Digital Flow Switch ( compatible)

Press the UP or DOWN button in function selection mode to display [F20]. Press the SET button. Move on to setting of external input. Setting of external input Press the UP or DOWN button to select the external input equipment. Press the SET button to set. Return to function selection mode. [F20] Setting of external input completed.

PFMB.eng

PFMB7201 : If the error cannot be reset after the above measures are taken, then please contact SMC. [ inP] External input 3 [F20] [r AC] Accumulated flow external reset G1/4 21 mm PFMB7501 Mounting screws Screw is prepared by customer.

PF3W7.eng

[F20] Setting of external input Accumulated flow external reset Free range analogue output for instantaneous flow: OFF * (Analogue output for fluid temperature) Temperature lower limit exceeded The fluid temperature is below -10 oC. Rise the fluid temperature. Avoid any sealing tape getting inside the piping. Ensure there is no leakage from loose piping.

LFE-OMZ0013

Main screen Instantaneous flow Sub screen off mode Sub screen Turned off The sub display can be turned off. -40No.LFE*-OMZ0013 [F20] External input This item is not used for this specification. -41No.LFE*-OMZ0013 [F22] Analogue output in free range This function can be used only when the optional analogue output is present.

LFE-OMZ0011

Main screen Instantaneous flow Sub screen off mode Sub screen Turned off The sub display can be turned off. -44No.LFE*-OMZ0011 [F20] External input This item is not used for this specification. -45No.LFE*-OMZ0011 [F22] Analogue output in free range This function can be used only when the optional analogue output is present.

Air Cylinder Series CS1

Foot style CS1-L12 CS1-L14 CS1-L16 CS1-L18 CS1-L20 CS1-L25 CS1-L30 Flange style CS1-F12 CS1-F14 CS1-F16 CS1-F18 CS1-F20 CS1-F25 CS1-F30 Single clevis style CS1-C12 CS1-C14 CS1-C16 CS1-C18 CS1-C20 CS1-C25 CS1-C30 Double clevis style CS1-D12 CS1-D14 CS1-D16 CS1-D18 CS1-D20 CS1-D25 CS1-D30 Order two foot brackets per cylinder.

4-channel Flow Monitor ( compatible)

[F20] External input setting is completed Input signal: Connect the external input to GND for NPN type. Connect to Vcc for PNP type. 30 msec. or longer. When the input signal is ON, the screen will display [ooo] for 1 second. After turning OFF the input signal, flow accumulation resumes (displays peak value and bottom value) within 30 msec.

BP1000

AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Bore size (mm) 125 140 160 180 200 Foot style CS1-L12 CS1-L14 CS1-L16 CS1-L18 CS1-L20 Flange style CS1-F12 CS1-F14 CS1-F16 CS1-F18 CS1-F20 Single clevis style CS1-C12 CS1-C14 CS1-C16 CS1-C18 CS1-C20 Double clevis style CS1-D12 CS1-D14 CS1-D16 CS1-D18 CS1-D20 Order two foot brackets per cylinder.

BP1000

AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.

CS1

Foot CS1-L12 CS1-L14 CS1-L16 CS1-L18 CS1-L20 CS1-L25 CS1-L30 Flange CS1-F12 CS1-F14 CS1-F16 CS1-F18 CS1-F20 CS1-F25 CS1-F30 Single clevis CS1-C12 CS1-C14 CS1-C16 CS1-C18 CS1-C20 CS1-C25 CS1-C30 Double clevis CS1-D12 CS1-D14 CS1-D16 CS1-D18 CS1-D20 CS1-D25 CS1-D30 Order 2 foot brackets for one cylinder.

LV50-OMQ0002

[F10] Sub screen Page 41 Flow direction [F20] External input Page 45 [F22] Analogue output Page 46 Free range analogue output for instantaneous flow: OFF [F30] Accumulated value display Page 47 OFF [F32] Setting of flow direction / back flow detection function.

KT10

AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.

SL5200

AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.

AZ1000

AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.

CE

CEP112 CEP120 Foot Rod side flange Extension cable 5 m Extension cable & connector 10 m CEP1-L12 CEP1-F12 15 m CEP1-L20 CEP1-F20 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CE

CEP112 CEP120 Foot Rod side flange Extension cable 5 m Extension cable & connector 10 m CEP1-L12 CEP1-F12 15 m CEP1-L20 CEP1-F20 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CE

CEP112 CEP120 Foot Rod side flange Extension cable 5 m Extension cable & connector 10 m CEP1-L12 CEP1-F12 15 m CEP1-L20 CEP1-F20 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CLS

selections in accordance with the method given on page 9-9-6. 1569 180 200 998 250 813 9-9-9 10 Series CLS Rod Boot Material Mounting Bracket Part No. 125 140 160 180 200 250 Bore size (mm) Max. ambient temperature Symbol Rod boot material J 60C Foot (1) Nylon tarpaulin CS1-L12 CS1-L14 CS1-L16 CS1-L18 CS1-L20 CS1-L25 110C K Flange (2) Heat resistant tarpaulin CS1-F12 CS1-F14 CS1-F16 CS1-F18 CS1-F20

LEC-OM02904

(FR-BSF01FR-BLF) 11 26 11 (2) (a) () TDKZCAT3035-1330NECTOKIN ESD-SR-250 ZCAT3035-1330(TDK) [] [mm] [mm] 10100MHz 100500MHz 341 391 131 80 150 301 TDK (ZCAT3035-1330) ZCAT3035-1330 (b) () ACAC ON OFF MC MC SK 20cm 20cm ()CR-50500(OKAYA) C R [30%] [mm] AC[V] [F20] 625VAC50/60Hz 60s -2000VAC A W G 1 8 1 5 1 250 0.5 50(1/2W) 3 . 6 50/60Hz 60s C R 5 0 5 0 0 6 1 6 1 3 0 0 m i m 3 0 0