Air Slide Table M8 x 1 40.8 11 14 29 18 9.5 7 5 MXQR-JS12 1.4 7 46.7 MXQR-BS16 MXQR16 M5 x 16 21 16 13.5 14 M10 x 1 M5 x 16 23 13.5 17 36 11 22 9 6 45.3 MXQR-JS16 11 67.3 MXQR-BS20 MXQR20 M6 x 20 25 22 17 19 M14 x 1.5 M6 x 18 27 12 17.5 22 46 13 35 10 67.1 MXQR-JS20 12 67.3 MXQR-BS25 MXQR25 M8 x 20 31 22 19 19 M14 x 1.5 M8 x 18 33 12 18 22 54 16 35 10 67.1 MXQR-JS25 1) Size of hexagon socket head bolt 2
Communication setting screen 35.Contact output 1 to 3 34.Contact input signal 33.Analog output 32.Serial communication setting screen detail setting screen setting screen setting screen 11. Temperature waveform 11.
Make a model selection, considering a load according to the graph on page 8-19-11.
Please do as follows when input 00 01 11 70 h into the register. RWwn+3 11 70 Fbit 8bit 7bit 0bit RWwn+4 00 01 Fbit 8bit 7bit 0bit 2When input -700.00mm into Position (RWwn+3, 4). (Full numerical data instructions, 4 Stations occupied) The position is data of the 0.01mm unit.
10.5 D-Z7/Z80 7.5 8.5 7.5 9.5 9.5 10.5 D-A5/A6 9 9 10 11 11 11 D-A59W 13 13 13 14 14 15 D-A3/A44 9 9 10 11 11 11 *1 The switch mounting bolt is supplied with the switch. * Values which include hysteresis are for reference purposes only.
0 0 Work load [lb] 0 2.2 4.4 6.6 8.8 11 Work load [lb] 0 2.2 4.4 6.6 8.8 11 2 Series LEL These graphs show the allowable value for the actuator alone.
Input correct data (step data, parameter) again and confirm operation. 3.2 Parts description 11. Setting Data Entry Data writing failure Is the data (step data or parameters) written correctly? 102 - Check the max. speed and acceleration speed of the electric actuator and be sure to input the correct parameters. 11.
Refer to Table 5.4-11 Offset setting for details. (1) (2) Offset setting Table 5.4-11 Offset setting No. Indication Item Explanation Setting range (1) Offset Temp.
How to Order Specifications 11 MSQ 10 B A90 A S Particle generation grade Grade 1 Note 1) Suction flow rate (example) 1 l/min (ANR) 11-MSQA is identical to the high precision type and 11-MSQB is identical to the basic type. Clean series Vacuum type Number of auto switches Note) Please refer to Pneumatic Clean Series catalog for further details.
J Bore size (mm) Stroke range (mm) A AL B B1 C CDH10 CX D F H1 E I J K L LL D50 63 80 100 +0.070 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 35 35 40 40 12 16 20 25 83 83 84 85 98 100 105 110 7 7 11 11 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 18 18 20 20 11 11 13 16 10 10 14 14 40 40 52 52 20 20 25 30 52 64 78 92 27 27 32 41 70 85 102 116 Up to 600 Up to 600 Up to 750 Up to 750 18 25 31.5 35.5
Dot color 1 2 3 4 5 6 7 8 9 10 11 Insulation color Dot mark Pin no.
CC-Link Ver.1.10 () (bps) 156k 625k 2.5M 5M 10M (m) 1200 900 400 160 100 *CC-Link Ver.1.00 Ver.1.00 12 - 3.2 2 ( 3 SV*.**-*.** 1 4 9 10 5 6 PMJ 7 8 () SV2.07-1.00 11 1 LED 2 CN5 CC-Link 3 STATION NO.
