15

500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 5 10 15 0 5 10 15 20 25 0 1 2 3 4 5 Work load [kg] Work load [kg] Work load [kg] 807 A LEFB Series Motorless Type Calculation of Guide Load Factor Mounting Orientation 1.

VFS

For details, refer to page 5-8-52.

Table of Contents

HAW7 5 37.5 47 51 38 44.5 48 43 49 54 42 47 49.5 45 48.5 52 HAW22 17 HAW37 25 Maintenance 7000 8600 10 36 Caution HAW55 1.

Solid State Auto Switches

Applicable bore size (mm) 40 50 63 80 100 Z C HW H H T T Auto switch model D-G39C-4, D-K39C-4 D-G39C-5, D-K39C-5 D-G39C-6, D-K39C-6 D-G39C-8, D-K39C-8 D-G39C-10, D-K39C-10 6.5 6.5 7.5 9.5 9.5 44 52 64 78 92 69 77 91 107 121 57 58 60.5 64 67 49.5 50.5 52 53.5 56.5 7.5 8.5 10.5 12.5 15.5 M5 x 0.8 x 16 M5 x 0.8 x 20 M5 x 0.8 x 25 1590 2-Color Indication Type Solid State Auto Switch Direct Mounting

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

Integrated Controller

supply connector (M12) 7.5 Auto switch groove (1 row per side)5 M4 x 0.7 thread depth 8 (F.G. terminal) 46.8 60 34.2 27.8 21.1 Motor option: With lock (16) (219.9) B + Stroke D x 150 (= E) 15 15 5 H9 (+0.030 0 ) depth 5 150 n x 5.5 60 5 6 5 H9 (+0.030 0 ) depth 5 5 H9 (+0.030 0 ) depth 5 10 G 25 1 When mounting the actuator using the body mounting reference plane, set the height of the

4/5 Port Air Operated Valve Series SYJA3000

SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

Weight Auto Switch Internal Circuit D-F8N (g) D-F8N D-F8P D-F8B Auto switch model DC (+) Brown 0.5 7 7 7 Lead wire length (m) 3 32 Main circuit of switch Main circuit of switch Main circuit of switch 32 32 OUT Black 5 52 52 52 DC () Blue Dimensions D-F8N, D-F8P, D-F8B D-F8P Mounting screw M2.5 x 4l Slotted set screw DC (+) Brown 4.3 Indicator light 2 2.7 OUT Black 10 2.8 4.6 DC () Blue 3.1

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Dimensions A B VQD A VQZ1000 VQZ2000 VQZ3000 67 81 93 35 43 52 VZS VFS Individual EXH spacer VVQZ1000-R-5-M5 VVQZ2000-R-5-01 VVQZ3000-R-5-02 VS M5: VQZ1000 Rc(PT)1/8: VQZ2000 Rc(PT)1/4: VQZ3000 VS7 B Used to form a separate exhaust port for an interior manifold station or stations.

MHZ

B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 A 3 4 5 6 B 5.7 7 9 12 A 3 4 5 6 Model MHZL2-101 MHZL2-161 MHZL2-201 MHZL2-251 Model MHZL2-102 MHZL2-162 MHZL2-202 MHZL2-252 MHY MHW MRHQ Flat Type Fingers [3] Misc.

MHZ

2 w i @5 !4 e !7 !1 @4 !5 !6 r t u q @3 !3 @0 !9 !

5 Port Air Operated Valve

70 51 4.4 1P 3EB 5EA 4.4 1/4, 3/8 [1 (P), 5 (EA), 3 (EB) port] 52 1504 5 Port Air Operated Valve VFA3000/5000 Series Single Unit Base Mounted RoHS How to Order Valve VFA 3 1 4 0 Base mounted (VFA1000: Not available) 02 Pilot port direction Series 3 5 VFA3000 VFA5000 Nil: Upward P: Lateral Pilot port Not available with the VFA1000.

MXS

5 !6 !7 !8 !

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

MHT MHY MHW Weight Auto Switch Internal Circuit D-F8N MRHQ (g) D-F8N D-F8P D-F8B Auto switch model DC (+) Brown Misc. 0.5 7 7 7 Lead wire length (m) 3 32 Main circuit of switch Main circuit of switch Main circuit of switch 32 32 DOUT Black 5 52 52 52 20DC () Blue Dimensions D-F8N, D-F8P, D-F8B D-F8P Mounting screw M2.5 x 4l Slotted set screw DC (+) Brown 4.3 Indicator light 2 2.7 OUT Black

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

MHT MHY MHW Weight Auto Switch Internal Circuit D-F8N MRHQ (g) D-F8N D-F8P D-F8B Auto switch model DC (+) Brown Misc. 0.5 7 7 7 Lead wire length (m) 3 32 Main circuit of switch Main circuit of switch Main circuit of switch 32 32 DOUT Black 5 52 52 52 20DC () Blue Dimensions D-F8N, D-F8P, D-F8B D-F8P Mounting screw M2.5 x 4l Slotted set screw DC (+) Brown 4.3 Indicator light 2 2.7 OUT Black

7ND9071en

Fail Action Fail to Close, Fail to Open 5 Valve Travel 85.2 % 5 Positioner Information 5 Dead Angle (a0) 0.0 % [0..99%] 6 Temperature 24.7 C 6 Units 6 Performance Level A(1)-Aggressive, b(1)-fast, C(1)-Optimum, d(1)-Stable, E-Max. stability, (1) = Capac.

Auto Switch Guide

D-X 20Weight Auto Switch Internal Circuit Data D-F8N (g) D-F8N D-F8P D-F8B Auto switch model DC (+) Brown 0.5 7 7 7 Lead wire length (m) 3 32 Main circuit of switch Main circuit of switch Main circuit of switch 32 32 OUT Black 5 52 52 52 DC () Blue Dimensions D-F8N, D-F8P, D-F8B D-F8P Mounting screw M2.5 x 4l Slotted set screw DC (+) Brown 4.3 Indicator light 2 2.7 OUT Black 10 2.8 4.6 DC

5 Port Solenoid Valve SY Series

For type W, DC voltage is only 5 16" One-touch fitting for N9 5 5 16" One-touch fitting for N9 One-touch fitting for One-touch fitting for One-touch fitting for available.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Order the seal kit, based on each bore size. 8-29-5 6 Series CXS Construction: Ball Bushing Bearing CXSL6 y!6 @6 @3r !8 @4 !9 w !3 !0 @2 ut !5 !4 @0 !1 !2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 @0!5 @9@3@4 r!8w!9 !3 i!0 @2ut!