Compact and Lightweight

Set of long clamping screws ZH2-TB203-A 3 M4 x 70 2 pcs. ZH13DA ZH15DA ZH2-TB204-A 4 M4 x 90 2 pcs. ZH2-TB206-A 6 M4 x 130 2 pcs. Hexagon nut (M4) 2 pcs. ZH2-TB208-A 8 M4 x 170 2 pcs. (ZH2-TB201-A)3 1 M4 x 30 2 pcs. Flat washer (for M4) 2 pcs. ZH2-TB302-A 2 M4 x 55 2 pcs. ZH2-TB303-A 3 M4 x 80 2 pcs. ZH18DA ZH20DA ZH2-TB304-A 4 M4 x 100 2 pcs. ZH2-TB306-A 6 M4 x 145 2 pcs.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

AS421F-04-10 31.8 47.9 10 17.9 18.5 43.3 21 59 21 100 33.6 3/8" 24 (23.8) 24 (23.8) 1/2 28.6 25.4 57.6 42.1 49.6 50.1 AS421F-04-11 AS421F-04-12 33.6 17.9 48.9 12 47.9 21 20.9 100 22 101 34.6 3/8" 28.6 50.1 42.1 25.4 57.6 49.6 1/2 AS421F-04-13 35.2 21.7 49.5 22 101 Note 1) ( ) are the dimensions of NPT thread.

Table of Contents

Use a new sensor connector in case wiring or the snapping of A into B are done incorrectly. 2-M3 x 8L Tighten screws 1/4 to 1/2 turn after the heads are flush with the panel. When using 48 conversion adapter 48 conversion adapter (ZS-26-D) B A 4 3 2 1 4 3 2 1 4 3 2 1 Verify from the top side of A that the lead wires are inserted completely.

Metal Seal/Rubber Seal Series VQ Body Ported

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

Booster Regulator Series VBA1110 to 4200 1

K J H G F E D C B A 475 432 512 472 525 482 562 522 L Booster part no. Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

V

I R S U C T I O N F I LT E R S E R I E S (N)ZFB ACCESSORIES A I R S U C T I O N F I LT E R S E R I E S (N)ZF1B (N)ZFB E L E M E N T I-34S-A (N)ZFB100, 101 I-35S-A (N)ZFB200, 201 I-36S-A (N)ZFB300, 301 I-395-A (N)ZFB401 B O D Y S I Z E T U B E S I Z E OD M M 04 4 06 6 08 8 10 10 05 3/16 07 1/4 11 3/8 13 1/2 100 Max 20 ln/min 200 Max 50 ln/min 300 Max 75 ln/min 101 Max 20 ln/min 201 Max 30

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Note 2) Do not use it in a line that is kept pressurized because it could cause the body to break. Note 3) Refer to page 1110 for applicable tubing model. How to Order ZFB 100 04 IN/OUT applicable tubing O.D.

E-P HYREG ® Series VY1 1

02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

HRX-OM-W058

Rated Rated Sensitivity voltage x size voltage current of leak [V] [A] current [mA] 3 wires x14AWG HRS018-A-20-R HRS030-A-20-R 1-phase 10 30 (3 wires x 2.0mm2) 200, (including ground) Cable diameter: 8.5 to 11.5 mm 200-230V AC 230 HRS0-A-20-T-R (50/60Hz) (High pressure pump 15 30 [Optional]) HRS-R Series 3.3 Installation 3-9 HRX-OM-W058 Chapter 3 Transport and Setting Up 3.3.3 Preparation

HRX-OM-X027

Terminal no.12 Switch Terminal no. 12 11 Recommended accessory cable dia. is 0.14 to 1.5mm2 10 9 Terminal no.1 Fig. 3-8 Wiring of contact for remote signal inputsExample 3.3 Installation HRS-R Series 3-14 HRX-OM-X027 Chapter 3 Transport and Setting Up 3. Inset the signal cable through the hole and fit the nipple A, nipple B and lock nut. Then fit the cap A, cap B and rubber bushing.

3 Port Solenoid Valve/

254.2 AW30-03G-A Y300T-A E300-03-A VP744-5DZ1-04-X538 34.4 75.2 118.7 262.7 AW40-04G-A Y400T-A E400-04-A VP744-5DZ1-04-X555 34.4 75.2 160.2 304.2 AW40-04G-A Y400T-A E400-04-A 17 VP500/700-X536, X538, X555 Specific Product Precautions Be sure to read this before handling.

