 20 SY7 20 Bar stock type Flat ribbon cable P. 47 Body ported Base mounted A 26 pins MIL connector permits One-touch wiring of external cables in a bundle. P EB EA In common Type 23 Stacking type Individual wiring SY9 20 + + + + P. 43 EA P EB Manifold stations can be increased.

MXQ

Axial piping type (25): MXQ25L-P 17 40 11.5 79 Operating port 2-Rc 1/8 32 Other dimensions are the same as basic style. 20 8-5-39 40 Series MXQ External Dimensions of Adjuster Rubber Stopper (AS/AT) Extension End (mm) Body mounting section Stroke adjustment range (mm) Body mounting section Table mounting section A Applicable size Model P B C F G M D E P 1) H J K Q 1) A D MXQ-AS6(L) 5 16.5

Precision Cylinder Series MTS

MT-S16 16 Weights MT-S20 20 (g) MT-S25 25 End lock additional weight 50 157 222 400 547 1,000 1,533 Standard stroke (mm) MT-S32 32 Model 200 699 912 1,495 2,208 25 52 138 186 350 487 918 1,420 175 649 851 1,412 2,095 5 36 150 599 790 1,330 1,983 10 40 125 549 729 1,247 1,870 15 44 100 194 294 500 669 1,165 1,758 20 48 75 175 258 450 608 1,083 1,645 30 56 MT-S40 40 MTS8 MTS12 MTS16 MTS20

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P Supply valve: Self-holding type (R type) Release valve: N.C.

Title not found

p to r8 soenoids poss ble --!p to 24 soenords poss ble A, B port size (inch) A, B port size (metric) o3/8 Onelouch iitl ng o5l16' One touch fit n o3l8 Onerouch litl ng NPTF ] Manifold D-sub Connector Series Mounti OIN railmounl P . Tie-rod base | sssv fr roro E-EE .

SMC Pneumatic Clean Series

1.5 M26 x 1.5 M20 x 1.5 M10 x 1.25 M8 x 1.25 26-0.033 0 16 13 13 1/4 1/8 1/8 26-0.033 0 M10 x 1.25 32-0.039 0 8 10 M32 x 2 M14 x 1.5 With air cushion 2-NN WC GB Cushion valve (Width across flats 1.5) Relief port M5 x 0.8 WA GA GC Width across flats B2 2-P (Rc, NPT, G) WB Width across flats B1 H1 H2 I 2-Eh8 D MM AL A K H F 1.5 N1 1.5 N2 F NA ZZ + Stroke S + Stroke (mm) ZZ S P N2 I E D A 22

New

P G Port size Port size DIN terminal A B C D J K Q T I Cable 6 to 12 S 12.5 R 1/4 Exhaust port (44) U F G1/2 E H L G 2 x P Port size Dimensions (mm) Model Port size P A B C D E F G H I J K L S VXF24A< 80 118 23.5 62.5 39 16.5 30 2 136 112 112 78 185 40 Grommet Grommet (with surge voltage suppressor) DIN terminal Model Q R U Q R U 27 20 175 30 20 161.5 VXF24A< R U T 64.5 20 167 52.5 Q 13

MXS

Applicable Auto Switches /Refer to p.5.3-2 for further information on auto switch.

2-Color Display Digital Flow Switch Series PFM

Piping Specifications / Mass P . 921 Analog Output P . 921 Internal Circuits and Wiring Examples P . 921 Dimensions P . 922 Series PFM7 , PFM5 Common Specifications Pressure Loss / Flow Characteristics P . 930 Parts Description P . 931 Construction P . 931 PFM Detection Principle P . 931 PFMV Component Parts P . 932 PF2A Series PFM3 Flow Sensor Monitor PF2W How to Order P . 933 Specifications

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size (mm) Maximum operating tensile and compressive force (N) Allowable eccentricity (Umm) Rotating angle Basic type Standard/Thread nominal size JC20-8-125 JC30-10-125 JC40-14-150 JC63-18-150 0.5 0.5 0.75 1 300 800 1250 3100 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 20 25/32 40 50/63 5 Semi-standard/Thread nominal size JC20-8-100 JC25-10-150 JC32-10-100 JC40-12-125 JC40-12-150 JC40-12-175

Rotary Actuator/Vane Style Series CRB2

Applicable shaft types: J, K, T (mm) (mm) Q1 Q2 L2+(3 x P) L2+(3 x P) Size K axis (T axis) J axis Shaft type Shaft type T T J K J K Q1=M Size L1= L1+(3 x P) L2= 10 10 Not available Not available M3 M3 15 15 M3, M4 M3, M4 20 20 M3, M4, M5 M3, M4, M5 30 30 L2= Q2=M Q2=M M3, M4, M5 M3, M4, M5 40 40 Symbol: A37 The long shaft can be further shortened by machining it into a stepped round shaft

Electric Actuator

P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Details P P C D Connect between P and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this terminal. Regeneration option C D Connect the control circuit power supply.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft types: J, K, T (mm) (mm) L2 + (3 x P) L2 = L2 + (3 x P) L2 = Q1 Q2 Shaft type Shaft type J K T J K T Q1 = M Size Size L1 + (3 x P) L1 = 10 10 Not available Not available M3 M3 15 15 M3, M4 M3, M4 20 20 Q2 = M Q2 = M M3, M4, M5 M3, M4, M5 30 30 K axis (T axis) J axis M3, M4, M5 M3, M4, M5 40 40 Symbol: A37 The long shaft can be further shortened by machining it into a stepped