When mounting the cylinder body with mounting bolts, use the tightening torques in the table at right as a guide. Mounting bolt Tightening torque Size Nm Qty. Bore size (mm) 20 32 40 50 63 80 100 3 3 3 6 11.5 24 34 M5 x 0.8 M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M10 x 1.5 2 4 4 4 4 4 4 7.
(mm) M5 H (Hex.) A Weight (g) L1 L2 M D Q Part No.
Adjustable stroke range: 0 to 5mm 3-side work piece mounting is a reality.
~Hs Proper Auto Switch Mounting Position Auto Switch Mounting Height Auto switch model D-C7/C8 D-C73C/ C80C D-B5/B6 D-B59W D-G5NTL D-H7C D-M9 D-M9W D-M9A D-M9 D-M9W D-M9A D-C73C D-C80C D-B5/B6 D-B59W D-G5NTL Applicable bore size (mm) HS HS HS A B A B A B A B A B 20 24.5 27 27.5 9 3 6 8 4.5 20.5 15.5 17.5 19.5 16 25 27 29.5 30 9 3 6 8 4.5 20.5 15.5 17.5 19.5 16 32 30.5 33 33.5 10 4 7 9 5.5
center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No
D-F9BAL Auto switch model A B W Hs Symbol 12 4.5 3.5 14.5 16.5 16 5 3 15 18.5 Bore size (mm) 20 9 6.5 11.5 22 25 10 8.5 9.5 24 Note) The product is shipped out of the factory in installation state a).
3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !
(Example) For M3: L1 = 6 Applicable shaft type: W Q1 = M L1 + (3 x P) (mm) (mm) L2 = Q1 L2 + (3 x P) Size L1 = Q2 Size 50 50 M3, M4, M5 M3, M4, M5 63 63 M4, M5, M6 M4, M5, M6 80 80 M4, M5, M6 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8 Symbol: A15 Applicable to single vane type only Symbol: A14 Applicable to single vane type only A special end is machined onto the long shaft, and a through-hole
PV port PS port PD port EXH port Weight 1 8 Rc M5 M5 Rc 1 2 Notes) When using 3 or more stations with ZR120 manifold, utilize PV port as supply port on both sides. When using 3 or more stations with ZR120 3 manifold, utilize EXH port as exhaust port on both sides.
A B 4.2 8.5 9 9 20 1 5 4H9 3.5 deep +0.030 0 A B NN-M5 X 0.8 thread 10 deep 4H9 3.5 deep +0.030 0 HA GA Cross section AA Cross section BB With auto switch Basic style MXS12-10 MXS12-20 MXS12-30 MXS12-40 MXS12-50 MXS12-75 VWith stroke adjuster MXS12-10AS MXS12-20AS MXS12-30AS MXS12-40AS MXS12-50AS SMXS12A, #1 SMXS12A, #2 SMXS12A, #3(#3+#7) SMXS12B, #1 SMXS12B, #2(#2+#5) SMXS12B, #3(#3+#7)
33 33 37 RB0806 RB0806 M4 x 0.7 3 3 10 10 50 56 3 3 6 6 6 6 5 5 37 38 3.5 M5 x 0.8 M12 x 1.5 41 46 54 56 62 81 8 10 10.5 13.5 15 18 21.5 28 4.5 4.5 5.5 5.5 7.5 7.5 9 9 22 25 30 23 24 4.3 4.3 5.6 5.6 6.6 6.6 8.6 8.6 10 12 13 15 20 20 22 22 8 8 9.5 9.5 11 11 14 14 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Bore size (mm) DB M5 x 0.8 M12 x 1.5 3.5 M5 x 0.8 Standard stroke (
ZP3EU-F2-YAL14 [Weight: 78.4 g] M14 1 Width across flats 19 M14 x 1 Width across flats 19 M5 x 0.8/ Effective thread depth 5 M5 x 0.8/ Effective thread depth 5 A-A A-A 5 5 25 55.6 30.6 11.2 5 5 25 30.6 55.6 19 19 A A A A 17 17 22 22 24.6 24.6 6.41) 9.5 9.5 11.2 2.5 2.5 6.41) Applicable pad part no.
D-M9mAV D-A3m D-A44 D-G39 D-K39 D-A9m D-A9mV D-A5m D-A6m D-A59W D-F5m D-J59 D-F59F D-F5NT REA D-P3DWA D-P4DW REB REC A B A B A B A B A B A B A B A B A B A B Bore size 32 10 8 6 4 0 0 4 2 6.5 4.5 11.5 9.5 0 0 3.5 1.5 5.5 3.5 3 1 Smooth Smooth 40 9 9 5 5 0 0 3 3 5.5 5.5 10.5 10.5 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 0 0 4 3 6.5 5.5 11.5 10.5 0 0 3.5 2.5 5.5 4.5 3 2 Low Speed 63 10 9 6 5 0 0
Pad tYPe '--l (Avail diameters: Relerto List O) 5 M5 x 0.8 a o A 6 r , N / 6 x 1 a o a a M 8 x 1 a a , jo o q l d g > N44 x 0.7 o B5 M5 x 0.8 o o o B6 M 6 x 1 o a B8 lVlS x 1 .25 o a B0r '/e PT a a a o n g List O Pad Dia.
Pad tYPe '--l (Avail diameters: Relerto List O) 5 M5 x 0.8 a o A 6 r , N / 6 x 1 a o a a M 8 x 1 a a , jo o q l d g > N44 x 0.7 o B5 M5 x 0.8 o o o B6 M 6 x 1 o a B8 lVlS x 1 .25 o a B0r '/e PT a a a o n g List O Pad Dia.
Tightening of M3/M5 Threads 1) Tighten a barb fitting by hand, and give it an additional 1/6 turn with a wrench. 2) Tighten a barb elbow by hand, and give it an additional 1/3 turn with a wrench.
M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.
VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.
4 (2) 5.5 (3.5) A B 2 2 (2.5) 3 (4) 9 (6) 3 5 (3) 6.5 (4.5) B 3.5 3.5 (4) 4.5 (5.5) A 2 2 (2.5) 3 (4) A 3.5 3.5 (4) 4.5 (5.5) B 4 4 (4.5) 5 (6) 11 (8) 5 7 (5) 8.5 (6.5) B 3 3 (3.5) 4 (4.5) 10 (7) 4 6 (4) 7.5 (5.5) A 4 4 (4.5) 5 (6) A 3 3 (3.5) 4 (4.5) 1 D-F7V D-F7WV D-F7BAVL 8 10 12 7 23 A B 2015 Hs 10.5 (7.5) 4.5 6.5 (4.5) 8 (6) 2 (3) 3 (4) 4.5 (5.5) 5 (6) 4 (5) 16 Data 20 25 5 (3) 6.5
/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V D-F7WV D-J79C D-F7BAL D-F79F/A72 D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-A79W Hs Bore D-F7V D-F7WV D-F7BAVL 1 7 A B 23 15 Hs B 2 (3) 4 (2) 5.5 (3.5) A 2 (3) 5 (3) 6.5 (4.5) B 1 2 (2.5) 3 (4) 3 (4) 5 (3) 6.5 (4.5) A 9 2 (2.5) 3 (4) 3 (4) 6 (4) 7.5 (5.5) B 3 4 (4.5) 5 (6) 5 (6) 7 (5) 8.5 (6.5) A 11 4 (4.5) 5 (6) 5 (6) 8 (6) 9.5 (7.5) B 2.5 3.5 (4) 4.5 (