Vacuum

See example on page 14. 0 1 ^ oo7 J 005 fl o.oe E ,* c', 001 .F o.ooz d0.005 _a z I z 0.003 0.002 I it E 0 001 0.0007 0.0005 0 . 2 0 . 3 0 5 0 . 7 I 2 3 5 7 1 0 Length of Tube L (m) 0 5 1 0 1 5 m 0 1 2 3 4 5 6 Suclion Flow Rals \ !

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

Sine Rodless Cylinder Series REA/REB

2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 @6 REBHT32 Component Parts Component Parts No. Description No.

10

N.O. 2 1 2 1 When the valve is closed, flow is blocked from port 1 to port 2. However, if the pressure in port 2 is higher than port 1, the valve will not be able to block the fluid and it will flow from port 2 to port 1. When the valve is closed, flow is blocked from port 1 to port 2.

Vacuum Unit

PE EXH Common Port open to atmosphere *1 PS 4 5/32" PD *2 M3 M3 : Not applicable 1 Air is also exhausted from the pilot valve when the valve type is R. Piping for PE port is available as an option (M3). (Refer to pages 15 and 16.) MExhaust Noise 2 A model with PD port is available as an option. (Refer to pages 9, 10, and 15.)

VM

2 !3 !4 !5 !6 !7 !8 !

Auto Switch Guide

Note 2) Wiring to the load is 5 m or longer. Note 3) Load voltage is 100 VAC. Use the contact protection box in any of the above listed situations. The contact point life may decrease.

Auto Switch Guide

Note 2) Wiring to the load is 5 m or longer. Note 3) Load voltage is 100 VAC. Use the contact protection box in any of the above listed situations. The contact point life may decrease.

Auto Switch Guide

Note 2) Wiring to the load is 5 m or longer. Note 3) Load voltage is 100 VAC. Use the contact protection box in any of the above listed situations. The contact point life may decrease.

VQZ1000/2000/3000

) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

Integrated Controller

reference is changed. 5 A switch spacer (BMY3-016) is required to secure auto switches.

MGP

object: m (kg) 30 16 20 10 When selecting a model with a longer l dimension, be sure to choose a bore size which is sufficiently large. 4 5 3 Caution 2 Handling precautions Note 1) When using as a stopper, select a model with a stroke of 25mm or less. 1 5 10 20 30 40 50 Note 2) Model MGPL (ball bushing) cannot be used as a stopper.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

(There is a piping of X, PE port in the both sides.) 12.8 34.3 23.6 15.6 32.1 15.4 3/5 3/5 3/5 2 2 2 2 2 2 2 30.6 46.2 54.5 1 1 1 58.2 4 4 4 4 4 4 4 D D D M5 x 0.8 [4(A), 2(B) port] One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D: 8, 5/16" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D: 2, 1/8" 4, 5/32" 6, 1/4" One-touch fitting (PE: Pilot EXH port) Applicable tubing

Parallel Style Air Gripper Series MHZ

) IC circuit 5 V, 12 V 3-wire (PNP) Solid state switch 12 V 2-wire Relay, PLC 24 V Grommet Yes 3-wire (NPN) IC circuit Diagnosis (2-color indicator) 5 V, 12 V 3-wire (PNP) 2-wire 12 V 3-wire (NPN) IC circuit Water resistant (2-color indicator) 5 V, 12 V 3-wire (PNP) 2-wire 12 V Solid state auto switches marked with are produced upon receipt of order.

Programless Controller Series LECP1

For open collector method, it is 2 m or less. 62 Series LECSA Series LECSB Options (mm) Motor cable, Lock cable, Encoder cable LE-CSM-mm: Motor cable LE CS M S 5 A (13.7) Direction of connector Motor type (30) L A B Axis side Counter axis side S AC servo motor LE-CSB-mm: Lock cable Cable length (L) [m] Cable contents 2 5 A M B E 2 5 10 Motor cable Lock cable Encoder cable (11.8) L (29.6)

7ND9071en

The shaft coupling of the ND must fit into the ear (2) so that the pointer of the shaft washer (16) is located in the position shown in Fig. 5.

Step Motor Driver （ Pulse input type ）

A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m Shield Cable color Terminal no.

JXCx-OMY0006

Safety Instructions 5 2.

JXCx-OMY0008

Alarm was generated in order of (1) -> (5) 6030h (1) 0-7 Alarm 1 6030h (2) 0-7 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) 6030h Alarm 2 0 (1) (2) (3) (4) (3) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) (1) to (5) in the table indicate the alarm codes which are generated. 6030h Refer to 15.2.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

5 u !0 #4 #3 $7 #7 @4 q i @8 $6 @7 $2 @0 $8 #8 $5 $0 #0 #1 @6 @2 $4 #9 @9 $6 @1 $2 @5 !3 $3 !9 $1 #5 #2 !2 #6 A @3 A Section A-A !7 !8 t !7 Enlarged drawing of shim part !6 y !