AS

Length 38 62 72 90 104 114 135 140 78 111 119 147 179 191 236 277 Flat washer Hexagon nut AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 AS-31B AS-32B AS-33B AS-34B AS-35B AS-36B AS-37B AS-38B AS-41B AS-42B AS-43B AS-44B AS-45B AS-46B AS-47B AS-48B AS1002F-01 AS1002F-03 AS1002F

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

AMP

screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

21- AF-A 10- Series Air Filter

Air Filter Series 1021AF-A How to Order * "J" must always be selected. Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard:Selectoneeachfora to e. Option/Semi-standardsymbol:Whenmorethanonespecificationisrequired,indicateinalphanumericorder.

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Bore size (mm) 32, 40 50, 63 80, 100 Bore size (mm) 32 40 50 63 80 100 Mounting bracket BT-03 BT-05 BT-06 (1) MB-L03 MB-L04 MB-L05 MB-L06 MB-L08 MB-L10 Foot A set of following stainless steel mounting screws is attached. (A mounting bracket itself is not attached. Please order it separately.)

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

How to Order 1 F 06 3 200 AS Flow Direction Symbols on Body Hexagon lock nut Round lock nut J Nil Lock nut option Body size Indication symbol Panel mount type Symbol 100 200 205 300 400 M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Made to Order Refer to page 622 for details. Applicable tubing O.D.

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Digital Flow Switches Series PF2A

Pin description Load is an analog input equipment such as a voltmeter, ammeter. 1 DC(+) PF2A7H-(-M) 68 69 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30 V 80 mA or less OUT1 Load Black H 0 V or Blue 50 msec 50 msec PF2A7H-(-M) 28 29 A B C D E F G H I J Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc1, NPT1, G1 36 M5 x

Digital Flow Switch Series PFA For Air Series PFW For Water

40 Max. 30V 80mA or less OUT1 Black Load ON H OFF Blue 50msec PFA7H-(-M) 28 29 B C D E F G H I J A Model Brown PFA703H PFA706H PFA712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 1 1/2, NPT 1 1/2, G 1 1/2 46 M6 x 1 9 ON OFF 75 220 55 114 89 75 Rc 2, NPT 2, G 2 56 M6 x 1 9 50msec PFA7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mADC 5 20 Analog

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 0 (Meter-out), Thread Type: R, Port Size: M5 (M5 x 0.8), Applicable Tubing O.D.: 06 (ø6), Seal Method: w/o Sealant, Option: Electroless Nickel Plating, Lock Nut Option: J (Round Lock Nut)

Body Size: 2 (M5 Basis), Thread: M5 Metric/10-32UNF/R(PT), Port Size: M5X0.8, Applicable Tube OD: 06 (Ø6 mm), Sealant: None, Lock Nut: J (Round)

VS7-6

Unit 1 4 3 8 Individual SUP spacer with residual pressure release valve VAW-M (Adaptor plate, filter with manual drain cock, regulator) 02: 03: VV71-PRAir filter with manual drain Regulator Pressure switch IS3100-X230 (2-M5 X 12) Double pilot check spacer with residual pressure release valve VV71-FPGR Air release valve Pressure switch Manifold/Applications Blank plate (Air release valve)

Body Size: 5 (3/8 Basis), Thread: M5 Metric/10-32UNF/R(PT), Port Size: 03 (3/8), Applicable Tube OD: 06 (Ø6 mm), Sealant: S (Sealant), Lock Nut: J (Round)

Body Size: 4 (1/4 Basis), Thread: M5 Metric/10-32UNF/R(PT), Port Size: 02 (1/4), Applicable Tube OD: 06 (Ø6 mm), Sealant: S (Sealant), Lock Nut: J (Round)

Body Size: 3 (1/8 Basis), Thread: M5 Metric/10-32UNF/R(PT), Port Size: 01 (1/8), Applicable Tube OD: 06 (Ø6 mm), Sealant: S (Sealant), Lock Nut: J (Round)

Body Size: 5 (3/8 Basis), Thread: M5 Metric/10-32UNF/R(PT), Port Size: 02 (1/4), Applicable Tube OD: 06 (Ø6 mm), Sealant: S (Sealant), Lock Nut: J (Round)

Body Size: 40, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: 06 (3/4), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: 2J (2 + J), Semi-Standard 2: Standard

Body Size: 40, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: 06 (3/4), Option: B (Bracket), Semi-Standard 1: 2J (2 + J), Semi-Standard 2: Standard