New

Model Q R U T Q R 99.5 99.5 20 20 196 231 68.5 68.5 47.5 47.5 20 20 VXF25A< VXF26A< Q R U 196 231 23 23 20 20 202 237 U 16 Series VXF2 Dimensions: Flange type VXF25B<<B B A A C C U S S S J J z300 Q R I 1/2 Exhaust port 24.4 Q z300 1/2 Exhaust port K I R K 24.4 (Y) E H (X) L L H (X) E U (Y) Z Z DIN terminal B A C T Q J

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

1 u !0 (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double with back pressure check valve 2 position double 2 position double o t r e w y q !1 u !

Smooth Cylinder/Low Speed Cylinder

A U 32 to 100 D-A9 D-M9 D-M9W D-M9A D-A9V D-M9V D-M9WV D-M9AV 32 to 100 D-A7 D-A80 D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F79F D-F7NT D-A73C D-A80C D-J79C D-A79W D-F7WV D-F7V U B A 32 to 100 D-P3DW U B A 40 to 100 D-P4DW B A U Auto Switch Proper Mounting Position (mm) D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-A72/A7H/A80H D-A73C/A80C/F7 D-F79F/J79/F7V D-J79C/F7W D-J79W/F7WV Auto switch model

Fieldbus System

A 14 A B A 14 A B A B A 14 A B A 14 A B 2 3 A 14 U side D side PWR OUT 0 1 4 5 Mounting 2 3 B 12 B 12 B 12 B 12 B 12 PCI BUS IN BUS OUT Nil D D0 D3 Direct mounting DIN rail mounting (With DIN rail) DIN rail mounting (Without DIN rail) 8 7 1 2 3 4 5 Valve stations I/O Unit stations 1 2 For 3 stations Specify a longer rail than the standard length.

JXCx-OMT0023

B1 B1 Electromagnetic brake Electromagnetic brake lock lock Switch Switch 24VDC power supply for electromagnetic brake 24VDC power supply for electromagnetic brake VAR VAR U B or U B lock lock B2 B2 A surge absorber (VAR) must be installed between B1 and B2.

REA/REB

plated Chromium molybdenum steel Adjusting bolt B Magnet B u @4 Urethane rubber Carbon steel Nickel plated Hexagon nut Bumper i @5 Aluminum alloy Chromated Aluminum alloy Switch mounting rail Cushion seal holder o @6 Aluminum alloy Chromated With auto switch Auto switch Piston !

REA/REB

plated Chromium molybdenum steel Adjusting bolt B Magnet B u @4 Urethane rubber Carbon steel Nickel plated Hexagon nut Bumper i @5 Aluminum alloy Chromated Aluminum alloy Switch mounting rail Cushion seal holder o @6 Aluminum alloy Chromated With auto switch Auto switch Piston !

0.4

A B A B A B A B A B A 2 93.5 SZ 75 66 (40) 37.5 VF 4 x M4 mounting hole Manual release for switching connector direction Applicable connector: D-sub connector (26P) (Complies with MIL-C-83503) VP4 Stations n 1 2 3 4 5 6 7 8 U side D side C8: 8 One-touch fitting C8 [3(R) EXH port] VQ 1/2 DIN rail clamp screw R R 62.5 12 X 3 12 X 3 60 VQ 4/5 40.5 B B B B B B B B 25 P P 1 1 A A A A A A A A

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

B1 B1 Electromagnetic brake Electromagnetic brake Switch Switch lock lock 24 V DC power supply for electromagnetic brake 24 V DC power supply for electromagnetic brake or VAR VAR U B U B lock lock B2 B2 The surge absorber (VAR) must be installed between B1 and B2.

Aluminum High Vacuum Angle Valve

U type: DC only.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Order 300 S V7 S B 3 M2 LEFB 32 q w e r y t u i o !

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

R N / S P R I N G E X T E N D NC J2 NC J2 A U T O S W I T C H C A P A B L E N U M B E R O F S W I T C H E S Not Switch Capable D Switch Capable With Built-In Magnet 2 Pieces S 1 Piece n n Pieces M O U N T I N G B O R E S I Z E See NCJ2 Accessories Section A P P L I C A B L E A U T O S W I T C H B Basic L Axial Foot F Rod Side Flange D Double Clevis (Except for 6) 6 (1/4) 10 (3/8) 16 (5/8)

ZP

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

ISO Cylinder

M A B C D E F G H Max. screw-in depth P Allowable eccentricity U Max. operating tension and compression power [kN] Nominal thread dia.

10

A 24 VDC 5 Size 2 B E A B 4 N.C. Resin B C D E F G H J K L M N P Q R S T U V W 100 VAC Grommet 7 N.O. 110 VAC With surge voltage suppressor 200 VAC Size 3 C F A B 5 N.C.

Air Cylinder

8 @ B @ C Boss-cut Integrated clevis Spring extend t !2 u @1 y q !3 r !5 @0 !6 !0 i e o !4 !1 @ A !9 !8 @ B @ C !7 Boss-cut Integrated clevis Component Parts No.

Battery-less

2 A A @2 @0 @3 u !9 e o !1 !4 !5 !3 A-A B B @1 !8 B-B w Component Parts No. Description Material Note No.

LVQ

S) V C A B A B U D (Max.

5

U 32 to 100 D-A7l D-A80 D-A7lH D-A80H D-F7l D-J79 D-F7lW D-J79W D-F79F D-F7NT D-A73C D-A80C D-J79C D-A79W D-F7lWV D-F7lV U B A 32 to 100 D-P3DWA A B U Auto Switch Proper Mounting Position (mm) D-M9l/D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-A72/A7lH/A80H D-A73C/A80C/F7l D-F79F/J79/F7lV D-J79C/F7lW D-J79W/F7lWV Auto switch model D-A9l D-A9lV D-A73 D-A80 D-F7NT D-A79W D-P3DWA Bore size A B A