Compact Vacuum Unit Ejector/ Vacuum Pump System

ZB-OM00201-B Specifications General Specifications Ambient -5 to 50oC (No condensation) temperature range Fluid Air, inert gas Vibration 30m/s2 (Without pressures sensor/vacuum pressure switch, With pressure sensor) resistance Note 1) 20m/s2 (With switch) Impact 150m/s2 (Without pressures sensor/vacuum pressure switch, With pressure sensor) resistance Note 2) 100m/s2 (With switch) Note 1)

D-F6N/D-F6P/D-F6B

The operating time for D-J51 is 2 ms or less and for D-P3DW/P4DW are 40 ms or less. 4) 980 m/s2 for the trimmer type sensor section, 98 m/s2 for the amplifier section.

MONOSASHI-KUN WITH BRAKE CONTROLLER

Program P1 P2 P3 P16 S1 S1 S1 S1 S2 S2 S2 S2 Step S32 S32 S32 S32 Following are CEU2s special feature: 1. Predictive Control & Learning Function (Allow High Repeatability and Precision, 0.5mm) With learning function, after every execution, brake point will be amended, according to the deviation of stopping position from setting position.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

ZL3-OM00601

) *2 20 Impact resistance (m/s2) *4 100 *1: Values are based on standard of SMC measurements.

Programless controller (with stroke study) Step motor (servo 24 VDC)

17500 15 1000 20 2000 20 48 No.JXC-OMU0030-A 11.

Electric Actuator / Rod Type Dust-tight / Water-jet-proof (IP65 Equivalent / IP67 Equivalent)

. -3No.LEY*-OMZ0010 1Rod type / LEY Series 1.1 Specification Model LEY 25E-X8 LEY 32E-X8 LEY 40E-X8 (3000 [mm/s2]) 20 40 60 30 45 60 50 60 80 Horizontal Work load [kg] Note1) (2000 [mm/s2]) 30 55 70 40 60 80 60 70 90 Vertical (3000 [mm/s2]) 7 15 29 10 21 42 12 26 52 Pushing force [N] Note2) Note 3) Note 4) 63 to 122 126 to 238 232 to 452 80 to 189 156 to 370 296 to 707 132 to 283 266 to 553

2-Color Display Digital Pressure Switch Series ISE70/75/75H

Response time selections: 20 ms, 160 ms, 640 ms, 1000 ms, 2000 ms Cut-to-zero display function With the ISE75 series, users can enable or disable a function (cut-to-zero display function) that displays pressure values of 0.3 MPa or less as zero (0.4 MPa or less in the ISE75H series).

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

Move Speed Position Accel PushingF T riggerL V PushingSp Moving F Area1 Area2 In posn mm/s2 mm/s mm mm/s2 mm/s mm mm mm 0 Absolute 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 Absolute 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 Absolute 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 6.

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

It will cause delays around 20 to 30 msec in the OFF response time.

Fieldbus system PROFINET compatible SI Unit

(between FE and all accessible terminals) Insulation resistance 10 M ohm or more (500 VDC is given between FE and all accessible terminals) Ambient temperature Operation: -10 C to 50 C Storage: -20 C to 60 C Ambient humidity 35% to 85% RH (non-condensing) 10 Hz to 57 Hz (constant amplitude) 0.75 mm 57 Hz to 150 Hz (constant acceleration) 49 m/s2 2 hours for each direction X, Y and Z (complies

NCG/CG1

20 47.5 63 80 60.5 20 Rc 3/8 22 22 Rc 3/8 22 22 20 60.5 80 100 71 20 Rc 1/2 22 22 Rc 1/2 22 22 20 71 100 For dimensions other than listed above, refer to the dimensions with rubber bumper

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Port size M5 x 0.8 t 10.5 15 18 20 t 10.5 15 18 20 Series Assembly part no.

Possible to transfer a workpiece at low-speed.

Description 10 20 30 50 DSeal kit P523010-20 P523020-20 P523030-20 P523040-20 No. Description Qty. No. Description Qty. No. Description Qty. No.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

30 40 10 20 30 40 0.6 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 Graph e Graph r Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 0.2 0.1 80 80 5000 0 1000 2000 3000 4000 32 Lateral load F [N] 70 70 60 60 Load mass m [kg] Load mass m [kg] 50 50 32 40 40 30 30 20 20 20 20 10 10 10 20 30 40 10 20 30 40 0 0 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1

SYJ3000/5000/7000

) M5 x 0.8 (P, R1, R2 port) 21 L plug connector (L): SYJ5220-L-M5 M plug connector (M): SYJ5220-M-M5 DIN terminal (D): SYJ5220-D-M5 M8 connector (WO): SYJ5220-WO-M5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 28.1 [35.1] 60.9 53.4 12.7 M8 x 1 32.6 42.1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 20 20 20 20 107 [111.4] 3 3 3 3 87.4 [91.8] 105.2 125.2 90.4

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Q CE-compliant : : Nil 20 20 stations + + + + + + + P, R port thread type Single solenoid pilot valve is on same side as the A, B port.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

20 20 stations Applicable individual exhaust spacer assembly SYJ5000-17-1A Applicable interface regulator assembly ARBYJ5000-00-P R port Rc(PT) 1 8 A, B port M5 X 0.8 M5 M5 X 0.8 A, B port side How to Order 41 Type (5 Port/Base mounted) SS5YJ5-41-05 --M5 Stations 2 stations 02 : R port Rc(PT) : 1 8 20 stations 20 A, B port M5 X 0.8 M5 M5 X 0.8 A, B port side P port Rc(PT) 1 8 Applicable solenoid

Wedge Cam Operation Gripper Series MHK2

0.4MPa 0.5MPa 0.6MPa 40 20 20 40 0.6MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Holding point L mm Holding point L mm Holding point L mm Holding point L mm Note) Distance to the holding point L of single acting type is shorten by spring return.

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.