0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) 1/4 VF5;2;-;;1-02 1(P), 5(EA), 3(EB) 1/4 4(A), 2(B) 3/8 VF5;2;-;;1-03 1(P), 5(EA), 3(EB) 3/8 4(A), 2(B) 1/4 VF5;44-;;1-02 1(P), 5(EA), 3(EB) 1/4 4(A), 2(B) 3/8 VF5;44-;;1-03 VF5000 1(P), 5(EA), 3(EB) 3/8 4(A), 2(B) 1/2 VF5;44-;;1-04 1(P), 5(EA), 3(EB) 1/2 1(P), 5(R), 3(R) 3/8 Type 20 manifold base 1(P), 5(R), 3(R) 1/2 Type 21

MGG

Hs Hs Hs Hs A A A A A A B B B B B B B 20 30.5 27.5 27.5 27 24.5 41.5 25.5 45 27 43.5 28.5 42 27 40 24 44.5 45.5 29.5 25 30.5 30 30 29.5 27 41.5 25.5 45 27 43.5 28.5 42 27 40 24 44.5 29.5 45.5 32 31.5 33.5 33.5 33 30.5 41.5 26.5 46 28 44.5 29.5 43 28 40 25 45.5 30.5 46.5 40 36.5 38 38 37.5 35 50.5 31.5 55.5 33 53.5 34.5 52 33 49 30 54.5 55.5 35.5 50 43.5 43.5 43.5 43 40.5 60.5 38.5 65 40 63.5

A

E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth

Soft Start-up Valve AV2000/3000/4000/5000 1

bore 1/8 R 4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000

CL

is locked without a load.

CL

If there is a risk of contact, provide safety measures such as a cover or a system that uses sensors that will activate an emergency stop before contact is made. 2. Use a balance circuit in which lurching of the piston is taken into consideration.

Dual Speed Controller with One-touch Fitting Series ASD

1/4 28.2 46.5 ASD430FG-02-08S 15.2 11 34.4 29.4 18.5 19.7 10 31 49.3 ASD430FG-02-10S 18.5 21 6 25.2 48.3 ASD530FG-02-06S 12.8 17 20.3 28.2 8 51.3 ASD530FG-02-08S 15.2 18.5 23 19.8 46.9 41.9 48.8 43.8 19 R 1/4 15.4 42.8 37.8 32.6 10 54.1 ASD530FG-02-10S 18.5 21 23.1 34.4 12 55.9 ASD530FG-02-12S 20.9 22 25.2 48.3 6 17 ASD530FG-03-06S 12.8 20.3 28.2 51.3 8 18.5 ASD530FG-03-08S 15.2 23 19.8

HRX-OM-Z002

For a facility having a small installation area (that cannot vent the air naturally): Make a forced air exhaust vent in a wall at a high level and an air inlet in a wall at a low level.

AS-FG/ASD-FG

) 1/4 28.2 46.5 34.4 11 29.4 15.2 18.5 ASD430FG-02-08S 10 31 19.7 49.3 18.5 21 ASD430FG-02-10S 6 25.2 48.3 12.8 17 ASD530FG-02-06S 20.3 28.2 8 51.3 15.2 18.5 ASD530FG-02-08S 23 19.8 46.9 41.9 48.8 43.8 19 R(PT) 1/4 42.8 15.4 37.8 32.6 10 54.1 18.5 21 ASD530FG-02-10S 23.1 34.4 12 55.9 20.9 22 ASD530FG-02-12S 25.2 48.3 6 17 12.8 ASD530FG-03-06S 20.3 28.2 51.3 8 18.5 15.2 ASD530FG-03-08S 23

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Note 2) Do not use in a line where a pressurized condition is maintained since the body may be damaged. Note 3) Polyurethane is only applicable for the ZFC050-02. SP ZCUK Made to Order (Refer to page 1115 for details.)

