MHZ

MPa 10 L 0.2 MPa 0.2 MPa 5 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-16D/11-MHZ2-16D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa 0.5 MPa 40 0.4 MPa 0.4 MPa 30 0.3 MPa 0.3 MPa 20 0.2 MPa 0.2 MPa 10 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-20D/11-MHZ2-20D 100 Pressure 0.7 MPa Pressure 0.7 MPa 0.6 MPa 0.6 MPa 80 Gripping force (N) 0.5 MPa

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

40 35 190 190 190 190 190 190 190 10 10 10 10 10 10 10 10 10 10 10 10 10 10 90 80 65 50 45 40 35 60 50 50 40 40 30 20 17 23 27 33 37 44 57 36 50 66 68 78 91 115 40 54 60 72 82 95 19 40 54 60 72 82 95 19 21 27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

CJ2

B H C C d d 10 Y-J010B 15.2 8 21 M4 x 0.7 CP95 SNJ-006B 16 Y-J016B 6 NTJ-006A 16.6 11 21 M5 x 0.8 M6 x 1.0 4 8 9.2 6 M3 x 0.5 2.4 5.5 6.4 SNJ-010B 10 NTJ-010A M8 x 1.0 4 11 12.7 10 M4 x 0.7 3.2 7 8.1 NDd9 NDH10 NX R1 U1 Part no.

SV

SS5V2-10 SS5V3-10 SS5V4-10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

CY1

40 50 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY1R20 CY1R63 200 H 1000 100 Allowable driving force Fn (N) Allowable driving force Fn (N) 500 H 400 50 30 L 300 200 L 100 10 5 Useable range 20 30 40 50 Useable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 1112

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

[90.4] 300 (Lead wire length) 107 79.8 VS 45.4 45.4 11 VS7 11 A B A B 5 5 2-2.6 (Mounting holes for manifold) 10 10 (Lead wire length) 19 19 2-2.6 (Mounting holes for manifold) 300 26.6 26.6 40.6[47.1] 29.5[36] 23 23 17.1 10.5 10.5 10 2-2.6 (Mounting holes) 3 3 11 2-2.6 (Mounting holes) 10 11 15 77.4 15 77.4 [ ] for AC Other dimentions are the same as the grommet style

Aluminum High Vacuum Angle Valve

-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil None w, e w e A B C Seal material 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Symbol Nil N1 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

HRX-OM-W002

34 21 21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 2

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30,

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Model Auto switch mounting Cushion Rubber Bore size (mm) Port size Lubrication Action Standard stroke Note 2) (mm) Long stroke (mm) Note 1) Note 2) Model Air 10-/21-CG120 10-/21-CG125 10-/21-CG132 10-/21-CG140 10-/21-CG150 10-/21-CG163 10-/21-CG180 10-/21-CG1100 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 25, 50, 75, 100, 125, 150

The MXJ air slide tables integrated front mounting part and table result in a highly accurate, rigid top and front mounting surface. Clean specification styles are available with no dimensional changes. Several options are available for both the standard and the clean series MXJ. These options include a symmetric style, stroke adjusters, axial piping and auto switches., Cylinder, Air,

Swivels

Port 1 Port 2 B Port 2 PS2410202-20-20 4.67" 3.38" 2.63" 2.88" 1 1/4-11 1/2 1 1/4-11 1/2 118.6 mm 85.9 mm 66.7 mm 73.0 mm NPTF NPTF PS2410202-24-24 4.67" 3.38" 2.63" 2.88" 1 1/2-11 1/2 1 1/2-11 1/2 118.6 mm 85.9 mm 66.7 mm 73.0 mm NPTF NPTF Port 1 PS3210202-32-32 4.88" 3.58" 3.06" 3.35" 2-11 1/2 2-11 1/2 123.9 mm 90.8 mm 77.6 mm 85.1 mm NPTF NPTF Dia Wrench Flats Quick Coupling Division 8145

Battery-less

X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load

CM2

9 18 62 24 30 9 14 15.5 13 5 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 133 142 20 0 0.033 25 45 8 13 10 10 9 22 62 30 30 9 14 19.5 17 6 33.5 5.5 M10 x 1.25 15 30 M26 x 1.5 137 146 1/8 26 0 0.033 32 45 8 13 12 10 9 22 64 30 30 9 14 19.5 17 6 37.5 5.5 M10 x 1.25 15 34.5 M26 x 1.5 139 148 1/8 26 0 0.039 40 50 11 16 14 15 10 24 88 38 39 11 18 21 22 8 46.5 7 M14 x 1.5 21.5 42.5 M32 x 2 177 188 1/4 32

Proposals for Energy Saving

4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[mm] Model L A B n C D E Without lock With lock 11-LEJS40S-200523.5 563.5 206 260 6 1 200 80 11-LEJS40S-300623.5 663.5 306 360 6 1 200 180 11-LEJS40S-400723.5 763.5 406 460 8 2 400 80 11-LEJS40S-500823.5 863.5 506 560 8 2 400 180 11-LEJS40S-600923.5 963.5 606 660 10 3 600 80 11-LEJS40S-7001023.5 1063.5 706 760 10 3 600 180 11-LEJS40S-8001123.5 1163.5 806 860 12 4 800 80 11-LEJS40S-9001223.5

0.4

Purchasing order is available in units of 10 pieces. VF KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 20.5 22 16 18 20.5 22 32 35 39 43 32 35 39 43 6 8 10 12 6 8.5 10 11.5 VP4 VQ 1/2 VQ 4/5 Port plug VVQ1000-58A VQC 1/2 VQC 1/2 The plug is used to block the cylinder port.

CLA

MM I """.0 40 -500 20-500 27 30 60 96 Yo V . 44 16 32 10 85 15 26 54 10 10 M8X l .25 6 30 71 M14X1.5 M18X1.5 M1SX1 .5 M22X l .5 I 50 600 20-600 32 35 70 108 Yo V, 52 20 40 10 95 ' 7 27 59 13 12 M8X1.25 7 30 80 , 63 -600 20-800 32 35 86 11 5 Yo y. 64 20 40 10 102 17 26 67 18 15 Ml0Xl .25 7 40 99 ,. 80 -750 20 750 37 40 102 129 Yo Yo 78 25 52 14 11 3 21 30 72 23 17 M12X1.75 11 48 11 7 , 100

SYJ3000/5000/7000

length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to page 1-5-79 for dimentions with connector cable. 1-5-11 12 Series SYJ3000 2 Position Double [ ]: AC G H Grommet (G), (H): SYJ3240-M5 M5 x 0.8 (A, B port) 10 5 10 2-3.2 (For mounting) 22 2.5 Manual override B A 11 A B Courtesy of Steven Engineering