RHC

9 9 9 15 + 50 ( ) n2 2 65 + 50 (n2) D-G5/K59/G5WK 59W/G5BAL/G5NTL 4 (n = 2, 4, 6, ) 4 4.5 5 6 6.5 6.5 7 CE1 D-B5/B64 D-G5/K59 D-G5W/K59W D-G5BAL D-G5NTL Since this is a guideline including hysteresis, not meant to be guaranteed.

P

10 14.5 4.5 U40 40 43 7 18 13.7 18.5 6.5 U50 50 53 7 18 14.7 19.5 7.5 Model Nom.size D10 A 10 ZP10Dl B 12 C 4 D 13 E 10.7 F 15 Y 6 Put in the symbol for material at the end of model no.

HRX-OM-R016

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R016 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Electric

HRX-OM-R005

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R005 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [Electric resistivity /conductivity sensor set] . 6-2 6.3.1 Optional Accessories [Electric resistivity/conductivity

Hand Valve Series VH 1

-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust

Title not found

r^rE_aEIl_I ItrtrElEll+trMElr cG1 C D G l T T series i I .2: 3. .4, i.5. .6-l '?

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

4 Way 4 and 5 Port Rubber Seal Solenoid Pilot Valve Series SYJ3000 Interchangeable with the NVJ Series Low Power Consumption: 0.5W Base Mounted/Body Ported Configurations Manifolds with Built-in One-Touch Fittings P R O D U C T S Q Q Q Table of Contents Q Q Q Features & Benefits .4-5 Q Q Preferred Option Program .6 Q Specifications Q Valve .8 Manifold .9 Q Q How

AR20-B to AR60-B

and pressure gauge in SI units: MPa g Pressure unit f Pressure unit Z*5 Name plate and pressure gauge in imperial units: psi *6 *6 *6 *6 *6 Z*4 Name plate and pressure gauge in imperial units: psi *5 *5 *5 *5 *5 *5 *1 Options B, G, H are not assembled and supplied loose at the time of shipment. *2 Assembly of a bracket and set nuts (AR25-B to AR40-B) Including 2 mounting screws for the AR50

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

stations With DIN rail (Rail length: Standard) With DIN rail (Rail length: Special) Note 3) D With DIN rail (Rail length: Standard) With DIN rail (Rail length: Special) Note 3) D Cylinder port size D D VQ1000 VQ2000 Special wiring specifications (except double wiring) Note 6) Regulator unit with 1 unit Note 4) Regulator unit with 2 units Note 4) Symbol C4 C6 C8 CM G1 G2 G3 J Symbol C3 C4

High Power Cylinder:

D-C80 D-C73C, D-C80C Reed BMA2-020 BMA2-032 BMA2-040 BMA2-025 D-H7A1, D-H7A2, D-H7B, D-H7C D-H7NW, D-H7PW, D-H7BW D-H7LF, D-H7NF, D-H7BAL Solid state Reed Solid state D-B53, D-B54, D-B64, D-B59W D-G5NTL BA-32 BA-04 BA-01 BA-02 Reed Solid state D-A33, D-A34, D-A4 D-G39, D-K39 BD1-02M BD1-02 BD1-04M Precautions Be sure to read before handling.

High Power Cylinder Series RHC

D-C73C, D-C80C Reed BMA2-020 BMA2-025 BMA2-032 BMA2-040 BMA2-050 BMA2-063 D-H7A1, D-H7A2, D-H7B, D-H7C D-H7NW, D-H7PW, D-H7BW D-H7LF, D-H7NF, D-H7BAL Solid state D-B53, D-B54, D-B64, D-B59W Reed BA-01 BA-02 BA-32 BA-04 BA-05 BA-06 BA-08 BA-10 D-G5NTL Solid state D-A33, D-A34, D-A4 Reed BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M D-G39, D-K39 Solid state 2 Series RHC Theoretical Output Table

VXA21/22

Model Orifice size (No.) 2 (3 mm) 3 (4.5 mm) 4 (6 mm) 5 (8 mm) 6 (10 mm) Part no. LVQ Model VXA212 VXA213 VXA21 VXA22 VX070-020 LQ 1 8 1 4 1 4 3 8 1 2 01 ( / ) 02 ( / ) 02 ( / ) 03 ( / ) 04 ( / ) VXA223 VXA224 VXA225 VXA226 VX070-022 LVN VX070-029 TI/ TIL PA Ordering example (Example) Series VXA21, Orifice size 4.5 mm, Normally closed, Rc 1/4 (Part no.)

Hand Valve Series VH

3 (R) 4 3 3 (Exhaust center) VH301-02, 03 VH311-02, 03 Rc1/4: 17(0.9) Exhaust center 2 (Position) VH302-02, 03 VH312-02, 03 2 1 (A) 2 (B) 4 VH3 1/4, 3/8 0.71 3 (Closed center) VH320-02, 03 VH330-02, 03 Rc3/8: 20(1.1) 1 (P) 3 (R) 3 (Exhaust center) VH321-02, 03 VH331-02, 03 2 (Position) VH322-02, 03 VH332-02, 03 12 3 4 3 (Closed center) VH400-02 to 06 VH410-02 to 06 Rc1/4: 45(2.5) 4 3 3 (Exhaust

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 Piping adapter ZS-46-N1 NPT1/8 Piping adapter ZS-46-N2 9 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20

Pressure Relief 3 Port Valve with Locking Holes

VH*-OMX0068-A PRODUCT NAME Pressure Relief 3 Port Valve with Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~(F,N)02(-R,Z)-D VHS30-(F,N)02~(F,N)03(-R,Z)-D VHS40-(F,N)02~(F,N)04(-R,Z)-D Contents Page 1. Safety Instructions 1~5 2. Application 6 3. Specifications 6 4. How to Order 7~8 5. Construction / Parts List 9 6.

Series 12-REA Sine rodless cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2201F-02-06-X214 10-AS2301F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 Although speed adjustment is possible with

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

M Weight (g) AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 Model Applicable tubing O.D. d 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 27.9 28.2 29.6 32.4 40.2 32.5 33.1

S070

Stations 02 03 2 stations 3 stations Station 3 2 1 D side U side 20 20 stations Note) Maximum of 20 stations Electrical entry Grommet/Plug lead C How to Order Valves S070 A 5 B G Electrical entry Body type Body type Base mounted with clips G C Grommet Plug lead with light/surge voltage suppressor Symbol A Coil voltage Power consumption Pressure specification Flow rate 5 6 V S R 24

Title not found

28 {58) 1961 8.35 1212\ 2.05 ts2) 11.2\ 2.AO (66) 803 8 6 6 :220\ 4.O2 (l 02) 307 t7B) 0 9 3 (25) 2.05 (s2) 0.55 (14) 0.83 t 2 1 l n 1 2 t 1 7 a 1.43 i.B9 M2211.51.46 137) c 7 9 (201t 1 r 6 l 1 . 1 0 (24) 1 24 :8;li' 3 r . 5 : l i i I 2.80 (71) 9.25 (235) 1 0 0 9 (25s) 2.56 (65) 0.49 r 2 5 ) 3 . 1 5 (80) 9 6 1 1244\ t0.39 :264\ 1 5 7 t 1 1 6 ) 3 6 2 t92l 0 9 8 (30) 2.05 (52) 0.83 i21l n 1