MIW/MIS

Auto Switch Internal Circuits Auto Switch Weights Unit: g D-F8N D-F8N D-F8P D-F8B Model DC (+) Brown 0.5 7 7 7 Lead wire length (m) 3 32 32 32 Main switch circuit Main switch circuit Main switch circuit OUT Black 5 52 52 52 DC () Blue Auto Switch Dimensions D-F8N, D-F8P, D-F8B D-F8P Mounting thread M2.5 x 4l Slotted set screw DC (+) Brown 4.3 Indicator light 2 2.7 OUT Black 10 2.8 4.6 DC

Series VQ Metal Seal/Rubber Seal Body Ported

Kit (D-sub connector) 15 pin F Kit (Flat cable connector) 10 pin, 16 pin, 20 pin P How to Order Manifold How to Order Manifold 06 FSA D VV5Q14 06 P SC VV5Q14 D Ex.) Ex.)

SMC

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B

Escapements Series MIW/MIS

Auto Switch Internal Circuits Auto Switch Weights Unit: g D-F8N D-F8N D-F8P D-F8B Model DC (+) Brown 0.5 7 7 7 Lead wire length (m) 3 32 32 32 Main switch circuit Main switch circuit Main switch circuit OUT Black 5 52 52 52 DC () Blue Auto Switch Dimensions D-F8N, D-F8P, D-F8B D-F8P Mounting thread M2.5 x 4l Slotted set screw DC (+) Brown 4.3 Indicator light 2 2.7 OUT Black 10 2.8 4.6 DC

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

/Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BAL Bore size (mm) DA B B B -X 6 10 15 20 25 32 9.8 (8.3) 11.3 3.8 13.8 24.5 (23) 26 28.5 2031 (29.5) 32.5 35 38.5 (37) 40.5 42.5 Data 39.5 (38) 41.5 33.5 43.5 50 (48.5) 52 44 54 As for auto switch mounting dimensions, auto switch mounting method and its operating range, those are the same as basic type.

CE2

For detailed specifications, refer to page 10-20-1. 50 7 63 9 80 9.5 100 10.5 CV D-Z7/Z80 D-A3/A44 D-A3C, D-A44C D-A5/A6 D-B5/B64 D-A59W D-B59W D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL D-G59F D-G39/K39 D-G39C, D-K39C MVGQ Electrical entry (Fetching direction) D-A53/A56 D-A64/A67 D-B64 D-Z80 D-F59/F5P/J59 D-F59W/F5PW/J59W

SYJ3000/5000/7000

D type DIN connector with 9.4 mm pitch between terminals is not interchangeable. 3. DIN connector except D type has the N indication in the end of voltage symbol. In case of DIN connector without light, N is not indicated. Please refer to the name plate to distinguish. 4. Dimensions are completely the same as D type connector. 5.

C95Series

I' SU tl}El absorber : Sign : Red Green: Red: D-A56 .,,'""pan" \ . position D-F59 D-F5PW D-F59F Solid State Type Internal Circuit D-J59W D-F5P D-F5LF ~~ e Black D-F58A D-J59 D-F5NT AIIID SWitches Series C95 Suppon b racketexceptcenter tll.llYioo Center trunnion , Minimum Allowable Stroke When Mounting Auto Switches .. .

MXS

CB Solid state switch: D-F9B, D-F9N, D-F9P, D-F9BW, D-F9NW, D-F9PW CV/MVG B Stroke B Stroke E Model Operating range A CXW 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXS6 MXS8 MXS12 MXS16 MXS20 MXS25 10 2 9.6 9.6 9.6 21.6 27.6 -0.4 -0.4 -0.4 11.6 17.5 CXS 11.6 2.5 14.9 9.9 10.9 18.9 26.9 51.9 4.9 -0.1 0.9 8.9 16.9 41.9 15.6 3 32.4 22.4 12.4 14.4 24.4 45.4 74.4 22.4 12.4 2.4