3 Port Air Operated Valve Series SYJA300 1

2(A) 2(A) 47.5 VHS 13.5 (A port) Rc 3/8 Individual exhaust: VV3PA5-42Station 3-03 28.5 3(R) 3(R) (R port) Rc 3/8 PA NO NC 87 (PA port) Rc 1/8 (Mounting hole) 2-7.2 30 PA 41.5 91.4 84.4 91.4 60 16.5 1(P) 41.5 PA (P port) Rc 3/8 (Pitch) 88 31 33 7.5 L2 L1 (PA port) Rc 1/8 PA 61.5 66 2(A) 2(A) 47.5 13.5 (A port) Rc 3/8 n: Station n L L1 L2 Formula L1 = 33 x n + 29 L2 = 33 x n + 14 6 227 212

HRX-OM-R039

T ground) HRSE012-A-20/23 1-phase 200V AC Lead wire end not Shared HRSE012-A-20/23-T (50/60Hz) 3 cores x 2.5mm2 treated with 100 V, 200 V HRSE018-A-20/23 (Bare cut) 15A 15A 30mA -23 Only (including HRSE018-A-20/23-T (L: Brown, N: Blue, PE:Green/Yellow) and 1-phase ground) HRSE024-A-20/23 230V 230V AC HRSE024-A-20/23-T (50/60Hz) HRSE Series 3.3 Installation 3-7 HRX-OM-R039 Chapter 3 Transport

Series H, DL, L, LL Self-align Fittings

Weight (g) M L2 L1 A 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 DL04-01 15 3.5 23 DL04-02 17 19 4 10 10 23.5 19.6 30 DL06-01 9 25 17 10 19.6 23.5 6 DL06-02 16 19 31 14 12 DL06-03 22 53 26.5 24.5 21.6 22.6 24.5 25.8 24.5 29.4 29.6 30.3 29.4 91 DL08-01 18 32 19 8 14 DL08-02 16 21 38 14 12 24.5 DL08-03 22 54 26.5 31 10 17 DL10-02 23 51 14 26.5 DL10-03 17 22 57 DL10-04 27 28.5 100

Base Mounted Metal Seal/Rubber Seal Series VQ

SI unit output no. 0 1 2 3 4 5 6 7 8 9 SI unit output no. 0 1 2 3 4 5 6 7 A B A A B B Unused A Unused A A B A B B A A A VQC Double Double Double Double Double SI Unit SI Unit Single Single Single Single Single SQ Stations 1 2 3 4 5 Stations 1 2 3 4 5 Single/Double Mixed Wiring (Option) Double wiring (Standard) VQ0 Type SC OMRON Corporation SYSBUS Wire System Type SD SHARP Corporation Satellite

VQ7-6/7-8

1 1 5 3 3 5 3 5 Regulating port B Regulating port P Regulating port A Caution Part No.

VQ7-6/7-8

L1 L2 L2 L1 B A PA A B B SMC A PA A B B A (A, B port) 4n-1/4, 3/8 PA A L side R side L side R side (2n-1/8) 38 D side D side 68.5 68.5 3 120.5 (Single) 16 120.5 (Single) 145 (Double) 44 145 (Double) 155 (3 position) 55 155 (3 position) 77.5 Bottom ported drawing 165.5 153.5 121 PA 14 PB 12 5 1 R 3 65 54 4-1/8 P 39 (Pilot pressure EXH port) 21 MC R2 R1 (P , R port) 6-3/8 17 17 26.5 26.5 L

VM

(134) M8 x 1.25 M8 x 1.25 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19 2 4-Rc 1/4, 3/8, 1/2 4-Rc 3/4 VH42-06 (Bottom ported) VH42-02 to 04 (Bottom ported) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc 3/4 4-Rc 1/4, 3/8, 1/2 5-8-11 6 Series VH Dimensions: Body Mounted VH600-06/10 2 (A) 4 (B) 32 1 (P) 132 152 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

VQ7-6/7-8

(port B) Manual override R1 R2 P A B 14 11 9 50 62 38 50 62 A 12 Prewired connector (M12) (L approx. 500) R1 P R2 A B 13 13 2-Rc1/8 2-6.5 Mounting hole Indicator light 42.5 42.5 3-Rc1/4, 3/8 (P, A, B) 34 34 Bottom port drawing SMC (ports A, B) 93 12 Y 25 (port X) 5 3 37 22 14 25 14 1 25 9 25 2-Rc3/8 Ports R1, R2 Rc1/4, 3/8 Port P Rc1/8 Port Y (PE) 2-Rc1/4, 3/8 Ports A, B Rc1/8 Port X (PE