Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: X, Z Q1 = M C1 = C L2 = L2 = D1 = L1 + (3 x P) L1 = C1 Q2 = M Q2 = M Z axis X axis L1 = X = (mm) (mm) (mm) D1 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 L1 max Size 30 50 63 80 100 X 3 to 25 3.5 to 36 3.5 to 41 4 to 50 5 to 60 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q1 M3 M4, M5, M6,

Electric Actuator with Integrated Guide

a=1000 a=2000 a=3000 L2 (mm) Mer Rolling Yawing 100 m L2 Mer 0 30 20 10 m Transfer load m (kg) 200 a=1000 a=2000 a=3000 L3 (mm) 100 L3 m Mey a 0 30 20 10 Transfer load m (kg) Refer to page 71 for deflection data. 34 38 Non-standard Motor/Horizontal Mount Specification Series LTF6 Dimensions/LTF6EPF(X10) Scale: 20% Photo micro sensor 50 30 thread depth 8 4-M5 x 0.8 E D Proximity sensor (2

ZP

A B C D L M Y A M D L B Y C Model Model ZPT40B-B-A14 ZPT20B-B5-A10 40 43 34 47.5 24.4 48 16 23.5 32.5 12.4 20 25 22 10.5 19 ZPT50B-B-A14 ZPT25B-B5-A10 50 53 38 51.5 32.4 57 24 33 15.6 25 28 27 ZPT32B-B5-A10 29 38 18.9 32 37 14 34 Dimensions by Stroke Dimensions by Stroke 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 20 25 32 Model G E F E F F E 40 50 ZPTB10-B-A14 ZPTB10-B5-A10 60

Free Mount Cylinder Series CU

, Pressure control equipment Air preparation equipment Relief port 2-M5 x 0.8 2-P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2-P through A 4-T counter bore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 GA A Bore size B C D E P R T GB GC H J MM 10 7 13 22 3 23 3.2 7 31 16 15 13 10 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89 80 85 90

Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: F02 (G1/4), Piping Entry Direction: Straight, Output Specification: B (2 PNP Outputs), Unit Specification: Unit Switching Function, Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: R (Bracket for w/o

Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: N02 (NPT1/4), Piping Entry Direction: Straight, Output Specification: B (2 PNP Outputs), Unit Specification: Unit Switching Function, Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: R (Bracket for w

Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: 02 (Rc1/4), Piping Entry Direction: Straight, Output Specification: B (2 PNP Outputs), Unit Specification: Unit Switching Function, Operation Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option

Series: 25A-PFM7, Flow Rate Range: 10 [0.2 to 10 (5) L/min], Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: B (2 PNP Outputs), Unit Specification: Unit Switching Function, Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: R (

Series: 25A-PFM7, Flow Rate Range: 50 [1 to 50 (25) L/min], Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: B (2 PNP Outputs), Unit Specification: Unit Switching Function, Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: R (Bracket

.: 25 (Port Size: 25A, Pipe O.D.: 32mm), Output Specification: B (OUT1: PNP; OUT2: PNP), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)

Electric Actuator

R M Y mKNote 3) L B + Stroke M S A + Stroke EH Note 1) Range within which the rod can move when it returns to origin.

ZP

A B C D L M Y A M D L B Y C Model Model ZPT40B-B-A14 ZPT20B-B5-A10 40 43 34 47.5 24.4 48 16 23.5 32.5 12.4 20 25 22 10.5 19 ZPT50B-B-A14 ZPT25B-B5-A10 50 53 38 51.5 32.4 57 24 33 15.6 25 28 27 ZPT32B-B5-A10 29 38 18.9 32 37 14 34 Dimensions by Stroke Dimensions by Stroke 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 20 25 32 Model G E F E F F E 40 50 ZPTB10-B-A14 ZPTB10-B5-A10 60

7.4

31.2 31.2 7 11.5 10 M5 x 0.8 2(B) port With plug connector/light 5.7 S07 5(R)-mM(O)-M5 2 A B C 8.4 18.6 19.5 M5 x 0.8 4(A) port M3 x 0.5 External pilot port (External pilot type only) 748 Base Mounted Single Unit S0700 Series Plug Lead Type Dimensions 3-Position Closed Center Grommet: S0735(R)-mG-M5 M5 x 0.8 1(P) port 21.2 SJ 11.4 5.2 7.7 M5 x 0.8 3(R) port SY 3 1 SY S0700 S0700 S0700 Manual

ZX

Nil Grommet (0.6 m) L Grommet (3 m) Nil Y M5 x 0.8 M6 x 1 (Option) C Connector (0.6 m) Filter case CL Connector (3 m) Caution 1. The case is made of polycarbonate.

Vacuum Module Series ZX

Refer to page 926 for details. (5) Digital vacuum switch unit 21 C 0X ZSE3 D 06 ZZX1 R B Unit for replacement Piping specifications Stations Supply port location 01 1 Thread type Left side Right side R L B Grommet (0.6 m) Grommet (3 m) Connector (0.6 m) Connector (3 m) Without connector Nil L C CL CN 1 8 Nil F T G Rc 08 8 Both sides NPTF System for external vacuum (3) Adsorption confirmation

Aluminum High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

SZ3000

2 B 2 B 2 B 2 PE R 3 B 2 R 3 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 24 13.3 (Pitch) P= 10.5 16.2 34 17 36.7 B 2 B 2 B 2 B 2 B 2 R 3 R 3 A 4 A 4 A 4 A 4 A 4 P 1 P 1 4-One-touch fitting (P, R ports) Applicable tube O.D.: 8 2n1-M5 x 0.8 (A, B ports) (L4) L3 (3.2) 101.2 U Side D Side 8 3.1 18 28.8 35 36.3 58.2 3.5 5.5 DIN rail Manual override

Manifold Specifications

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

KQ2

Note) D: Max. diameter P Q2 8 Q1 4.2 2 x applicable tubing L1 M D L2 A L3 D H Connection thread (With sealant) 45 Male Elbow: KQ2K Connection thread R M <M5, M6> <M5, M6> H (width across flats) Applicable tubing O.D.

Possible to transfer a workpiece at low-speed.

Next, B is entered to find A the moment of inertia for the rotation of shaft (A) as r r2 2 = m A = 2B a b No. of teeth = b D5. Solid sphere Position of rotational axis: Passing through the diameter r 2 r2 5 = m 303 CRQ2X/MSQX Series Load Type Calculation method of necessary torque depends on the load type. Refer to the table below.