End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

(N) CXS 1 mm or less Non-locking style, Locking style Back rush Manual release CXT Allowable Kinetic Energy MX 20 25 32 40 Bore size (mm) Allowable kinetic energy (J) Rubber bumper MXU 0.27 0.4 0.65 12 Effective cushion length(mm) 11.0 11.0 11.0 11.8 MXS Air cushion Cushion sectional area(cm2) 2.09 3.30 5.86 9.08 MXQ Absorbable kinetic energy J 0.54 0.78 1.27 2.35 MXF Standard Stroke Long

VXP21/22/23

Normally open Normally closed Model Grommet Electrical entry Conduit Conduit terminal Bracket H F E D C B f M L K J A e 57 62 67 b 39 45.5 49.5 Q 39 39 41.5 Q 23 23 25.5 N 61 (68) 69 (76) 79 (89) d 47 52 57 a 34 51 58 N 69 (76) 77 (84) 87 (97) N 61 69 79 c 65 78 86 Q R 57 74 81 VXP2142 , 30 30 35 20 20 23 34 43 47 29 37 43 28 35 40 3 8 8 63 80 90 59 59 62 104 (116) 118 (136) 133 (150) 26

C95

Bore size (mm) CP95 Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht NCM 32 23 30 23 26.5 23 25.5 27.5 77 27.5 67 25 32.5 24.5 35 31 38 40 26 34 26 30 26 29.5 27.5 81.5 27.5 71.5 27.5 36.5 27.5 38.5 33 42 NCA 50 31 38 31 34.5 31 33.5 87 77 34 41 34.5 43.5 39 46.5 63 36 43 36 40 36 39 93.5 83.5 39 46 39.5 48.5 44 51.5 D80 45 52 45 48.5 45 47.5 103 92.5 46.5 52.5 46.5 55 51.5 58 100 53.5

Air Pilot Operated Series NVSA

DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 A XLS Series Dimensions XLS/Without control power supply D Lead wire AWG20, O.D.: 2.63 mm E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT

LX

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

MHS

J)3-40DA MHSH(J)3-40DB M50.8 3.2 10 MHSH(J)3-50DA MHSH(J)3-50DB M61 7.3 12 MHSH(J)3-63DA MHSH(J)3-63DB M81.25 18 16 MHSH(J)3-80DA MHSH(J)3-80DB M81.25 18 16 10 MHSJ3MHSH(J)3 MHS2 Nm MHSJ3-16D MHSH3-16D M30.5 0.88 Nm MHSJ3-20D MHSH3-20D M30.5 0.88 MHS2-16D M30.5 0.88 20D M30.5 0.88 MHSJ3-25D MHSH3-25D M30.5 0.88 25D M30.5 0.88 MHSJ3-32D MHSH(J)3-32D M40.7 2.1 32D M40.7 2.1 40D M50.8 4.3 MHSJ3

SZ3000

Stations are counted starting with station 1 on D side. 60P Flat cable type (26 pins) Without power supply terminals With power supply terminals Positive common Negative common Common 26 26 26 Pos. pin Pos. pin (common) 25 25 25 SOL.B 24 24 Neg. pin (common) Neg. pin Station 12 24 23 23 SOL.A 23 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor

MLGP

Data Common Dimensions: MLGPM/MLGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) GC ID IE IF IG IH J JA 80 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 139.5 56.5 22 25 61 91.5 15.5 14.5 18 202 240 M12 M14 43 1.5 110 137 18.5 23 7.5 11 30 50 5.5 5.5 Rc 1/8 Rc 1/4 7 15 54.2 45.5 38 45 25 30 19 23 50, 75, 100, 125, 150

1

Auto Switch Proper Mounting Position [mm] Auto Switch Mounting Height [mm] Auto switch model Auto switch model D-M9m(V) D-M9mW(V) D-M9mA(V) D-M9m D-M9mW D-M9mA D-M9mV D-M9mWV D-M9mAV Bore size Bore size A B 20 4 8.5 25 4.5 9 32 4.5 9.5 40 7 12 Hs1 Hs2 Hs1, Hs2 Hs1 Hs2 20 16.5 17 17 23 17 25 19 19.5 19.5 25.5 19.5 32 22.5 23 23 29 23 40 26.5 27 27 32.5 27 * Adjust the auto switch after confirming

