2–4

-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50

VDW

Model Port size P B B1 E F C D J K M Grommet Q R 20 VDW1 VDW2 M5 42.5 15 4 11 15.5 30 20 10 6 11 M2.5 M5, 1/8 52 5 15 17 36.5 22 11 8 13.5 M3 Body material Stainless Steel Grommet D 300 Q F Full wave rectifier (AC type) R E C A 2 x P Port size B B1 M 2 x J thread depth K (mm) Mounting method Electrical entry Model Port size P A B D E F B1 C J K M Grommet Q R 52 VDW1 VDW2 12 20 15 6 11 M2.5

CG5-S

A A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulphuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide B A A B B D 6 Sodium hydroxide (30%, Room temperature) Inorganic alkali A D C D A A 7 Calcium hydroxide A D A A C A 8 Magnesium hydroxide A B A A B A 9 Acetylene A A A A A A 10 Formic

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Note 2) Min. operating frequency is once in 30 days. Note 3) Based on dynamic performance test, JIS B 8375-1981.

IDU/IDF

Grommet with waist Power cord outlet Grommet with waist 6 to 12 B A B C C A A 240 240 65 65 30 30 30 30 C 70 70 40 40 50 50 50 50 A 240 240 30 30 50 50 50 50 B 38 38 32 32 45 45 45 45 Model IDU6D IDU8D IDU11C IDU15C IDU22C1 IDU37C1 IDU55C IDU75C B 38 38 50 50 45 45 45 45 C 70 70 49 49 50 50 50 50 Model IDF6D IDF8D IDF11C IDF15C IDF22C1 IDF37C1 IDF55C IDF75C Transformer box (1795) Power cord

Compact Manifold Regulator Series ARM5

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

CG5-S

A A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulfuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide B A A B B D 6 Sodium hydroxide (30%, Room temperature) Inorganic alkali A D C D A A 7 Calcium hydroxide A A A D C A 8 Magnesium hydroxide A A A B B A 9 Acetylene A A A A A A 10 Formic

Electric Actuator

is required. 7.5 40 Work load [kg] Work load [kg] 30 5 LEJS40;A LEJS40;A 20 AC Servo Motor Specific Product 2.5 10 0 0 0 200 400 600 800 1000 1200 0 200 400 600 800 1000 1200 Speed [mm/s] Speed [mm/s] LEJS63/Ball Screw Drive Horizontal Vertical 90 20 LEJS63;B LEJS63;B 80 70 Precautions LECS; 15 60 Work load [kg] Work load [kg] 50 10 40 LEJS63;A LEJS63;A 30 5 20 10 0 0 0 1200 200 400 600

Stopper Cylinder

D-X 571 B RSQ Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V 12 Hs B B A B B A 16, 20 B A Hs B Hs B A Hs B A Hs B A 32 to 50 A A B A A B A Hs D-A7 D-A80 D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F79F D-F7NT D-F7BA D-A73C D-A80C D-J79C D-A79W D-F7WV D-F7V D-F7BAV 16, 20 B A Hs B A Hs

Step Motor Driver （ Pulse input type ）

A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m Shield Cable color Terminal no.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Type A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 clamp B: 1pc. B 45 11 27 11.

Rotary Actuator/Vane Style Series CRB1

78 7.5 11 140 30 65 28 11.5 24.9 25 45 CRB1BW 100-E 38 38 For single vane: Above figures show actuators for 180 when B port is pressurized.

XM, XY

temperature XLA16A-30-1H XLA25A-30-1H XLA40A-30-1H XLA50A-30-1H XLA63A-30-1H XLA80A-30-1H XMC XYC General use XLC16-30-1 XLC25-30-1 XLC40-30-1 XLC50-30-1 XLC63-30-1 XLC80-30-1 High temperature XLC16-30-1H XLC25-30-1H XLC40-30-1H XLC50-30-1H XLC63-30-1H XLC80-30-1H XMD XYD XLD25-30-1 XLD40-30-1 XLD50-30-1 XLD63-30-1 XLD80-30-1 General use : Standard High temperature XLD25-30-1H XLD40-30-1H

A

Model Port size A B C D E F G H J K L M N P B B S Y M B O L S NAC1000 M5X0.8 91 84.5 25.5 25 26 25 33 20 4.5 7.5 5 17.5 16 38.5 86.5 NAC2000 18 14 140 125 38 40 56.8 30 50 24 5.5 8.5 5 22 23 50 120.5 NAC3000 38 181 156.5 38 53 60.8 41 64 35 7 11 7 34.2 26 70.5 182 NAC4000 12 238 191.5 41 70 65.5 50 84 40 9 13 7 42.2 33 88 217 NAC5000 34 300 271.5 48 90 75.5 70 105 50 12 16 10 55.2 40

VQZ1000/2000/3000

3 position pressure center Note) (A) 4 (B) 2 5 B C A 5 (R1) 1 (P) 3 (R2) A C B Note) Except VQZ1000 and metal seal type.

SMC Pneumatic Clean Series

Hs A 26 B D-H7A1/H7B Auto switch 8.5 16 approx. Hs A 29 B (mm) D-C73 A D-H7A1/H7B B Hs A B Bore size Hs 7 6 22.5 6 5 22.5 7 6 25 6 5 25 8 7 28.5 7 6 28.5 14 12 32.5 13 11 32.5 20 25 32 40 Note) The above values should be used as a guide for detection at stroke end.

39

0 D E E F G F 200.03 10 G 200.03 10 300.025 300.025 250.05 9 through 9 through H 300.025 300.025 I M61.0 H M61.0 150.03 150.03 I R45 500.05 6.5 6.5 18 10 30 3 10 3 18 R6 R6 R25 R25 19 19 19 19 Weight kg 0.5 0.6 0.7 Weight kg 0.5 0.6 0.7 NAAMS code ACA236M ACA237M ACA238M NAAMS code ACA246M ACA247M ACA248M A B C D E F G H I A B C D E F G H I Part no.

Series SV

A B A B COM PWR A A A A B B B B Cable with M12 connectors EX500-ACP. 15 Connection of sensors with M8, M12 connectors (auto switch, pressure switch, etc. A B A B COM PWR A A A A B B B B Cable with M12 connectors EX500-ACP. 15 Connection of sensors with M8, M12 connectors (auto switch, pressure switch, etc.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGZR Double Power Cylinder/ Without Non-rotating Mechanism Double Clevis Bracket DX B Z + Stroke DB DD 4 x DT B DS DH 4 x DR DA DU DU DL DC DE DO DO Bore size (mm) 22 22 30 30 45 45 60 DX DS DH Z DDH10 DC DT DU DR DO DL DE B DA DB Model 20 25 32 40 50 63 80 14 14 20 20 30 30 32 7 7 8 8 10 10 14 44 44 60 60 86 86 110 15 15 18 18 22 22 24 10 10 11.5 11.5 14 14 15 6.6 6.6 9 9 11 11 13.5 9 9

VS 8-2/VS 8-4

(A) 4 (B) 2 Flow-rate Characteristics 1 (P) 5 (R1) 3 (R2) 4, 2 5, 3 (A, B EA, EB) 1 4, 2 (P A, B) Flow-rate characteristics Series Response time (msec) Mass (g) 4-position dual 3-port valve Note) (A) Type of actuation Seal C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b (A) 4 (B) 2 140 140 170 170 185 185 185 185 185 185 170 225 215 260 250 285 275 285 275 285 275 250 0.30 0.50 0.30 0.50 0.30