PSxx-OML0002CN

3 ISE30A -0.11 MPa Y ZSE30A 0-101 kPa ZSE30AF -100100 kPa K T 2 01 R1/8(M5) N01 NPT1/8 (M5) A1 A C4H 4mm5/32 inch C6H 6mm A2 B NH7 1/4 inch N7H A3 C C4L 4mm5/32 inch C6L 6mm B N7L 1/4 inch D + N NPN1 P PNP1 A NPN2 B PNP2 C NPN1+ D NPN1+ E PNP1+ F PNP1+ 1 L (2 m) 1 (2 m 1 G 1 M SI2 P (psi)1 1NP3 4 1 2kPaMPa -8No.PS-OML0002CN-G / A ZS-38-A1 (M35 L 2 ) B ZS-38-A2 (M35 L

NCQ8

5/8 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 3 3-1/4 3-1/2 3-3/4 1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/8 3 3-1/4 3-1/2 3-3/4 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 3-1/2 3-3/4 4 4-1/4 0.18 0.33 0.25 0.45 0.21 0.39 0.27 0.27 0.45 25 Series NCQ8 Mounting Bolt Size for NCDQ8B056 to 250-S (With Auto Switch) (Inch) Model C D Bolt size Model C D Bolt size NCDQ8B056-025S 037S 050S 062S

E-P HYREG ® Series VY1 1

0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

Series 10-, 21- AW-B Filter Regulator

8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1/8 1/8 1/8 1/8 1/8 M28 x 1 M38 x 1.5 M42 x 1.5 M42 x 1.5 26 29.4 37.3 37.3 43.3 Note) The dimension of C is the length when the filter regulator knob is unlocked. 1081 A 1021-AW K-B Regulator with Backflow Function Dimensions J J D M N T AW20K-B 1021Bracket (Option) S U Panel fitting dimension Air Preparation Equipment Pressure Control Equipment

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Refer to the table below for accessory/option combinations Thread Rc (PT) Table: Accessory/Option combinations Depending on model l Not available Available F G (PF) N NPT Accessories Options C C D -J -R D J T AMD150 R AMD250 AMD350 AMD450 Applicable models Accessories /Options Port size AMD550 AMD650 AMD850 01 B B 06 10 14 1 8 3 4 1B N.C. auto drain N.O. auto drain Drain guide 1/4B IN R

ZX

(For replacement) Individual spacer R1 ZF Phillips screw Adapter D (M2.5 x 28) Phillips screw M2.5 x 12 M2.5 x 12 Phillips screw How to order (1) Valve unit (Supply valve: Air operated) (For replacement) ZP Note 1) M5: Suffix -4, M6: Suffix -1 Note 2) M5: Suffix -1, M6: Suffix -2 Adapter D Note 1) ZCU Individual spacer R1 AMJ Adapter D individual spacer R1 assembly Assembly no.

Microspeed Cylinder

Switch Mounting mm (in) D-A9, D-F9WV D-F9P B, D-F9W D-A9V D-F9N D-F9V Number of auto switches 2 pcs. 15 (0.6) Note) 20 (0.80) Note) 10 (0.4) 10 (0.4) 5 (0.2) 10 (0.4) Note) 15 (0.6) Note) 20 (0.80) Note) 5 (0.2) 5 (0.2) 1 pc.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

8 10 10 12 12 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" -X214 Restrictor (Without check valve) With One-touch fittings Example) AS2002FS-04-X214 With indicator 10Clean Series 1 For selecting applicable tubing O.D., refer to the Model shown above. 2 Use 1/8" tubing.