MLGP

Data Common Dimensions: MLGPM/MLGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) GC ID IE IF IG IH J JA 80 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 139.5 56.5 22 25 61 91.5 15.5 14.5 18 202 240 M12 M14 43 1.5 110 137 18.5 23 7.5 11 30 50 5.5 5.5 Rc 1/8 Rc 1/4 7 15 54.2 45.5 38 45 25 30 19 23 50, 75, 100, 125, 150

1

9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D F G Applicable cable O.D.: 6 to 12 F G Width across flats 22 G1/2 32 (44) H 31.5 25 C H C G1/2 J J Dimensions [mm] Model A B Bs C D E F L M P [inch] Grommet: G Grommet: GS Conduit: C Flat terminal: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-2S 22 55 24 63 30 8.5 20 3 8 1/4 27 53.5 30 40 47.5 47.5 23 53.5 64.5 45.5

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Thermo-chiller

Heat generation amount by customer equipment Q : Unknown [W] ([J/s]) Circulating fluid : Tap water*1 Example of conventional units (Reference) Circulating fluid mass flow rate qm : (= x qv 60) [kg/s] Circulating fluid density : 1 [kg/L] Circulating fluid (volume) flow rate qv : 35 [L/min] Circulating fluid specific heat C : 4.186 x 103 [J/(kgK)] Circulating fluid outlet temperature T1

240

Hard anodized Chromated Countersunk head screw Nut Rod seal Piston seal Gasket Plug Nickel plating Nickel plating Zinc chromated D-X 23 MXH Series Dimensions: 6 LT 9 15 LA LB 8 J x M3 x 0.5 Depth 5 3 x M4 x 0.7 through Pilot hole dia 3.3 2 x 3 x 6 counterbore depth 3.3 2 x 2 x M5 x 0.8 Cylinder port (With plug for port) 4 x M3 x 0.5 Depth 5.5 2 x M5 x 0.8 Cylinder port 4 x M3 x 0.5 Depth

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

J 6 6 8 8 10 K 11 8 10 15 16 L 57 66 70 80 92 P (Piping port) Model Mounting nut/Included in the package (2 pcs).

Air preparation filter

391.5 379.5 382 31.5 144 136 68 23 40 AFF,AM,AMD 80D 1 1/2 404 392 394.5 38 170 160 80 23 40 AFF,AM,AMD 90D 1 1/2 2 470 458 460.5 38 170 160 80 23 40 Model Bracket related dimensions H I J K L M N O P AFF,AM,AMD 70D 124 82 48.4 90 18 9 16 10 2.6 AFF,AM,AMD 80D 148 93.5 58.5 110 22 11 20 12 3.2 AFF,AM,AMD 90D 148 93.5 58.5 110 22 11 20 12 3.2 -22- Doc. no.

Lubrication Equipment

AMR AWM How to Order AWD AL 23 80 12 0 R ITV AL800 Optional specification Flow direction: Right to left R VBA AL900 Lubricator Body size Port size Options VE 1 1S-1 1S-2 2 3 6 8 . When specifying more than one option, please list alphabetically.

Sine Rodless Cylinder Series REBR Direct Mount Type

Dual axis type/REBHT LL 138 4-M thread depth MM PA XB PB 2-Rc 1/8 LW S + Stroke EB EA HC HP NL HG HT HA H HB NT PP PS N A Z + Stroke W Square nut for body mounting J TW (mm) Model A EA EB H HA HB HC HG HP HT J LL LW M MM N REBHT25 REBHT32 125 28.5 79 63 46 46 61.5 19.5 58.5 35 M6 x 1.0 56 119 M6 x 1.0 10 20.5 30 90 75 52.5 57.5 72.5 25 69.5 43 M8 x 1.25 63.5 130 M8 x 1.25 12 23 132.5 Model

ML2B

A G G 2-PA (Hexagon socket head taper plug) I F B + Stroke 2-PA (Port for operating cylinder) J J J J D D 2-PB 2-PB 2-MB, Depth LB II II (Hexagon socket head taper plug) (Hexagon socket head taper plug) J J 28 32 36 G 30 37 45 J 40 46.5 55 DD 11 15 16.5 A 110 140 170 H 73 88 106 EE 14.5 16 22 K 46 58 68 FF 63.5 77.5 95 L 45.5 54 64 GG 22 27 35 M 30.9 32.4 41.4 HH 24 32 37 N 16 15 19 O 69