VXA31/32

Note 2) Value on option V (Non-leak, Vacuum).

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

12 17.2 38.5 54.3 12 17 21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

2.11-21 D-J79C MHR Grommet 2.11-22 D-F59/F5P/J51/J59 MHK 2.11-23 D-S991/S992/D-S99V1/S99V2 Solid state switch 2.11-23 D-T991/T992/D-T99V1/T99V2 MHS 2.11-23 D-S9P1/S9P2/D-S9PV1/S9PV2 Grommet 2.11-24 D-S791/S792 2.11-24 D-T791/T792 Direct mounting 2.11-24 D-S7P1/S7P2 MHC2 Connector 2.11-24 D-T791C/T792C MHT2 D-F9N/F9P/F9B D-F9NV/F9PV/F9BV D-Y59A/Y59B/Y7P D-Y69A/Y69B/Y7PV 2.11-25 Grommet MHY2

Fluoropolymer Piping Equipment

Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Pressure Control Equipment Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output 1.5 MPa Withstand pressure Max. 30 V, 80 mA Residual voltage 1 V or less 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Pressure Control Equipment Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output 1.5 MPa Withstand pressure Max. 30 V, 80 mA Residual voltage 1 V or less 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

NPN or PNP open collector 1 output Switch output Main circuit Main circuit Load 12 to 24 VDC Maximum load current 80 mA + Black OUT Maximum applied voltage 30 V (at NPN output) Residual voltage 1 V or less (with load current of 80 mA) Response time Anti-chattering function 1 s (0.25, 0.5, 2, 3) Blue DC () PNP open collector Max. 80 mA Residual voltage 1 V or less Short-circuit protection

HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Cylinder

D-iJI. P-30@ 3rd pnnting February 1990 30 :1); Specifications subject to change without notice. Printed in Singapore 16-4, lCHOME, SHIMBASHI, MINATO-KU, TOKYO, 105, JAPAN. Tel :03-3502-2740 Fax:03-5251-7240 August 1996, 14(RP)

LX Series Compact Electric Actuators

-2030 E-lt4l 1ol1 8l lTd[Z Fa [d [d trEtrtrtrMtrEM (lnterface Connector) Viewed from cable side not PIN side. hput (+) COM Point Input A Point Input B J Point Input C Point lnput D Bank Input #1 6 Bank Input #2 7 Bank lnput *3 Emergency Stop Input I Alarm Reset Input 1 0 1 2 Point Output A 13 Poirn Output B Point Output C 1 4 Point Output D 16 READY Output 1 7 BUSY Output '18 Origin Move

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Symbol -X80, -X81 Main Value Double Acting Type 1 A N 06 5 1 4 VP31 1 D Z X81 Body size CE marking Nil Q None CE-compliant 4 6 8 1/2 1 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 2 Port size (IN, OUT port) Thread type Symbol VP3145 VP3165 VP3185 Port size Nil F N T D/DO/DZ/DU only Rc G NPT NPTF 03 04 06 10 12 14 20 Type of actuation X80 X81 Double solenoid Single solenoid External pilot Passage, Type

VKF300

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing August, 1998 D-SMC.L.A. P-69.5 (JT)

VP3145/3165/3185

(Normally open) B VP Valve option Electrical entry S070 Nil For general G Grommet Conduit terminal DIN terminal TL D V For vacuum/low pressure T VQ Port size (IN, OUT port) Conduit terminal with indicator light TS Conduit terminal with surge voltage suppressor TZ Conduit terminal with light/surge voltage suppressor DL DIN terminal with indicator light DS DIN terminal with surge voltage suppressor

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

) 4 AC 200 V 2.3 (With light: 2.4) 2.5 (With light: 2.6) [2.7 (With light: 2.8)] 220 V [230 V] 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) Surge voltage suppressor Diode (Non-polarity type: valistor) 3 position exhaust center 3 position exhaust center (B) 2 (A) 4 (B) 2 (A) 4 Indicator light LED In common between 110 VAC and 115 VAC, and between 220 VAC and 230 VAC.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

center Apparent power VA (B) 2 (A) 4 (B) 2 (A) 4 AC 200 V 2.3 (With indicator light: 2.4) 2.5 (With indicator light: 2.6) [2.7 (With indicator light: 2.8)] 220 V [230 V] 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) Surge voltage suppressor Diode (Non-polarity type: valistor) 3 position exhaust center 3 position exhaust center (B) 2 (A) 4 (B) 2 (A) 4 Indicator light LED In common between 110 VAC and 115

VER2000/4000

VS7-8-FG-D-3M 1 pc. (Third station of manifold where 1 piece of VS7-8-FG-D-3M is added to the basic unit of VER2000-A and VS7-8-FG-S-3N.) AL Dimensions DXT334-X72-04R-04U L side U side D side Exhaust port R side Rc 1/2 supply port (L side) 2-Rc 1/2, Output port 14-9-23

Peltier-type Chiller Thermo-con/ Compact Type

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2022 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. D-G

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(With NPN output) 1 V or less (With load current of 80 mA) 1 s (0.25, 0.5, 2, 3) Yes 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(With NPN output) 1 V or less (With load current of 80 mA) 1 s (0.25, 0.5, 2, 3) Yes 1% F.S.

HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.