2/3 Port Valve

148 159.5 175.5 52 52 62 72 26 26 31 36 4.5 4.5 5.5 6.5 24.3 24.3 28.3 33.3 2.3 2.3 2.3 2.3 25 25 30 35 34 34 43 49 42 42 50 60 3 8 1 2 3 4 VNC2-10A VNC2-15A VNC3-20A 20 100 108 VNC4-25A 90 Port size: 32A, 40A, 50A Thread connection MainPort Rc(PT) Pilot port Rc(PT) A Model B C D E F H J K L 1 8 1 4 1 4 105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 229.5

5 Port Solenoid Valve SY Series

It is already built-in to the rectifier circuit. 50 60 110 VAC Hz [115 VAC Hz] 3 50 60 50 60 50 60 4 220 VAC Hz [230 VAC Hz] Electrical entry D With connector DIN terminal DC specifications of type D and DO is only available with 12 and 24 VDC.

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Refer to p.1.12-52 for DIN raile model no. Note 2)Applicable to VQZ2000 and 3000.

OMU0023

Binary digit (decimal value) 0 to 1000 ASCII hex "0" to "03E8" 52 - (c) Equivalent thrust value data A value 10x that of the equivalent thrust force value will be sent. Binary digit (decimal value) 0 to 50 ASCII hex "00" to "32" (d) Target position (encoder count value): This item is valid in Pulse Input Type control signal mode only.

240

Dimensions [mm] Model L1 L2 A B C D E F G LEPY6-25 125.6 135.6 15 21 23 28 15 28 36 LEPY6-50 156.6 166.6 22 45 30 52 22 52 60 LEPY6-75 188.6 198.6 29 70 37 77 29 77 85 381 LEPY Series Step Motor (Servo/24 VDC) Dimensions LEPY10 D E C B 2 x M5 x 0.8 x 9 2 x 4.3 through 4 22 14 +0.025 0 3H9 ( ) depth 3 +0.025 0 3H9 ( ) depth 3 Note 4) 28 Motor cable mounting direction: R (Entry on the right

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators Operating port 2 x M5 x 0.8 52 6.3 26 11 21 14 Other dimensions are the same as basic type. 814 MXQ 1322Air Slide Table Dimensions: MXQ16L / Symmetric Type 1322Basic ZZ Z Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc.

4/5 Port Air Operated Valve Series SYJA3000

67 0.39 0.18 0.69 0.39 0.12 0.44 2 position Body ported A, B port: C4 (One-touch fitting for 4) P, R port: M5 x 0.8 0.40 0.19 0.69 0.40 0.12 0.43 Closed center M5 x 0.8 SYJA520-C4 Exhaust center Pressure center Single Double 0.40 0.15 0.56 0.37 [0.37] 0.10 [0.11] 0.41 [0.41] 0.40 [0.37] 0.15 [0.10] 0.57 [0.41] 0.37 0.10 0.41 77 3 position 52 67 0.36 0.19 0.70 0.40 0.12 0.47 2 position A,

V

A N I F O L D T Y P E 40 S I D E P O R T E D DXT200-8-1A Blanking Plate Kit Stations (n) 2 3 4 5 6 7 8 9 10 L1 52 68 84 100 116 132 148 164 180 M5x0.8 L2 43 59 75 91 107 123 139 155 171 Courtesy of Steven Engineering, Inc. !

2–4

Note 12 16 20 25 32 40 50 D-F7 , J79 D-F7 V D-J79C D-F7 W, J79W D-F7 WV D-F7BAL, F7BAVL D-F7 F D-F7NTL D-F7, D-F7V D-J79, D-J79C D-F7W, D-F7WV D-J79W D-F7BAL, D-F7BAVL D-F7NTL, D-F79F Switch mounting screw (M3 x 0.5 x 10 ) Switch spacer Switch mouinting nut D-A7 , A80 D-A73C, A80C D-A7 H, A80H D-A79W 6 6 6 32, 40 50 BQ-2 D-F7LF 8 7 8 D-F9V D-F9W, D-F9WV D-F9BAL Switch mounting bracket Switch