Vacuum System Peripherals:

Section code 13-14-20 20 ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc. 13-14-21 Date issued: 21 Photo copying this page is recommended.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

ASR

31 57.7 10 155 178 17 36.5 65.6 6 158 181 18.5 37.5 66.6 8 18.5 23.4 48.5 24.3 20.4 53.5 R1/4 21 24.8 92.2 72 55.8 50.8 25.6 49.8 44.8 19 149 172 21 32.6 61.7 10 151 174 22 34.4 63.5 12 20.9 165 188 17 36.5 65.6 6 168 191 18.5 37.5 66.6 8 18.5 23.4 48.5 24.3 20.4 53.5 R3/8 21 24.8 93.8 73.6 57.4 52.4 25.6 51 46 20.2 159 182 21 32.6 61.7 10 161 184 22 34.4 63.5 12 20.9 292 310 21 32.6 74.8

4/5 Port Air Operated Valve Series SYJA3000 1

(Pilot port) (For mounting) 2-3.2 22 3 49 2.5 (For mounting) 2-3.2 equivalent (18.5) A B 1.5 11 17.5 Manual override A B 1.5 33 16 (18.5) (21) 18.9 13.5 15 54.5 Manual override 21.6 54.5 28.5 2-1 (Bleed port) 21 R2 P P1 P R R (11) (0.5) 13 10 5 2-1 (Bleed port) M5 x 0.8 (Piping port) 10 10 7 7 14 M3 x 0.5 28 (Piping port) 5-2-21 4 4/5 Port Air Operated Valve Series SYJA5000 How to Order

SYJA3000

SYJ7000-21-1A 1 pc. 0.2 Caution Be Sure to read before handing.

Possible to transfer a workpiece at low-speed.

400 Displacement (m) Displacement (m) 250 350 200 300 40 30 20 10 0 30 25 20 15 10 5 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 100 100 50 40 30 20 10 0 100 80 60 40 20 0 Load (N) Load (N) 336 MSQX Series Low-Speed Rotary Table Rack & Pinion Type Construction CRB2 CRB1 MSU CRJ CRA1 o i @5 @6 t y !

AC Servo Motor Driver (Pulse input type)

Refer to"LECSB Operation Manual, chapter 5 for details of each parameter. 21 - 5.3.1 Change of parameter block To enable settings for all parameters. Select Basic tab and change PA19 value to 000C. Click the PA19 row then click Selected Items Write. Cycle the power for parameters for this driver to be enabled. Please click Read".

ARJ1020F

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. 21 (Width across flats) Selection Lock nut F.R.L. Warning M12 x 1 1. This product cannot be used as a check regulator by installing it between solenoid valve and actuator. Doing so could lead to equipment damage. 2.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01MS-X3 G49-4-02MS-X3 0.4 MPa Pressure gauge G49-2-01MS-X3 G49-2-02MS-X3 Round type Note 2) 0.2 MPa G49-7-01MS-X3 G49-7-02MS-X3 0.7 MPa Note 1) Assembly includes a bracket and set nuts.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01MS-X3 G49-4-02MS-X3 0.4 MPa Pressure gauge G49-2-01MS-X3 G49-2-02MS-X3 Round type Note 2) 0.2 MPa G49-7-01MS-X3 G49-7-02MS-X3 0.7 MPa Note 1) Assembly includes a bracket and set nuts.

4/5 Port Air Operated Valve SYJA3000 Series

(Pilot port) (For mounting) 2 x 3.2 22 3 49 2.5 (For mounting) 2 x 3.2 equivalent (18.5) A B 1.5 11 17.5 Manual override A B 1.5 33 16 (18.5) (21) 18.9 13.5 15 54.5 Manual override 21.6 54.5 28.5 2 x 1 (Bleed port) 21 R2 P P1 P R R (11) (0.5) 13 10 5 2 x 1 (Bleed port) M5 x 0.8 (Piping port) 10 10 7 7 14 M3 x 0.5 28 (Piping port) 1476 4/5 Port Air Operated Valve SYJA5000 Series SYA How to

CE

131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc

CE

131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc

CQS

With rubber bumper 0.043 0.075 0.11 0.18 Minimum Operating Pressure Unit: MPa Bore size (mm) Stroke range Stroke range Stroke range Bore size Bore size 31 to 100 35 to 100 12, 16 12, 16 Min. operating pressure (MPa) 12 16 20 25 31 to 200 55 to 200 20 20 0.07 0.07 0.05 0.05 31 to 300 55 to 300 25 25 Example Model no. : CQSB25-47D -XB10 Makes 47stroke tube. B dimension is 69.5mm.