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(M): SYJ7140lMll01 02 01 02 VZS VFS 2-4.3 2-4.3 (Mounting holes) (Mounting holes) VS A B B A 34 27 34 27 B VS7 A A B R2 R1 P R2 R1 P 85.5 [86.8] 81.5 64.3 34 8.5 34 8.5 64.3 (Lead wire length) 300 (Lead wire length) 95.1 300 (P, A, B port) 3-Rc(PT)1/4, 1/8 3-Rc(PT)1/4, 1/8 (P, A, B port) 25.5 41 54 60 71.1 [77.6] 25.5 41 47.6 54 60 [66.5] 11.5 12 20 57.1 20 57.1 11.5 12 (R1, R2 port) 2

CNG

If driving a load such as a relay that generates a surge voltage, use a switch with a built-in contact protection circuit or use a contact protection box.

Fieldbus System

SPR3: Max. 1.0 A SPR2: Max. 2.0 A SPR4: Max. 1.0 A SPR5: Max. 2.0 A SPR7: Max. 1.0 A SPR6: Max. 2.0 A SPR8: Max. 1.0 A SDN1: Max. 2.0 A SDN3: Max. 1.0 A SDN2: Max. 2.0 A SDN4: Max. 1.0 A SMJ1: Max. 2.0 A SMJ3: Max. 1.0 A SMJ2: Max. 2.0 A SMJ4: Max. 1.0 A Supplied current IP67 IP40 IP67 14 to 122F (10 to 50C) 35 to 85%RH (No condensation) 500 VAC for 1 minute between terminals and housing

Prevents Micro-Bubbles

P P P Stations are counted from station 1 on the left side, with the A (OUT) ports in front. PA PB PA P PB A A A N.O. PA PB PA A (OUT) port PB A A A Double acting N.C. N.O. Double acting LLA2A-03-02-C 1 set 1 set Manifold base part no. With flow rate adjustment LVA20A-02-C1 2 sets 2 sets Valve part no. (stations 1 & 2) LVA20A-02-C 1 set 1 set Valve part no.

Speed Controller: Standard Type Series AS In-line Type

-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

Cylinder with Lock Series CNG

HS Auto switch Auto switch 12 8.5 24.5 16 A B A B 33 38.2 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-C7, C8 D-H7 D-H7W D-H7F D-H7BA D-H7 D-H7C D-H7W D-H7BA D-C7, C8 D-C73C D-C80C D-B5, B6 D-C73C D-C80C D-B5, B6 D-B59W D-G5NT D-H7C D-G5NT D-B59W D-H7F Bore size (mm) A A B A B A A HS HS HS B B B B A 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5)

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

39.9 34.9 18.5 15 17 8 R 1/4 ASD430FG-02-08S 28.2 18.5 55 46.5 15.2 34.4 29.4 11 19.7 10 21 31 58 ASD430FG-02-10S 49.3 18.5 17 25.2 74 6 ASD530FG-02-06S 48.3 12.8 20.3 18.5 28.2 76 8 ASD530FG-02-08S 51.3 15.2 46.9 41.9 48.3 43.3 23 19.8 19 R 1/4 42.8 37.8 15.4 21 80 32.6 10 ASD530FG-02-10S 54.1 18.5 23.1 22 83 34.4 55.9 12 ASD530FG-02-12S 20.9 17 74 25.2 48.3 6 ASD530FG-03-06S 12.8 20.3 18.5

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

1/4 28.2 46.5 ASD430FG-02-08S 15.2 11 34.4 29.4 18.5 19.7 10 31 49.3 ASD430FG-02-10S 18.5 21 6 25.2 48.3 ASD530FG-02-06S 12.8 17 20.3 28.2 8 51.3 ASD530FG-02-08S 15.2 18.5 23 19.8 46.9 41.9 48.8 43.8 19 R 1/4 15.4 42.8 37.8 32.6 10 54.1 18.5 ASD530FG-02-10S 21 23.1 34.4 12 55.9 20.9 ASD530FG-02-12S 22 25.2 48.3 6 17 12.8 ASD530FG-03-06S 20.3 28.2 51.3 8 18.5 15.2 ASD530FG-03-08S 23 19.8

CNG

NDH10 MM MM MM NDH10 MM L L R1 R1 R1 R R R1 R R E1 E1 E1 E1 U1 NX NX A1 U1 A1 L1 U1 A1 NX U1 A1 L1 NX L1 NZ A L1 A NZ A A ND Part no. Applicable bore size (mm) A A1 E1 L1 MM U1 NX NZ L Applicable A Applicable bore size (mm) MM R1 U1 NDH10 NX R1 R Part no. R pin part no.