CYPSeries

-01-06-X214 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 1.

EXxx-OMW0014CN

8 error 0Module 8 1Module 8 Valve diagnostics 1 . 5-4 Valve diagnostics 1 Bit 0 Valve 0, 1 diagnostics 01 1 Valve 2, 3 diagnostics 01 2 Valve 4, 5 diagnostics 01 3 Valve 6, 7 diagnostics 01 4 Valve 8, 9 diagnostics 01 5 Valve 10, 11 diagnostics 01 6 Valve 12, 13 diagnostics 01 7 Valve 14, 15 diagnostics 01 Valve diagnostics 2 . 5-5 Valve diagnostics 2 Bit 0 Valve 16, 17 diagnostics

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Mounted Type Common SUP, Common EXH Type 40/for base mounted type (Port A bottom ported) How to Order Applicable solenoid valves VKF334VV3KF3-40 05 01 Applicable blanking plate assembly VK300-42-1A Option Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Valve stations None With bracket (not mounted) Nil 1 station 01 Bracket VK300-43-1A F 20 stations 20 Port A: Rc(PT) 1/8 Port size 01 Rc(PT) 1/8 Type

HRX-OM-R028

signal 2 type ALT (-)1 Contact input/output communication Contact input signal 2 delay timer (time delay) of reading ---(0) 1 Contact input signal 2 OFF detection timer ---(0) 1 Contact output signal 1 function RUN 2.4 Contact output signal 1 operation A Contact output signal 1 selected alarm ---(AL.01) 1 Contact output signal 2 function RMT Contact output signal 2 operation A Contact output

HRX-OM-S010

HRX-OM-S010 Chapter 1 Read before using Contents Chapter 1 Read before using . 1-4 1.1 Communication mode and operation method . 1-5 1.2 Communication port . 1-6 1.3 Key operations . 1-7 1.4 Parameters . 1-9 Chapter 2 Contact input/output communication . 2-1 2.1 Precautions for communication . 2-1 2.1.1 Precautions wiring communication . 2-1 2.1.2 Precautions after wiring and before communication

HRX-OM-Q033

HRX-OM-Q033 Contents Contents Chapter 1 Read before using . 1-1 1.1 Communication mode and operation method . 1-2 1.2 Communication port . 1-3 1.3 Key operations . 1-4 1.4 Parameters . 1-6 Chapter 2 Contact input/output communication . 2-1 2.1 Precautions for communication . 2-1 2.1.1 Precautions wiring communication . 2-1 2.1.2 Precautions after wiring and before communication . 2-1 2.2

HRX-OM-M091

(time delay) of reading 0 Contact input signal 2 OFF detection timer 0 2.4 Contact output 1 function RUN Contact output 1 operation A Selected for contact output 1 AL.01 Contact output 2 function RMT Contact output 2 operation A Selected for contact output 2.

HRX-OM-T004

HRX-OM-T004 Contents Contents Chapter 1 Read before using . 1-1 1.1 Communication mode and operation method . 1-2 1.2 Communication port . 1-3 1.3 Key operations . 1-4 1.4 Parameters . 1-6 Chapter 2 Contact input/output communication . 2-1 2.1 Precautions for communication . 2-1 2.1.1 Precautions wiring communication . 2-1 2.1.2 Precautions after wiring and before communication . 2-1 2.2

Valve Single Unit

How to Order Valves 01 5 MOZ N SX 5 1 20 Thread type Series A/B port size Thread piping Nil Rc 3 SX3000 5 SX5000 G F N NPT Symbol Port size M5 x 0.8 Applicable series Rated voltage 7 SX7000 NPTF T M5 SX3000 SX5000 SX7000 5 24 VDC 6 12 VDC 1 8 1 4 01 02 Type of actuation One-touch fitting (Metric size) 1 2 position single 2 2 position double Common specifications Symbol Port size Applicable

H/DL/L/LL

(mm) M Effective area (mm 2) Weight (g) A L2 L1 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 DL04-01 15 3.5 23 DL04-02 17 19 4 10 23.5 19.6 10 30 DL06-01 25 17 Applicable tubing 19.6 10 23.5 DL06-02 16 19 31 14 6 9 12 DL06-03 22 53 26.5 24.5 21.6 22.6 24.5 25.8 24.5 29.4 29.6 30.3 29.4 91 Reference dimensions after R thread installation.