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

MRQ DC () Blue DD-F5P Weight 20DC (+) Brown (g) D-F59 D-F5P D-J59 D-J51 Auto switch model 0.5 23 23 21 21 Lead wire length (m) OUT Black 3 81 81 71 71 5 127 127 111 111 DC () Blue Dimensions D-J59 OUT (+) Brown Mounting hole Indicator light OUT () Blue D-J51 Main circuit of switch OUT Brown OUT Blue Most sensitive position 11-11-21 22 Solid State Switch Direct Mounting Style D-S99(V)/D-S9P

Thermo-chiller

Polyester band Forklift insertion side Cardboard box 800 mm Less than 150 mm 300 mm or more or more Wooden skid Forklift insertion side Less than 150 mm Model Weight [kg] Dimensions [mm] HRLE050-A-20 150 Height 1320 x Width 580 x Depth 1240 HRLE050-W-20 143 HRLE090-A-20/40 176 HRLE090-W-20/40 170 300 mm or more 500 mm or more 2. Transporting with forklift 1.

Large Bore Compact Cylinder Series CQ2

) Width across flats 55 Width across flats 55 M36 x 1.5 M36 x 1.5 21 21 47 47 50 50 64 + Stroke 64 237 + 2 (strokes) 8 Compact Cylinder Series CQ2 Reed Switches/Direct Mounting Type D-Z73/Z76/Z80 Auto Switch Specifications With indicator light D-Z73 D-Z76 Auto switch part no.

RHC

51 6 7 16 14.5 10 32 18 8 20 Up to 700 19.5 6 49.5 56.5 70 44 27 53 9 7 16 18 12 36 22 8 25 Up to 700 19.5 6 51.5 55 72 50 33 55 9 7 19 18 12 44 22 9 32 Up to 1000 21 8 51.5 56 84 60 36 66 9 9 21 20.5 16 53 24 11 40 Up to 1000 WH ZZ P 1/4 S NN ND NF NE K NC JD NB JC NA I N H MM Bore size (mm) 252 192 M22 x 1.5 15.0 13 33.5 5 5.5 30.5 30 43 26 26 22 44 M8 x 1.25 20 1/4 5.8 to 8.8 257 193

High Power Cylinder Series RHC

51 6 7 16 14.5 10 32 18 8 200 to 700 20 19.5 6 49.5 56.5 70 44 27 53 9 7 16 18 12 36 22 8 200 to 700 25 19.5 6 51.5 55 72 50 33 55 9 7 19 18 12 44 22 9 200 to 1000 32 21 8 51.5 56 84 60 36 66 9 9 21 20.5 16 53 24 11 200 to 1000 40 NN ND NF NE NC K NB JD NA JC WH N ZZ P 1/4 I MM S H Bore size (mm) M22 x 1.5 15.0 13 33.5 5.5 5 30 30.5 26 43 22 252 26 44 M8 x 1.25 192 20 1/4 M24 x 1.5 19.6

MXF

31 20.5 13 18 58 3H9 depth 3 +0.025 0 15 9.5 4-3.2 4-6.5 4.5 4.7 2-M3 x 0.5 thread depth 6 A G H 8 4-M4 x 0.7 Operating port 2-M3 x 0.5 Section AA M 8 N 2 ( 1): The number of pitches 0.3 15 (Table length) 16 4.5 J 8 Z 2.4 Max. 9 ZZ H G 3H9 depth 3 +0.025 0 21 4 3H9 depth 3 +0.025 0 (mm) ZZ Z M J H G F N Model MXF8-10 58 49.5 49 21 22 13.5 20 4 MXF8-20 63 54.5 54 26 26 14.5 26 4 MXF8-30