LVQ

T) View Z (mm) Dimensions A B C D M N S T U V Model LVQ20-S-3 LVQ30-S-3 LVQ40-S-3 LVQ50-S-3 LVQ60-S-3 25.5 46 31.5 58 7 15 83 35.3 10.6 7 23.5 47 29.5 59 7 15 113.5 36.9 16.5 10 23.5 47 29.5 59 7 20 119 37.9 22 35 70 41 82 7 20 171.5 64 25 17 35 70 41 82 7 20 182.5 66 32 With indicator, High back pressure spec. with indicator N.C. valve Dimensions (mm) S Model LVQ20-S-4 LVQ30-S-4 LVQ40-

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

0.43 0.73 0.63 0.73 0.2 JSX21-S Cm503 320 360 7.1 3.15 0.44 0.88 0.76 0.88 0.1 JSX21-S Cm703 320 360 3/8 1/4 4.0 2.02 0.48 0.52 0.45 0.52 1.0 JSX31-S Cm402 450 490 5.6 2.62 0.43 0.73 0.63 0.73 0.5 JSX31-S Cm502 450 490 7.1 3.15 0.44 0.88 0.76 0.88 0.2 JSX31-S Cm702 450 490 30 3/8 4.0 2.02 0.48 0.52 0.45 0.52 1.0 JSX31-S Cm403 450 520 5.6 2.62 0.43 0.73 0.63 0.73 0.5 JSX31-S Cm503 450 520

NCQ8

100 (1") 3.37 5.22 9.32 15.8 22.7 30.3 125 (1 1/4") 4.43 6.00 12.9 21.1 24.3 32.0 150 (1 1/2") 4.71 6.42 13.6 22.2 25.9 33.6 175 (1 3/4") 5.00 6.84 14.4 23.3 27.5 35.2 200 (2") 5.28 6.27 15.1 24.3 29.1 36.8 NCDQ8056-S NCDQ8075-S NCDQ8106-S NCDQ8150-S NCDQ8200-S NCDQ8250-S Product,s Weight (Single Acting, Spring Return, With Auto Switch, Super Compact) (OZ) 012 (1/8") 025 (1/4") 2.14 3.37

NCQ8

075 (3/4") NCQ8B075-S-PS 106 (1-1/16") NCQ8B106-S-PS Piston seal is included. 150 (1-1/2") NCQ8B150-S-PS 200 (2") NCQ8B200-S-PS 250 (2-1/2") NCQ8B250-S-PS With auto switch Here is the typical, cross-sectional construction.

Series H, DL, L, LL Self-align Fittings

L-04 L-06 N-04 N-06 LL-04 LL-06 S-04 S-06 4 6 L-08 8 L-10 10 L-12 12 4 6 N-08 8 N-10 10 N-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 4 6 S-08 8 S-10 10 S-12 12 0.7 1.1 1.4 1.7 2.0 Precautions Be sure to read before handling. Refer to Air Fittings & Tubing Precautions for other details. Installation Caution Cut the tube to the required length.

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

HRX-OM-O021

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-O021 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

KG

Note 2) Suffix S to the part number, if w/ seal is desired.

SYJ3000/5000/7000

pressure center For AC voltage valves there is no S option.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS1001FG-04-X21 Note) Not particle-free Throttle Valve (Without Check Valve) X214 Ex.) AS1001FG-04-X214 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

(N specifications) AS4200-04 How to Order 01 S AS 2 2 0 0 AS3200-03 Body size AS2200-02 1 2 3 4 M3, M5 standard AS1200-M5 AS2200-01 Made to Order Refer to page 523 for details. 1 8 1 4 , standard standard standard 8 3 2 1 Lock nut option Type J Hexagon lock nut Round lock nut Nil AS1200-M3 Direct cylinder elbow type 2 Option AS1400-M3 Direct cylinder flat elbow type 4 Nil None With seal S

Series VS

, 2 SU0 No option 04 1/2 Size 1, 2 SUQW DeviceNet serial interface (Note) 06 3/4 Size 2, 3 10 1 Size 3 TU1 Terminal Box Note: Please ask available protocol to SMC Conduit Port Thread (for terminal box only) Symbol Port Thread NIL Rc (PT) F G (PF) N NPT T NPTF Locations and sizes of port 4(A), 2(B) Symbol Port location Applicable ISO size 02 Side 1/4 Size 1 03 Side 3/8 Size 1, 2 04 Side

HRX-OM-W058

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-W058 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-X027

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-X027 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

T) LVQ LQ (mm) Dimensions PB LVN T U Model LVD2-S LVD3-S LVD4-S LVD5-S PA 28 9.6 TI/ TIL 34 17.5 A B 35 20 U PA 57 25 PAX With flow rate adjustment & by-pass PB (Max. S) (Max.

Plug-in/Plug Lead: Single Unit

How to Order Sub-plates 04 P VQ5000 Electrical entry Port size Replacement of pilot valve assembly (Voltage) Refer to pages 2-6-40 to 2-6-41 for pilot valve assembly part numbers. Refer to page 2-6-3 for replacement method. 04 Rc 1/2 Porting specifications P S Plug-in conduit terminal Plug lead Note1) For bottom ported, port size is Rc 1/2.

VXP21/22/23

Table(2) Rated Voltage-Electrical Entry-Electrical Option PAX Table(1) Connection Size and Applicable Model Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G C D, T G, C T PB S L, Z S L, Z S Note ) Connection Applicable model VXP2130-02 VXP2130-03,VXP2140-03 VXP2130-04,VXP2140-04 VXP2150-06

REA/REB

speed of 600mm/s.

Modular Type Filter Regulator Series AW

Metal bowl Metal bowl with level gauge Metal bowl Optional specifications B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S Accessory specification Standard specification Panel mount With auto drain With pressure gauge Bracket mounting size Port size Model C 48 73 86 92 93 A 25 40 53 70 75 D 25 52 59

Modular Type Lubricators Series AL

Y M B O L S H O W T O O R D E R L U B R I C AT O R S E R I E S NAL NAL800-N12 (1 14 NPT) NAL800-N14 (1 12 NPT) NAL900-N20 (2 NPT) T E C H N I C A L SPECIFICATIONS D I M E N S I O N S L U B R I C AT O R NAL800 NAL900 Max Supply pressure 1.5MPa / 220PSI Max Operating Pressure 1MPa / 145PSI Operating Temp Range 5~60C /40~140F Recommended lubricant Turbine oil #1 (ISO VG32) Bowl Polycarbonate