Sine Cylinder Series REC

Stroke Against Lateral Load D 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 50 33 43 49 53 0.3 10 23 31 36 39 T 0.5 REC40 REC32 REC25 REC20 5 18 25 29 31 0.7 2 Rod side flange style: F Head side flange style: G 182 167 148 118 Foot style: L 0.3 1 L 140 128 114 90 0.5 0.5 W W W F REA 117 108 95

CLK1

171010 14 N GB W Clamp side port 3 32 45 45 BX M 3 Approx.

Clamp Cylinder with Lock Series CLK1

171010 14 N GB W Clamp side port 3 32 45 45 BX M 3 Approx.

VCW

Tilt the screwdriver down in direction q so that the clip slides out in direction w. Seal part no.

CE2

rod boot With rod boot W S P NN MM N Bore size (mm) h f e ZZ H ZZ 40 50 63 80 100 59 11.2 43 280.5 51 8 218.5 1/4 161.5 288.5 27 M14 x 1.5 66 11.2 52 304.5 58 0 235.5 3/8 175.5 312.5 30 M18 x 1.5 1/4 66 11.2 52 326 58 0 254 3/8 187 334 31 M18 x 1.5 stroke 80 12.5 65 372 71 0 284 1/2 205 37 381 M22 x 1.5 81 14 65 389 72 0 300 1/2 214 398 40 M26 x 1.5 Foot style LS + Stroke ZZ + Stroke LD

Rotary Table/

3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

sp.controller Metal Rubber Rubber w/ sp.controller Metal Rubber Rubber w/ sp.controller Metal Rubber Rubber w/ sp.controller Rubber Rubber w/ sp.controller VQZ2150lC 200 40 15 or less 20 or less VQZ2151lC Single 2 Position 3 Position 44 15 or less 20 or less VQZ2151SlC 0.7MPa Flow rate (l/min (ANR)) 10 or less 13 or less VQZ2250lC 54 15 or less 20 or less VQZ2251lC SY Double 0.5MPa 58 15

ITV

Cable connector (4-wire) Right angle type Cable connector (4-wire) Straight type 52 Mounting hole 4 x 7 40 (31) F.R.L.

Profile Design ISO/VDMA Air Cylinder Series CP95

.4 How to Order . 4-5 Technical Specifications . 6, 13 Dimensions (Cylinders). 9-12, 15-17 (Mounting Accessories) .18 Auto Switches .19-22 Guide Units.23-25 Safety Instructions.30-34 Main Index.35 1.8-3 Series CP95 ISO/VDMA Air Cylinders Specifications Type Model Bore Stroke end Rod specifications cushioning Upon receipt of order as standard Standard type 32 40 50 63 80 100 hard chromed W

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

2/3 Port Valve

Refer to Table w to select the port size of the screw-in styles (6A to 50A) and flanges (32F to 50F).

rep-modular-e

8 @8 #2 w Actuators Modular F.R.L. Pressure Control Equipment Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

MK

19.5 21.5 W 5.5 6 A 11.5 12 B 4.5 4 A 7.5 8 B 0 0 Hs 17 19 W 1.5(4) 2(4.5) A 7.5 8 B 0 0 12 16 Bore size (mm) D-F9BAL Model Symbol Bore size (mm) A 10.5 11 B 3.5 3 W 14.5 15 Hs 17 19 12 16 4.1-13 Rotary Clamp Cylinder/Heavy Duty Series MK2 20, 25, 32, 40, 50, 63 How to Order MK2 B S A73 20 10 R F Number of auto switches Rotary clamp cylinder S 2 1 Mounting Style Auto switch Symbol Through

Modular Pressure Control Equipment F.R.L. Replacement Procedure

8 @8 #2 w Actuators Modular F.R.L. Pressure Control Equipment Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

V

Light & Surge Suppressor (SY5000, 7000 Only) LZ Lead Wire w/Light & Surge Suppressor G Grommett (Lead Wire Length: 300mm) H Grommett (Lead Wire Length: 600mm) L L Type Plug with Lead Wire LO L Type Plug without Connector LOZ W/O Lead Wire, w/Light & Surge Suppressor M M Type Plug with Lead Wire MO M Type Plug without Connector MZ M Type Lead Wire w/Light & Surge Suppressor M A N U A L O V

Modular F.R.L. Unit

Nil A B C D q w e q w q w w q e q w The number inside indicates the combination order counted from the inlet side.

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 25 100 B 2 S A1 S2 w e r t u y i o !0 !

MXW

Load factor an Va Item Note CX W Examine W.

Modular F.R.L. Unit

Drain cock with barb fitting: 6 x 4 nylon tube Note 4) F Note 2) G W AFM30, 40 AFM30, 40 Note 1) Drain guide is NPT1/4 (applicable to Name plate and caution plate for bowl in imperial units (PSI, F) Note 4) Applicable tube O.D for auto drain connection should be 3/8" in case NPT thread port is chosen.

SYJ300/500/700

(For details, refer to page 4-4-25.) 4-4-20 21 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.