AC Servo Motor Driver (CC-Link Type ）

Terminal signal layout For 3-phase or 1-phase 200 to 230VAC 40 For 1-phase 100 to 120VAC PE terminal 6 L1 L1 L2 L2 L3 CNP1 CNP1 2-M5 screw Screw size: M4 Tightening torque: 1.2 [N m] (10.6 [lb in]) N N P3 P1 P1 P4 P2 P2 P P C C CNP2 CNP2 D D L11 L11 L21 L21 U U Mounting hole process drawing Mounting hole process drawing CNP3 CNP3 V V W W Mounting screw Screw size: M5 Tightening torque: 3.24

Integrated Controller

[kg] Work load: W [kg] 5000 mm/s2 10 mm/s2 0 0 Speed: V [mm/s] 200 400 600 800 1000 1200 Speed: V [mm/s] EQFS32HA/Ball Screw Drive Horizontal/Lead 16 Vertical/Lead 16 60 55 50 45 40 35 30 25 20 15 10 5 0 15 Work load: W [kg] Work load: W [kg] 3000 mm/s2 10 3000 mm/s2 5 5000 mm/s2 10 mm/s2 0 0 Speed: V [mm/s] 100 200 300 400 500 600 700 800 0 Speed: V [mm/s] 100 200 300 400 500 600 700 800

Table of Contents

Note 1) Symbol P is only applicable for Type M with either auto-drain or drain-guide. Type V is not applicable because it is equipped with a relief type regulator. (Symbol P is used when it is undesirable for the air to be discharged into the main body of IDG.

Electric Slide Tables

power consumption [W] Note 6) Type Holding force [N] Power consumption [W] Note 8) 3.5 2.9 5 24 2.5 300 48 500 77 Note 7) 24 VDC 10% Rated voltage [V] Note 1) LESH25DA is not available.

4 Port Solenoid Valve Series VQD1000

Standard (2W) Vacuum (2 W) For large flow (3.2 W) For large flow, vacuum (3.2 W) Nil V U W Cylinder port (Base mounted only) Note) Note) VV061 M5 C4 M5 thread One-touch fitting for 4 Note 1) Latching type: U and W only Note 2) Latching type (-COM): NU and NW V100 1(P), 3(R) port: Rc 1/8 S070 Rated voltage How to Order Manifold Assembly VQD 24 VDC 12 VDC 5 6 Specify the part numbers for valves

Electric Actuators

Press MANUAL button ( ) once for sizing operation (speed, sizing amount are specified values) P P MOVE Test P P P Return to ORIG Compatible Compatible P Operation of the specified step data P P Test drive Compatible Compatible (Continuous operation) P Forced output Compatible ON/OFF of the output terminal can be tested.

LEC-OM02704CN

AC200230V AC100120V 40 AC100120V 6 AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 U U CNP3 V CNP3 V M5 3.24[Nm] W W 11 2 11 (2) LECSC-S8 [mm] 40 6 5 6 6 (80) 170 CNP1 () CN1 CNP2 CNP3 6 (68) (25.5) MR-J3BA MR-J3BAT 1.0[kg] .

Slider Type/Ball Bushing Bearing

W D 1.6 x P 0.1 x Wcos + Wsin D 5.0 x P 0.1 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load mass & pressure Inclined operation (For vertical operation, refer to page 1515.)

Vacuum Pad

T male thread adapter assembly (With gasket) p.3 p.3 Pad diameter Part no. 20 25 35 50 Dimensions ZP3PA-T1-A5 V V ZP3PA-T1-AG1 V V ZP3PA-T2-A12 V V ZP3PA-T2-AG2 V V ZP3PA-T2-AG3 V V p. 11 w T female thread adapter Pad diameter Part no. 20 25 35 50 Dimensions w T male thread adapter assembly w T female thread adapter ZP3PA-T1-B5 V V ZP3PA-T2-B8 V V p. 11 q Pad unit Dimensions

MY1

(Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) P (Port) W CH LH RR1 SS NE RR2 SS H PP2 QQ PP1 QQ NH NC P (Port) P (Hexagon socket head taper plug) Back port (Refer to page 39.)

Compact Vacuum Unit

0.457 0.457 0.402 0.571 V V (inch) (n1) x 0.402 L n 1 2 L1 L2 1.14 0.85 1.54 1.25 3 1.94 1.65 4 2.35 2.06 5 2.75 2.46 6 3.15 2.86 7 3.55 3.26 8 3.95 3.66 9 4.35 4.06 10 4.76 4.46 11 5.16 4.87 12 5.56 5.27 Refer to page 14 for the dimensions for the various vacuum (V) ports. 01 M5 ZB3 L(O)-P 0 1 1 3 K1 Q1 ZZB-S M5 Air pressure SUP Vacuum pressure SUP (PV) port 2 x 1/8, M5 thread depth 0.197

Secondary Batteries

/Fixed Mounting Height Heavy Duty Stopper Cylinder Floating Joint /Standard Type /For Compact Cylinders /Stainless Steel Type Shock Absorber Rotary Table/Rack & Pinion Style P.33 P.34 Auto Switches D-M9BW(V)SDPC-900 D-M9BW(V)L-900 D-Y7BW(V)L-900 D-A90L-900 D-Z80L-900 P.62 P.63 P.64 P.65 P.65 P.66 Solid State Auto Switch Direct Mounting Style 90-JA 90-JB 90-JS 90-RB/RBC 92-MSQ P.35 P.35 P.35

XL

-16 XL(A, C, H) [V]-25 XLD [V]-25 XL(F, G) [V]-16 XL(F, G) [V]-25 XLD [V]-40 XL [V]-40 XLD [V]-50 XL [V]-50 XLD [V]-63 XL [V]-63 XLD [V]-80 XL [V]-80 Construction No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

CNG

500 400 300 200 1000 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) 1000 1000 Maximum speed: V (mm/s) 9-5-7 Cylinder with Lock Double Acting

Rotary Table/Rack & Pinion Style Series MSQ

12 V Reed switch Solid state switch 12 V IC circuit Diagnostic indication (2-color display) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PAV M9BAV 12 V 3-wire (NPN equiv.)

One-touch Fittings

Symbol Size Tubing connection 001 Same diameter tubing Symbol Model Oval type Round type H Male connector v v S Hexagon socket head male connector v v F Female connector v v L Male elbow v v LU Branch male elbow v V Universal male elbow v v W Extended male elbow v v T Male branch tee v v Y Male run tee v v D Male delta union v v U Branch Y v UD Double branch Y v M5 M5 x 0.8 01 R1/8, Rc1

ZQ

x 0.5, piping not required) 71.9 (63.1) (M5 x 0.8) 66.9 Vacuum port (V port) Note 4) PE SMC (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 107 3.5 10 Note 1) The above dimensions are for ZQ11U-G2 L-DC.

The 25A- series variations are compatible with secondary battery manufacturing for electronics, automotive, and other vehicle types. 25A-ISE20C is a digital pressure sensor offering compatibility with both compressed air and non-corrosive liquids.  Compared to the 25A-ISE20, the 25A-ISE20C(H) adds a 2nd switch output, as well as analog voltage or current output.