MGP

A B C 50 56 72 82 98 106 130 142 180 210 18 22 24 30 34 40 46 58 54 62 41 46 54 64 78 86 110 124 156 188 8 10 12 15 18 18 22 22 28 33 12 16 20 25 32 40 50 63 80 100 M4 x 0.7 D By-pass port dia. M5 x 0.8 M5 x 0.8 C 0.2 M6 x 1.0 [Bottom mount] M8 x 1.25 B 0.2 B Pin hole M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2.0 A 0.2 3.

MXS

Z K 23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5 24.5 38.5 NN 2 2 3 3 4 5 H 28 30 20 28 23 28 G 9 12 13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA ZZ 56 61 72 90 108 158 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 M 49 54 65 83 101 151 MXS8L-10 MXS8L-20 MXS8L-30 MXS8L-40 MXS8L-50 MXS8L-75 48.5 53.5 64.5 82.5 100.5 150.5 82.5 132.5 3.11-30 Air Slide Table Series MXS MXS

Compressed Air Cleaning Filter Series

JIS B2401G35 3 pcs. 56 Series AMF Dimensions AMF150C to 350C P Q T S R F E D N Bracket L U (Accessory) O K G M V W J B OUT IN C I A Maintenance space (mm) A Model Port size Bracket related dimensions B C D E F G I 98.5 N 56 J 20 K 5 U 6 V 6 L 12 M 6 W 10 O 35 P 70 Q 26 R 54 S 4.5 T 1.6 AMF150C AMF250C AMF350C 10 54 63 7.5 63 10 1/8, 1/4 83 14 73 76 5 76 10 121 66 24 8 6 6 12 6 10 40 80 28

Basic type / Direct mount type Series CY3B/CY3R

CY3B CY3R 50 40 50 40 30 M1 1.5 10 13 M2 2.5 16 16 M3 1.5 10 13 M1 28 56 64 M2 26 85 96 M3 28 56 64 Model CY1H10 CY1H15 CY1H20 Model CY1H25 CY1HT25 CY1HT32 30 28 26 20 20 CY1H20 CY1H15 16 13 Moment Nm Moment Nm CY1S 10 10 2 2.5 3 4 5 3 4 5 CY1H10 CY1L M3 2 CY1H10 1.5 1 1 CY1H 0.5 0.5 70 100 300 500 1000 70 100 300 500 1000 M1 M2 Piston speed mm/s Piston speed mm/s CY1F Graph (3) Graph (2

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

Model D T RS (D) 32 RS (D) 40 RS (D) 50 36 44 56 38 48 57 Figure 1 5.

AC Servo Motor Driver (CC-Link Type ）

After power-on, if the current position is with the in-position range of each station, the in position (RXn1) turns on. 15 56 15.

AC Servo Motor Driver (CC-Link Type ）

After power-on, if the current position is with the in-position range of each station, the in position (RXn1) turns on. 15 56 15.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Not required. a=1000 100 m Mey a 0 10 50 40 30 20 Transfer load m (kg) Refer to page 94 for deflection data. 68 Standard Motor/Horizontal Mount Specification Series LTF8 Dimensions/LTF8PH (2 x n1) x 6.6, Drill through 13, counter bore depth 6 thread depth 9 80 4 x M6 x 1 46 Sensor cable Sensor cable fixing clip Stroke + 96 (Table movement range) (25.5) 60 106.5 56 21.5 A 61.5 45 A 21.5 31.5

15

(Recommended height 5 mm) Dimensions [mm] Stroke L A B n D E F 50 201.5 56 160 4 20 100 251.5 106 210 4 35 150 301.5 156 260 4 35 200 351.5 206 310 6 2 240 35 250 401.5 256 360 6 2 240 35 300 451.5 306 410 8 3 360 35 350 501.5 356 460 8 3 360 35 400 551.5 406 510 8 3 360 35 450 601.5 456 560 10 4 480 35 500 651.5 506 610 10 4 480 35 550 701.5 556 660 12 5 600 35 600 751.5 606 710 12

Slider Type Ball Screw Drive/11-LEFS Series

)] (56) [54] Stroke 65 10 (2.4) [Origin] Note 4) Origin Note 3) 38 58 2 [4] 4 [2] 34 LES Motor cable (2 x 5) 57.5 6.5 LEPY LEPS 24 Vacuum port Rc1/8 13.9 48 38.5 LER 6 M4 x 0.7 thread depth 8 (F.G. terminal) LEH Motor option: With lock Step motor Servo motor (160.5) Cable length 250 LEY -X5 15 15 65 20 20 20 11LEFS 11LEFS 24 11LEJS 20 Lock cable (3.5) 24 ( ) 3H9 depth 3 +0.025 0 n x 4.5

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Refer to front matter 56 for Safety Instructions and pages 468 to 471 for Flow Control Equipment Precautions.

