HRX-OM-X071

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

The ISE20CH offers a 2 MPa pressure range.  The 3-screen, 3-color display shows the instantaneous reading in red or green, and the setting label and its numerical value in orange.  The switch output responds within 1.5ms once the set pressure value is reached.  ISE20C(H) is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

The ISE20CH offers a 2 MPa pressure range.  The 3-screen, 3-color display shows the instantaneous reading in red or green, and the setting label and its numerical value in orange.  The switch output responds within 1.5ms once the set pressure value is reached.  ISE20C(H) is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

ASR

6 ASR530F-02 type ASR630F-03 type ASR530F-02 type ASR630F-03 type !8 u o !3 !8 u o !3 !7 !7 !9 !9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

3 Port Solenoid Valve Metal Seal Series VZ200 1

M plug connector, With lead wire MN: M plug connector, Without lead wire MO: M plug connector, Without connector DO: DIN terminal, Without connector VG VP S070 Type G, L, and M: Lead wire 300 mm VQ Construction (Body ported) N.C.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Check Valve Series AK 1

Male thread u r y e w e y q y u r y e w u i t q i t q i t q r y e w AS e w q w ASP o Free flow Female thread Male thread ASN Free flow One-touch fitting Male thread AQ ASV AK Component Parts ASS Description Material Note No.

PSxx-OMV0003CN

-2No.PS-OMV0003CN-G / *3) 1 1.5 *3)1 1 [] -3No.PS-OMV0003CN-G () () () () -4No.PS-OMV0003CN-G () * UL UL1310 2 UL1585 2 30 Vrms(42.4 V ) (2 ) UL (1 20 ) -5No.PS-OMV0003CN-G * FG (35 N () ,() *() 6 33 () 20 m DC(-)() * ( ) -6No.PS-OMV0003CN-G () CE 0~50(5 ) (FKMHNBR) * 1015 10 1% 1959 LCD * -7No.PS-OMV0003CN-G ISE70 02 L2 M 3 Y K T ISE70 0~1MPa ISE71 0~1.6MPa 02 Rc1/4 N02

Sine Cylinder Series REC

M 3 m L 5 m Z None N Solid state auto switches marked with are produced upon receipt of order.

Sine Cylinder Series REC

M 3 m L 5 m Z None N Solid state auto switches marked with are produced upon receipt of order.

Modular Type Regulator Series AR

type GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Pressure gauge G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 Round G46-2-02 G46-2-02 0.2MPa Note 4) Square embedded type GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.

PSxx-OMV0008CN

* 1015 10 1% 2162 LCD * -8No.PS-OMV0008CN-E ISE70G 02 L2 M 3 Y K T ISE70G 0~1 MPa ISE75G 0~2 MPa ISE76G 0~5 MPa ISE77G 0~10 MPa ISE78G 0~16 MPa 2 A A B B 02 Rc1/4 N02 NPT1/4 F02 G1/4 :ISO1179-1 1 M12 5m M12 5m T S : L IO-Link/1+2 NPNorPNP L2 1 M SI2 1 2kPaMPa / A ZS-50-A M46 2 B ZS-50-B M46 2 ZS-48-A ZS-31-B 5 m M12 ZS-31-C 5 m -9No.PS-OMV0008CN-E M12 4 24 OUT1 IO-Link

Fieldbus System

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

Soft Start-up Valve

With built-in silencer Model K L M N P Q R S T U V W X Y AV2000-m02-1 to 6D/Y(Z)m-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV3000-m03-1 to 6D/Y(Z)m-A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AV4000-m04-1 to 6D/Y(Z)m-A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AV5000-m06, 10-1 to

ARM10/11

Material Description Description q w e r t y u i o !0 !

ARM10/11

Material Description Description q w e r t y u i o !0 !

HRX-OM-S004

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m 7 Pressure gauge 0 to 1.0MPa Y-strainer Rc3/4 #40 HRS-S0378 Install either the strainer or filter.

Table of Contents

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

3 y Meter-in type Component Parts No.

LEC-OM02704CN

PD20 0 S S S S () 0 r / m i n 0 r / m i n 1 S S S S 0 r / m i n 0 r / m i n 2 S S S S S S 0 r / m i n 0 r / m i n 3 S S S S S S S 0 r / m i n 0 r / m i n 6 40 7MR Configurator 7 MR Configurator .2 7.1 .2 7.2 .3 7.3 .5 7.4 .6 7.5 .8 7.6 .10 7.7 .14 7.7.1 JOG .14 7.7.2 .17 7.7.3 .19 7.7.4 (DO) .20 7.7.5 1 .22 7.8 .24 7.8.1 .24 7.8.2 .25 7.8.3