Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Body Size: 5 (3/8 Basis), Thread: N (NPT), Port Size: 02 (1/4), Applicable Tube OD: 11 (Ø3/8"), Sealant: S (Sealant), Lock Nut: J (Round)

Body Size: 5 (3/8 Basis), Thread: M5 Metric/10-32UNF/R(PT), Port Size: 03 (3/8), Applicable Tube OD: 10 (Ø10 mm), Sealant: S (Sealant), Lock Nut: J (Round)

Body Size: 5 (3/8 Basis), Thread: N (NPT), Port Size: 02 (1/4), Applicable Tube OD: 07 (Ø1/4"), Sealant: S (Sealant), Lock Nut: J (Round)

Body Size: 5 (3/8 Basis), Thread: N (NPT), Port Size: 03 (3/8), Applicable Tube OD: 07 (Ø1/4"), Sealant: S (Sealant), Lock Nut: J (Round)

Body Size: 5 (3/8 Basis), Thread: N (NPT), Port Size: 03 (3/8), Applicable Tube OD: 11 (Ø3/8"), Sealant: S (Sealant), Lock Nut: J (Round)

Body Size: 5 (3/8 Basis), Thread: M5 Metric/10-32UNF/R(PT), Port Size: 03 (3/8), Applicable Tube OD: 08 (Ø8 mm), Sealant: S (Sealant), Lock Nut: J (Round)

Body Size: 5 (3/8 Basis), Thread: N (NPT), Port Size: 02 (1/4), Applicable Tube OD: 09 (Ø5/16"), Sealant: S (Sealant), Lock Nut: J (Round)

Body Size: 3/8 Basis, Thread: NPT, Port Size: 1/4, Applicable Tube OD: Ø1/4", Sealant: Sealant, Lock Nut: Round

Body Size: 3/8 Basis, Thread: NPT, Port Size: 1/4, Applicable Tube OD: Ø5/16", Sealant: Sealant, Lock Nut: Round

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 3/8, Types of Screw: R, Applicable Tube O.D. mm(mm): 8, Applicable

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 3/8, Types of Screw: R, Applicable Tube O.D. mm(mm): 10, Applicable

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/4, Types of Screw: NPT, Applicable Tube O.D. mm(mm): -, Applicable

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 3/8, Types of Screw: NPT, Applicable Tube O.D. mm(mm): -, Applicable

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 3/8, Types of Screw: NPT, Applicable Tube O.D. mm(mm): -, Applicable

VCC

mountable number 3 port valve mountable number 00 02 04 00 02 04 No 2 port valves used 2 pcs.

Common Supply Regulator

Domensions Plate thickness AR20M/30-MD: Max.3.5 AR40-D: Max.5 Dimensions Optional specifications Round type pressure gauge (Semi-standard:Z) Round type pressure gauge (with color zone) Standard specifications Round type pressure gauge Model P1 P2 P3 A BNote 1) C D F J K L1 H J H J H J AR20M-D 1/81/4 1/8 1/81/4 40 66.8 26.5 21 M28X1 26 2 9 37.5 62.5 37.5 63.5 37.5 63.5 AR30M-D 1/43/8 1/8 1

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

Series VCL

J L Bracket part no.