Stability of suction position,

changing the internal structure and materials Pad diameter: 63, 80 Compared with the ZP series ( ) * The pad material when weight was measured is NBR. 8 16.4 ZP (Current model) ZP3E ZP2/Flat type ZP3E/Flat type with groove Pad diameter Suction port Area [mm2] Suction port Area [mm2] 32 8.4 55.4 40 6 28.3 50 63 8 50.2 16.4 211 80 100 10 78.52 125 Pad diameter Weight [g] Weight [g] 32 56

Vacuum Pad

63.5 13.1 16.2 15.1 16.2 37.5 45 56 63.5 13.2 16.3 15.2 16.3 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

69 99 44 M16 x 1.5 ZPT125HB-B12 M12 x 1.75 125 129 89 135 56 69 44 -B16 M16 x 1.5 1206 Vacuum Pad: Large Size Bellows Type Vertical Vacuum Entry With Buffer Series ZPT RoHS Specifications Buffer Specifications ZA ZX 40 to 80 Vacuum entry direction 100, 125 Vertical Buffer dia.

Auto Switch Guide

RS H A Main circuit of switch Main circuit of switch OUT Black RZQ Weight MI W S DC () Blue (g) CEP1 D-F9NW(V) D-F9PW(V) D-F9BW(V) Auto switch model 0.5 7 7 7 D-F9PW, D-F9PWV CE1 Lead wire length (m) 3 34 34 32 DC (+) Brown 5 56 56 52 CE2 Dimensions ML2B OUT Black D-F9W Mounting screw M2.5 x 4l Slotted set screw C J G5-S DC () Blue Indicator light 2.7 2 CV D-F9BW, D-F9BWV MVGQ 22 2.8 2.6

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

56 173 273 113 40 4-Rc 1/8 thread depth 6.5 (Piping port) (Opposite side: Same) 183 50 293 123 208 343 75 148 (Z) (30) (30) 8 233 393 173 100 4-M5 x 0.8 thread depth 8 2-M8 x 1.25 thread depth 12 258 443 125 198 283 493 223 150 308 543 175 248 333 593 200 273 0.2 Only the CXSW32-10 has a groove cut out for installing auto switches.

MGQ

54 56 61 74.5 84 9 10 11 13.5 15.5 19 25 25 29 35.5 45.5 55.5 15 21 27 33 37 40 2 2 2 2 2.5 2.5 1 1 1 1 1.5 1.5 5 10 10 10 15 15 11 11 12.5 15 18 21 M8 x 1.25 M8 x 1.25 M8 x 1.25 25, 50 75, 100 125, 150 175, 200 124 106 48 122 90 110 M8 x 1.25 M8 x 1.25 M8 x 1.25 140 120 56 138 100 124 M10 x 1.5 M10 x 1.5 M10 x 1.5 150 130 69 148 110 132 M10 x 1.5 M10 x 1.5 M10 x 1.5 188 160 88 185 140 166

Auto Switch Guide

CLQ Main circuit of switch Main circuit of switch OUT Black MLGP Weight RLQ DC () Blue (g) MLU D-F9NW(V) D-F9PW(V) D-F9BW(V) Auto switch model 0.5 7 7 7 D-F9PW, D-F9PWV ML1C Lead wire length (m) 3 34 34 32 DC (+) Brown 5 56 56 52 DDimensions -X OUT Black D-F9W Mounting screw M2.5 x 4l Slotted set screw 20DC () Blue Indicator light 2.7 2 Data D-F9BW, D-F9BWV 22 2.8 2.6 OUT (+) Brown 4 Main

CLQ

A A1 E1 L1 NZ 16 16 20 22 28 38 44 34 41 42 56 71 79 25 30 30 40 50 55 20 25 32, 40 50, 63 80 100 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 34 41 42 56 71 79 25 30 30 40 50 55 IY-G02 16 20 IY-G03 20 22 IY-G04 36 28 IY-G05 44 38 IY-G08 56 44 IY-G10 Knuckle pin and snap ring are included. 64 Knuckle Pin (Common with double clevis pin

CG5-S

18 28 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 IY-G05SUS +0.070 0 I-G08SUS Y-G08SUS 80 80 18 18 28 28 M22 x 1.5 71 21 38 50 M22 x 1.5 21 27 71 23 35 64 50 56 21 27 IY-G08SUS +0.5 +0.3 +0.084 0 I-G10SUS Y-G10SUS 100 100 22 22 32 32 31 M26 x 1.5 79 21 45 55 M26 x 1.5 24 31 79 24 40 72 55 64 24 IY-G10SUS Knuckle joint pin Trunnion bracket Material: SUS440 (pin) SUS304 (bracket, snap ring