HRX-OM-W002

output signal 1 function RUN 1 D.OUT1 SEL 5.5.5 No.13 screen Contact output ignal 1 operation A A/B D.OUT1 TYPE No.14 screen Contact output signal 1 alarm AL.01 AL.01AL.32 D.OUT1 ALARM CODE No.15 screen Contact output signal 1 maintenance MT.01 MT.01MT.05 D.OUT1 MANT CODE No.16 screen Contact output signal 2 function RMT 1 D.OUT2 SEL No.17 screen Contact output signal 2 operation A

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF ASV220F-U10/32 1.3 1.3 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

Table of Contents

VQ1 3 C6 Y 5 0 1 D-sub connector kit with 3 m cable VV5Q13-08FU2 1 set Manifold base no. VQ1130-5-C6 4 sets Valve part no. (Stations 1 to 4) VQ1230-5B-C64 sets Valve part no.

Serial Network

Assumptions 1. Allen-Bradley PLC 1747-L524, list price: $770 as of 10/01 2. Allen-Bradley I/O card 1740OB, list prices: $280 as of 10/01 3. Allen-Bradley Scanner module 1747 SN, list price: $995 as of 10/01 4. Wiring costs are estimated at $10/point and $100/node for SI system. Your costs may vary. 5.

,

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

Clean Room Rodless Cylinder Series CYP ø15, ø32

Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 1.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

= 50 [mm] D-X L2 L1 20Data Item Load factor n Note 1.

Vacuum

9P Applicable lube O D oP t'j oA l:M5x0 8 l:[t6x1 . gL D E D I E R(FB 6 7 2 5 20 25 71 5 3 3 9.1 4 I I 4 7 1 0 . 1 Tube Applicable tube o.D. 6P R sS q4 4 20.615.61 0 . 4 s6 6 2 1 . 6 16.6 12.8 Tube Applicable tube O.D o P o4 4 1 5 . 8 1 1 0 . 4 s6 6 24.316.81 12.8 Pad Diameters o1O. @13. @16 68 I 18.7 | 15.2 Bellows type Pad Diameters @4O. @5O Fr4q!

Vacuum

9P Applicable lube O D oP t'j oA l:M5x0 8 l:[t6x1 . gL D E D I E R(FB 6 7 2 5 20 25 71 5 3 3 9.1 4 I I 4 7 1 0 . 1 Tube Applicable tube o.D. 6P R sS q4 4 20.615.61 0 . 4 s6 6 2 1 . 6 16.6 12.8 Tube Applicable tube O.D o P o4 4 1 5 . 8 1 1 0 . 4 s6 6 24.316.81 12.8 Pad Diameters o1O. @13. @16 68 I 18.7 | 15.2 Bellows type Pad Diameters @4O. @5O Fr4q!

SMC Electronic Switch Series Variations

ISA11-4L-01BG ZSE2 ISE2 ISA15-1-01G ZSP ISl ZSM Accessories (Optional) PFl Bracket ISA-1-A Gauge G33-3-01 DIN rail ISA-2-1 to 7 IFl Gauge/G33-3-01 Bracket /ISA-1-A DIN rail/ISA-2-1 to 7 Material: SPC (Nickel plated) Material: Aluminum 10 hex. 100 110 q w e r t L 90 10 25 5 4-4.5 7.5 30 R1/8 34 42 28 4.5 35 27 9 16.5 13 5.6 L Applicable model Part No. 105 140 175 210 245 280 315 Description