PSxx-OMS0006CN

-100.0100.0 kPa T 2 N NPN1 P PNP1 A1 A M SI*2 () P (psi)*1 1 2kPaMPa A2 B () M5 M5 M5 B 01 R1/8 N01 NPT1/8 D + 1 L 2m -8No.PS-OMS0006CN-G / A ZS-46-A1 3X8L (2 ) B ZS-46-A2 3X8L (2 ) ZS-46-B + ZS-46-D ZS-46-3L 3 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch ZS-46-N7H 4mm ZS-46-C4L 6mm ZS-46-C6L 1/4 inch ZS-46-N7L -9No.PS-OMS0006CN-G LCD LCD

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

AKH/AKB Series Check Valve with One-touch Fitting

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

fitting Applicable series Type of actuation SY3000 2 position single (A) 4 (B) 2 1 SY5000 5 (EA) 3 (EB) 1 (P) 2 position double (A) 4 (B) 2 2 SY7000 5 (EA) 3 (EB) 1 (P) 3 position closed center (A) 4 (B) 2 3 Manual override 5 (EA) 3 (EB) 1 (P) 3 position exhaust center Nil: Non-locking push type E: Knob locking type D: Slotted locking type (A) 4 (B) 2 4 5 (EA) 3 (EB) 1 (P) 3 position pressure

CJ2X/CUX/CQSX/CQ2X/CM2X

Warning CE2 1. Do not rotate the cover. When installing a cylinder or screwing a pipe fitting into the port, the coupling portion of the cover could break if the cover rotated. Auto switch model Bore size (mm) 20 32 40 25 ML2B BM2-032 BM2-040 BM2-020 BM2-025 D-C7/C8, D-H7 D-B5/B6, D-G5 D-A3A/A44A, D-G39A/K39A Caution BA2-032 BA2-040 BA2-020 BA2-025 C J G5-S BM3-032 BM3-040 1.

CJ2X/CUX/CQSX/CQ2X/CM2X

Warning CE2 1. Do not rotate the cover. When installing a cylinder or screwing a pipe fitting into the port, the coupling portion of the cover could break if the cover rotated. Auto switch model Bore size (mm) 20 32 40 25 ML2B BM2-032 BM2-040 BM2-020 BM2-025 D-C7/C8, D-H7 D-B5/B6, D-G5 D-A3A/A44A, D-G39A/K39A Caution BA2-032 BA2-040 BA2-020 BA2-025 C J G5-S BM3-032 BM3-040 1.

PSxx-OMH0002CN

()FSC SET 5R.D. 1 digit UP 1 UP 1 DOWN 1 DOWN 1 UP DOWN 1 SET 4 LoCUnL UP DOWN SET LoC SET 4 UnL -23No.PS-OMH0002CN-D 0 7F.S.0 (01 digit) UP DOWN 1 -24No.PS-OMH0002CN-D (2030) -25No.PS-OMH0002CN-D ISE70/ISE75(H) ISE70/ISE75(H) ISE70/ISE75(H) ISE70/ISE75(H) () 1 ON ON OFF Yes No 2 OFF ON 1 OFF 3 4 5 -26No.PS-OMH0002CN-D 6 Yes No 7 7 8 9 10 11 12 13 14 15 -27No.PS-OMH0002CN-D

PS-OMH0005CN

-2No.PS-OMH0005CN-D 1 1.5 3) *3) 1 1 () -3No.PS-OMH0005CN-D () () -4No.PS-OMH0005CN-D ( ) * (10 10 ) * (13 ) FG (50N 25N ) -5No.PS-OMH0005CN-D *() 6 33 2 () () 10m DC(-)() * ( ) ( ) CE -6No.PS-OMH0005CN-D -5~50 * ON , 20~30 1% 18~27 LCD * -7No.PS-OMH0005CN-D PSE20 2 0 NPN5 + 1 PNP5 + 4C (4 ) 1 A B + 1 M SI 2 1 2 kPa MPa / ZS-26-A 2 m ZS-28-C 1 ZS-26-B (M38L 2

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

, D-F9WV D-M9 , D-F9W D-A9V D-F9V D-M9N B P D-F9BA No. of auto switches 15 20 25 10 10 5 2 10 15 20 25 5 5 1 Consult P/A for shorter stroke lengths than indicated in the table.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006