Rc 3/8 EXH: Rc 1/4 60 OUT (328) Tank OUT port Rc 1/2 278 180 170 4 x 11 32 32 Drain port Rc 1/4 120 180 312 460 Connected to VBA20A Connected to VBA22A Tank IN port Rc 3/8 Booster regulator IN port Rc 3/8 Booster regulator IN port Rc 3/8 EXH: Rc 3/8 EXH: Rc 3/8 (454) 442 (417) Tank OUT port Rc 1/2 (367) (367) OUT OUT 278 180 180 170 4 x 11 4 x 11 32 32 120 180 180 120 Drain port Rc 1/4 312
107.5 10 to 50 80 117.5 53.5 11 11 99 116 134 43 10 43.5 77 53.5 117.5 75, 100 53 126 10 to 50 Rod end nut L1 100 136 63 11 11 117 136 154 50 12 43.5 94 63 136 75, 100 Double clevis type: CLQD/CDLQD Double clevis type (mm) CT 4-N Cap bolt Stroke range Without auto switch With auto switch Bore size (mm) CD CT A A B CL B CL 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 36 112 126 CD hole
107.5 10 to 50 80 117.5 53.5 11 11 99 116 134 43 10 43.5 77 53.5 117.5 75, 100 53 126 10 to 50 Rod end nut L1 100 136 63 11 11 117 136 154 50 12 43.5 94 63 136 75, 100 Double clevis type: CLQD/CDLQD Double clevis type (mm) CT 4-N Cap bolt Stroke range Without auto switch With auto switch Bore size (mm) CD CT A A B CL B CL 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 36 112 126 CD hole
116.5 53.5 11 11 4 x FD FX FZ L G B + Stroke CLS A + Stroke 100 135 63 11 11 CLQ Bore size (mm) FV FX FZ G L L1 M 63 80 100 RLQ 80 99 117 92 116 136 108 134 154 38 43 50 18 20 22 43.5 53.5 53.5 60 77 94 L1 Rod end nut MLU Head Side flange style: CLQG/CDLQG Head Side Flange Style MLGP (mm) Stroke range Without auto switch With auto switch Bore size (mm) FD FT ML1C A A B B 36 46 43.5 53.5
Description Qty. 4 4 4 4 1 1 1 1 Seal Seal Seal Seal 11 11 11 11 1 1 1 1 Gasket Gasket Gasket Gasket Parts included in seal kit 12 12 12 12 1 1 1 1 Gasket Gasket Gasket Gasket 16 16 16 16 Wear ring Wear ring Wear ring Wear ring 4 4 4 4 17 17 17 17 Piston seal Piston seal Piston seal Piston seal 4 4 4 4 26 26 26 26 Seal washer Seal washer Seal washer Seal washer 2 2 2 2 A set includes all
M27 x 2 38 6.5 140 140 112 35.5 80 35 27 19 M14 x 2 27 16 34 35 34 100 160 17 110 279 18 140 197 M33 x 2 42 9 174 174 140 45 100 38 36 22 M16 x 2 28 18 38 40 43 108 (mm) Bore size (mm) Y ZZ P R S T V W X 40 8 246 1/4 37 114 11 7.5 8 27 50 10 262 3/8 43 116 11 10 9 30 63 10 280 3/8 47 120 11 12 10 37 80 13 312 1/2 57 132 11 16 13 40 100 13 340 1/2 66 140 12 20 16 47 125 15 340 1/2 77 140
10 11 10 13 7.2 7.2 b 0.18 0.24 0.18 0.24 0.28 0.25 0.16 0.26 0.26 0.27 Cv 2.4 3.0 2.4 3.0 2.4 2.8 2.4 2.8 2.4 3.3 b 0.24 0.27 0.24 0.27 0.24 0.27 0.20 0.27 0.25 0.29 Cv 3.0 3.3 3.0 3.3 2.4 2.8 2.4 3.3 2.8 3.0 C 12 13 12 13 10 11 10 13 11 12 7.0 7.0 Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber