Electric Actuator

Note 10) With lock only Note 11) For an actuator with lock, add the power consumption for the lock.

HEC-OM-U015

1500 Heating capacity W Do not modify or reconstruct the unit.

Electric Slide Tables

Description Material Note 1 2 3 4 5 6 7 8 9 10 11 No.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

connector (M): 10-SYJ5223-M-M5 DIN terminal (D, Y): 10-SYJ5223-M5 M8 connector (WO): 10-SYJ5223-WO-M5 D Y Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 28.1 [35.1] 60.9 53.4 12.7 M8 x 1 32.6 42.1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 20 20 20 20 107 [111.4] 3 87.4 [91.8] 3 3 3 105.2 125.2 90.4 77.4 45.4 127 11 11 11 11 23 2 x 2.6 (For mounting) 2 x 2.6

Valve Single Unit

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

Valve Single Unit

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

Electric Grippers

Dot color 1 2 3 4 5 6 7 8 9 10 11 Insulation color Dot mark Pin no.

5 Port Solenoid Valve Series VQZ1000/2000/3000

Valves are numbered from the D side according up to the number of stations. 939 Series VQZ1000/2000/3000 Dimensions: VQZ3000-SA: EX510 Gateway System Serial Transmission System U side D side L4 L3 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32" 6, 1/4" 65.5 11 L5 (For 1/4) Manual override Output no. 16.5 + + 11.5 13 11 + + 1/4 [4(A), 2(B) port] 9 7 1/4 [1(P)

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

12 10 11 11 12 11 12 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 Closed center 50 or less 0.82 VFS4310 600 VFS4300 Exhaust center 50 or less 0.82 VFS4410 VFS4400 600 Pressure center 50 or less 0.82

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

247 16 112 170 16 34 M27 x 2 35 32 160 9 43 100 42 174 174 140 45 38 36 22 18 M16 x 2 28 17 110 275 18 140 197 18 38 M33 x 2 40 36 (mm) Without rod boot With rod boot Bore size (mm) P l R S T V W X Y H ZZ e f h ZZ 40 1/4 37 106 11 7.5 8 27 8 66 207 55 25 92 233 50 3/8 43 112 11 10 9 30 10 73 225 60 28 99 251 1/4 stroke 63 3/8 47 116 11 12 10 37 10 80 243 65 30 106 269 80 1/2 57 127 11 16

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 260.2 0.6 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 280.2 0.6 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 320.2 0.6 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 400.2 0.6 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 500.2 0.6 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 600.2 0.6 70 71 15 19 125 E5125 20 25 14 94 124

SFOD-OMT0009CN

No.SFOD-OMT0009CN-B 4 I/O // JXC73/83 Series 1. . 5 2. . 7 2.1 . 7 2.2 . 8 2.3 . 9 3. . 10 3.1 . 10 3.2 . 11 3.3 . 11 3.4 . 11 3.5 . 11 (1) . 11 (2) . 12 (3) . 13 3.6 . 14 (1) . 14 (2) . 17 (3) . 19 3.7 JOG . 20 (1) . 20 (2) . 21 (3) JOG . 22 3.8 . 23 (1) . 23 (2) . 23 (3) . 24 (4) . 24 4. . 25 4.1 . 25 4.2 . 26 4.3 . 27 (1) . 27 (2) DIN . 27 4.4 . 28 (1

SFOD-OMT0010

Mounting the controller . 11 3.3 Install the setting software and the driver . 11 3.4 Wiring and connection . 11 3.5 Power supply, Start-up of controller setting software, and Alarm check 11 (1) Supplying power . 11 (2) Start-up of controller setting software . 12 (3) Alarm check. 13 3.6 Parameters and Step data . 14 (1) Select the actuator. 14 (2) Setting parameters . 17 (3) Step data settings

HRX-OM-X037

Communication setting screen 35.Contact output 1 to 3 34.Contact input signal 33.Analog output 32.Serial communication setting screen detail setting screen setting screen setting screen 11. Temperature waveform 11.

HRX-OM-Y098

Communication setting screen 35.Contact output 1 to 3 34.Contact input signal 33.Analog output 32.Serial communication setting screen detail setting screen setting screen setting screen 11. Temperature waveform 11.

Modular/F.R.L. Units Series AC

11 6.4 AG Part no.

7.5

SOL.a () (+) SOL.a () (+) Light/surge voltage suppressor Light/surge voltage suppressor 17 16 23 22 24 SOL.b () (+) SOL.b () (+) Station 11 Station 8 SOL.b () (+) Station 11 11 SOL.a () (+) SOL.a () (+) SOL.a () (+) 15 21 Light/surge voltage suppressor Light/surge voltage suppressor Light/surge voltage suppressor SOL.b () (+) SOL.b () (+) Station 2 Station 2 15 4 4 SOL.b () (+) SOL.a ()

HRX-OM-W060

Refer to Table 5.4-11 Offset setting for details. (1) (2) Offset setting Table 5.4-11 Offset setting No. Indication Item Explanation Setting range (1) Offset Temp.

Fieldbus System

Note 2) Refer to page 11 for dimensions of D-sub communication connector, external pilot and built-in silencer.

Speed Controller with One-touch Fitting

AS3201F, AS3211F AS3301F, AS3311F AS4201F, AS4211F AS4301F, AS4311F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13, 16 10, 11, 12 1500 1000 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) 08, 09 06, 07 1000 500 500 0 0 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Note) The numbers above the flow rate characteristic curves in the charts show the applicable